ANL-70 Request for Quotation.doc

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Attached to
Plasma Enhanced Chemical Vapor Deposition (PECVD) System
Solicitation number
5-B176-Q-00304-00
Issued by

About this file

This is a Request for Quotation (RFQ) issued by UChicago Argonne LLC/Argonne National Laboratory seeking a Plasma Enhanced Chemical Vapor Deposition (PECVD) System with associated components. The RFQ (inquiry number 5-B176-Q-00304-00) requires quotes for seven line items including the main PECVD system with vacuum load-lock for 200mm substrates, three different substrate holders (for 100mm, 150mm, and 200mm wafers), an OEI endpoint, a 300W air-cooled LF generator, and a matching network system.

Quotes are due by February 28, 2025 and will be evaluated using Lowest Price Technically Acceptable methodology. The procurement requires compliance with Buy American Act provisions, with specific domestic content requirements of 65% through 2028 and 75% starting in 2029. Vendors must provide price justification via published price lists or comparable customer invoices, and include FOB Destination pricing to Lemont, IL. Required documentation includes completed representations and certifications (ANL-70A), evidence of technical requirement compliance per the Statement of Work dated 02/13/2025, and details on manufacturing location, proprietary status, and reseller availability. Payment terms are Net 30 days.

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Other files

File Type Posted
Addendum and Acknowledgement 2.doc DOC document
Addendum and Acknowledgement Doc.doc DOC document
ANL-70A Reps and Certs Short-04-FEB-2025.PDF PDF
Appendix D8C-12-DEC-2023.PDF PDF
Appendix A-71COM-13-FEB-2023.PDF PDF
PECVD SOW 2.13.25.pdf PDF

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Text version

ANL-70 (February 22, 2013)

UCHICAGO ARGONNE, LLC

OPERATOR OF

ARGONNE NATIONAL LABORATORY

BLDG. 201 OCF, 9700 S. Cass Ave., Lemont, IL 60439

(CONTRACT NO. DE-AC02-06CH11357)

REQUEST FOR QUOTATION

TO ALL PROSPECTIVE OFFERORS:
THIS IS NOT AN ORDER

NOTICE:

1. The right is reserved to accept or reject quotations on each item separately unless your quotation states otherwise.

2. The right is reserved to accept minor deviations from specifications herein listed or referenced.

3. Firm prices are requested. If other than firm prices are quoted, conditions of escalation are to be stated.

4. If material is packaged in returnable containers the amount of deposit, if any, is to be stated together with instructions for returning.

5. Terms and Conditions referenced below will apply to any resulting Purchase Order.

Address Reply To:
MOLLY MURTAUGH
PHONE:
(630)252-3094
Date
02/18/2025
Inquiry No.
5-B176-Q-00304-00
Quotation must be received by:
02/28/2025
ITEM NO.
QUANTITY
DESCRIPTION
UNIT PRICE
TOTAL

THE ENCLOSED BOOKLET OF Argonne Representations and Certifications FORMDROPDOWN is included as part of this request and must be completed, signed and returned with your quotation.

Please furnish quotation to supply the materials and/or services indicated on page two(2). Please send any inquiries to Molly Murtaugh at mmurtaugh@anl.gov.

****This RFP USES LOWEST PRICE, TECHNICALLY ACCEPTABLE METHODOLOGY*****

Quality Assurance Level C: See Attached Statement of Work (SOW) Offeror is requested to furnish one (1) of the following to support the offered price:

a. A published pricelist.

b. If a published pricelist is not available, please furnish a copy of an invoice to another Customer (Customer name can be removed) for the same or similar products/services as being requested by Argonne.

Any resulting Purchase Order will be subject to the Argonne Terms and Conditions attached hereto and made part of hereof and will be exempt from Illinois Occupation and Use Taxes and from Manufacturers and Retailers Excise Taxes.

We quote you F.O.B. Destination. Shipment can be made in days from receipt of order. Country of Origin: ____________

Cash Terms
Net 30 days
Will Ship Via*

NAICS:

*If Shipment will not be made via FedEX, UPS, or USPS, Please provide estimate of weight and volume _________________________________________ cft

COMPLETE AND RETURN ONE COPY

PLEASE MARK “NO BID” IF YOU CANNOT QUOTE

AUTHORIZED SIGNATURE

ITEM
NAME
MODEL/PART#
QTY
UNIT
UNIT PRICE
EXTENDED PRICE
DESCRIPTION
0001
PECVD System/Vacuum Load-Lock
1
Each

PECVD System with Vacuum Load-Lock for Ø200 mm Substrates

0002
Substrate Holder-1x100mm Wafer
1
Each

Substrate Holder for 1 X 100 mm Wafer

0003
Substrate Holder-1x150mm Wafer
1
Each

Substrate Holder Ø200 for 1 X 150 mm Wafer

0004
Substrate Holder-1x200mm Wafer
1
Each

Substrate Holder for 1 X 200 mm Wafer

0005
OEI Endpoint
1
Each

OEI (Optical Emission Interferometry) Endpoint

0006
300 W Air-Cooled LF Generator
1
Each

300 W Air-Cooled Solid-State LF Generator Operating

0007
Matching Network System/PECVD
1
Each

Matching network system for PECVD tools

ESTIMATED SHIPPING CHARGE: __________________

TOTAL LEAD TIME FROM PO TO FINAL DELIVERY: _______________

Is there only one factory location that can produce this equipment? __________ Is this equipment proprietary to your company? __________ Can this equipment be procured through resellers? ____________

*Country of Origin should be consistent with the definition stated in FAR 52.225-I for Buy American-Supplies, in which "the cost of its components mined, produced, or manufactured in the United States exceeds 60 percent of the cost of all its components, except that the percentage will be 65 percent for items delivered in calendar years 2024 through 2028 and 75 percent for items delivered starting in calendar year 2029. Components of foreign origin of the same class or kind as those that the agency determines are not mined, produced, or manufactured in sufficient and reasonably available commercial quantities of a satisfactory quality are treated as domestic. Components of unknown origin are treated as foreign."

Applicable Documentation:

The following applicable documentation is attached hereto and made a part hereof:

1. Appendix “A” Argonne Terms and Conditions for Commercial Items and Services, ANL-71-COM, dated 2/13/2023 (REVIEW)

2. D-08-C Intellectual Property Provisions, Commercial Supplies and Services Requiring Delivery of Data, ANL 562IP dated 06/2020 (REVIEW)

3. Pre-Award Information and Representations and Certifications, ANL-70A, dated 02/04/2025 (SIGN AND RETURN)

4. Statement of Work, “Plasma Enhanced Chemical Vapor Deposition (PECVD) System” dated 02/13/2025 (PLEASE PROVIDE EVIDENCE TO SUPPORT THE ADHERANCE TO THE TECHNICAL REQUIREMENTS LISTED)

Please note, inapplicable clauses are self-deleting. All quotations shall be responsive to the terms and conditions made a part of this solicitation. Any exceptions taken shall be detailed and refer to specific Articles of the Applicable Documentation.

PAGE

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