Tabletop Maskless Aligner System

Closed Solicitation Posted

Solicitation number
SLAC_368016_TabletopMasklessAlignerSystem
Agency
Responses due
Set-aside
No set-aside

Opportunity facts

Place of performance
Menlo Park, California 94025, United States
Points of contact

Notice details come from SAM.gov. Updated .

About this opportunity

Written by GovTribe AI ·

SLAC National Accelerator Laboratory, a Department of Energy facility operated by Stanford University, seeks one tabletop maskless aligner system with proposals due September 16. This is a fixed-price commercial procurement evaluated on lowest price and technically acceptable method (LPTA).

Place of performance is Menlo Park, California. The system must mount on an anti-vibration table suitable for cleanroom installation and deliver dual exposure capability in both raster and stitching-free modes with broadband and i-line photoresist exposure. Technical requirements include minimum feature size of 0.6 micrometers, minimum lines and spaces of 0.8 micrometers, CD uniformity of 0.2 micrometers (3 sigma), 256-level grayscale mode, overlay and second-layer alignment accuracy of 1 micrometer over a 50-by-50-millimeter area, draw mode functionality, and real-time autofocus with optical focusing capability. The NAICS code is 3333 (Commercial and Service Industry Machinery Manufacturing); PSC code is AJ12 (General Science and Technology R&D Services).

Subcontractors must certify compliance with the Buy American Act and complete an Injury and Illness Prevention Plan acknowledgement form compliant with DOE's Worker Safety and Health Program (10 CFR 851) prior to issuance of notice to proceed. Offerors working on-site for 30 or more eight-hour days within 12 months or subject to federal, state, or local medical or exposure monitoring programs must provide comprehensive occupational medicine services. Insurance requirements scale with award value, ranging from $2 million to $5 million in Commercial General Liability coverage naming Stanford University Board of Trustees and DOE as additional insureds. All subcontractor work is subject to SLAC's General Terms and Conditions Supplemental Rider (August 2026) and Fixed Price Commercial Supplies-Services Terms and Conditions (August 2023), incorporating Federal Acquisition Regulation provisions by reference.

Notice text

SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR. Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions.

Please review the listed requirements and provide your best and final offer for both price and lead-time.

The follow has been attached for you to complete and review:

  1. (BAA) Buy American Act Certification
  2. Representations & Certifications Rider
  3. SubcontractorFormIIPP (onsite)
  4. Certificate of Insurance (onsite)
  5. Confirm Attached SLAC terms are accepted: FP Commercial Supplies-Services T&Cs (August 2023)
  6. Confirm Attached SLAC terms are accepted: SLAC General Terms and Conditions Supplemental Rider (Rev. August 2026)
  7. Confirm Attached SLAC terms are accepted: Green On Site Services Rider(January 2025)/Non-Green On Site Services Rider(January 2025)
  1. Request for Quote:

Required item(s) listed below:

  1. Tabletop maskless aligner system                   – QTY:1

Source selection will be based on Lowest Price and Technically Acceptable Method (LPTA).

Technical evaluation criteria are as follows:

        1. System Form Factor and Vibration Isolation: Tabletop maskless lithography system mounted on an anti-vibration table suitable for cleanroom installation.
        2. Exposure Strategy and Modes: Dual exposure capability including raster mode and stitching-free mode. Light source: for exposure of broadband and special i-line photoresists
        3. Resolution and Patterning Performance: Minimum feature size ≤ 0.6 µm Minimum lines and spaces ≤ 0.8 µm CD uniformity ≤ 0.2 µm (3σ) 256-level grayscale mode
        4. Alignment System: Overlay / 2nd-layer alignment accuracy ≤ 1 µm over 50 × 50 mm² Draw Mode functionality
        5. Focusing System Real-time autofocus combined with optical focusing capability.
        6. Stage and Substrate Handling: Vacuum chuck supporting a range of sample sizes Minimum substrate size ≤ 5 mm × 5 mm Maximum substrate size ≥ 6″ Substrate thickness range covers 0.1-10 mm
        7. Data Input Compatibility: Native support for standard CAD formats including GDSII, DXF, CIF, and BMP.
        8. Service, Support, Installation, and Delivery: Availability of U.S.-based or local service support (including service contract option), installation and training included, and delivery within no more than 6 months.

Please provide a price and lead time quotation by COB 9/16/2026.

Please be advised that the requirement was also posted on SAM.gov.

Send quote to marissat@SLAC.stanford.edu.

The bid closing date for this requirement is COB 9/16/2026.

Is there any room for additional discount such as for Academic, ICPT, GSA, or Government Institutions?

If possible, please provide a link to your webpage for published price list to substantiate for the prices quoted.

  • Buy American Act Certification (BAA) applies to awards with unit price of $15,000.
  • Representations & Certifications Rider is required. Once completed the Reps and Certs is valid for one year until renewal. If you have already completed one within the year please disregard. Otherwise, please complete and return.
  • Please include in your proposals the Harmonized Tariff Schedule (HTS Code) & ECCN if applicable.
  • All subcontractors are required to register in the System for Award Management (www.sam.gov).
  • The resulting purchase order will be issued on a fixed price basis. SLAC National Accelerator Laboratory Terms and Conditions for Fixed Price Commercial Supplies and Services (Rev. August 2023), SLAC General Terms and Conditions Supplemental Rider (Rev. August 2026) and Non-Green On Site Services Rider(January 2025) will be made a part of the resulting order.
  • Payment Terms will be NET-30
  • Freight terms will be FOB Destination Prepaid and Add

You are requested to mark and identify proprietary/confidential information provided in response to the solicitation.

Contact me directly with any questions.

Kind regards,

Marissa Tanomrat

Procurement Commodities Team

SLAC National Accelerator Laboratory

2575 Sand Hill Road

Menlo Park, CA 94025

Email: marissat@slac.stanford.edu

Files

File Type Posted
SLAC General Terms and Conditions Supplemental Rider Rev August 2026.pdf PDF
F2_SubcontractorFormIIPP_Injury_Illness_Prevention_Plan_Acknowledgement_Form (Onsite).pdf PDF
E1_Non-Green_On_Site_Services_Rider_(January_2025).pdf PDF
Fixed_Price_Commercial_Supplies_and_Services_Subcontract_Aug2023.pdf PDF
F2_Certificate_of_Liability_Insurance_(Example)(Onsite).pdf PDF
01. BAA_Certification_08.29.2023_(D5) (1).pdf PDF

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