Amendment No.2 to RFQ 2024020028.pdf
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- Attached to
- High Voltage Probe Station
- Solicitation number
- RFQ_2024020028
- Issued by
-
Department of Energy Office of Science
About this file
This document is an Amendment to Request for Quote (RFQ) 2024020028 for a High Voltage Probe Station issued by the National Renewable Energy Laboratory (NREL). The RFQ seeks a probe station that can characterize novel semiconductors, such as Gallium Oxide, at high voltages. Key requirements include:
- Motorized probing stage with at least 300mm x 300mm travel and temperature range of -60°C to 300°C
- Capability to perform high voltage (up to 10kV) and DC/pulse/RF measurements with 5-6 manipulators, at least 4 of which should be high voltage-capable
- Imaging system with microscope offering 20x-500x magnification
- Vibration isolation and integration with Keysight B1505A measurement equipment
- Maximum dimensions of 55" x 51.2" for a motorized system or 49.6" x 51" for a manual system
The amendment provides clarification on several questions received, including requirements for the microscope, thermal/electrical capabilities, and footprint dimensions. Proposals are due by 5:00pm Mountain Time on 4/29/2024.
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National Renewable Energy Laboratory Managed and Operated by the Alliance for Sustainable Energy, LLC
Request for Quote (RFQ)
AMENDMENT NO. 2
RFQ 2024020028
Amendment Issue Date: 4/29/2024 Due Date for Proposals: 4/29/2024 Time Due: 5:00pm Mountain Time
1. Solicitation Type Lowest Price Technically Acceptable
Submit offers to the NREL RFQ Contact below
2. NREL RFP Contact Janelle DiGregorio, Subcontract Administrator National Renewable Energy Laboratory 15013 Denver West Parkway Golden, CO 80401 Email: Janelle.DiGregorio@nrel.gov
Amendment No. 2 is hereby issued in response to additional questions received regarding the subject Request for Quote (RFQ). Please note that some questions may have been edited to address duplicate questions or to protect business-sensitive information provided in the original questions. The essences of the original questions are not affected. Questions are in no particular order.
Most recent questions:
1. Regarding the imaging system and the requirement “and microscope with multiple objective lenses: 5x, 10x, 20x, and 50x”-> how critical is this spec and is it for the manual system or the motorized stage system?
A. We need a microscope that we can see very small details of the device we are testing. Many devices have pads around 100um. A microscope to view the device and probe placement should have somewhere between 20x-200x magnification.
Additional Question: One microscope tube that offers 2um resolution should be enough, correct? What is the requirement for FOV? Is 4mm x 4mm enough?
A. Yes, 2 um resolution with 4 mm x4 mm FOV should be enough.
2. How critical is this requirement; “Maximum dimensions for the equipment are: 48” x 48”? Can you consider 55”x 51.2” for a motorized stage prober or 49.6” x 51” for a non-motorized (manual) system?
A.The larger dimensions are ok. We would want a motorized stage.
Additional Question: a motorized system is more expensive than a manual system. Can offerors submit two proposals for you to choose from based on your final requirements?
A. Yes, you can send us both quotes. However, we are more likely to choose a motorized system.
3. The probing stage should have high voltage capability (for backside probing) -> Do you mean a backside contact and probing through the chuck?
A. Yes. For our devices we need to be able to put a probe on the back side of the device and on top.
Does that answer the question?
Additional Question: No, it doesn’t answer the question. This is not possible when you have a hot chuck or a cold chuck for that matter. To be able to probe the backside of a device, you need to have access to it, which you can’t if you have it sitting on a cold/hot chuck. For backside probing you need to have a hollow chuck and it cannot be thermal.
A. We are looking for a thermal stage which can do electrical measurements. The stage could have both thermal and electrical capability or it could come as a thermal stage with an electrical measurement system adapter. Anything else is not acceptable.
4. The system should have probe manipulators capable of reaching up to 10 kV and capable of performing Direct Current (DC)/Pulse/Radiofrequency (RF) measurements.
Additional Question: How many manipulators do you need?
A. We are expecting 5-6 manipulators where at least 4 of them should be for high voltage-current measurement.
5. The tool should have a dark box or be an enclosed system.
Additional Question: If you want the dark box for only interlock purposes, there are other ways
– like a light curtain- without putting a dark box. Having a dark box also doesn’t let you go cold unless you also have a micro chamber. We have ways of achieving both without a dark box, which also makes it convenient for the customer to use the system as there is no cover and the interlock is taken care of by the light curtain. Please clarify your need.
A. Any system that can provide a dark environment, can do both cold and hot environment electrical measurements at high voltage in a safe environment is acceptable. The cover is to provide a safe environment while doing the electrical measurement.
Questions answered under Amendment 1:
1. Samples under testing vary from 10 mm to 300 mm. The system should have at least a 300 mm probing stage. The stage should have approximately 100 mm X-Y travel distance in each direction. A motorized stage is preferable.
Q. This stage requirement does not make sense. The 100mm x 100mm x-y travel would allow NREL to only probe the middle 200mm of a 300mm wafer, is NREL certain of this specification?
A: the 100 mm x 100 mm x-y travel is the minimum distance. Any size higher would be preferable. Please adjust the number to 300 mm x 300 mm, or 200 mm x 200 mm. Thank you for the note.
2. The probing stage should have high voltage capability (for backside probing) and temperature capability. Voltage: 10 kV, Temperature: -100°C to 300°C. Any system with a larger temperature range is welcome.
Q. Will a -60-300c solution for 10kV probing be acceptable?
A: Yes, this is acceptable
3. The probe station should have an imaging system, including a display, camera, and microscope with multiple objective lenses: 5x, 10x, 20x, and 50x.
Q. Will a single 50x objective be sufficient?
A: Unfortunately, we would need at least 2 lenses, one with a lower mag, other higher. This is because of the wide range of device dimensions that we cover. Ideally, we would prefer 3.
4. The system should come with a vibration-isolated table with optical breadboard.
Q. Please explain this requirement. Will not offering a separate vibration table with an optical breadboard be suitable?
A: Yes, offering a separate vibration table with an optical breadboard would be suitable.
5. Space Requirements/ Limitations The equipment must fit in the existing space next to the
Keysight PDA. Maximum dimensions for the equipment are: 48” x 48.”
Q. Would a footprint dimension of 45.44” x 50.37” be acceptable?
A: Yes, it is acceptable
6. Can your facility supply N2 and/or chilled dry air to keep the DUT dry at -100’C? If not, what range can your facility accommodate?
A. No, we do not have LN. We have room temperature dry air.
7. Can you state the desired magnifica�on range desired rather specifying a compound microscope? The microscope scope you have outline has 500X magnifica�on.
A. 20X-500X would be ideal. 100X-500X would be acceptable.
8. The chiller for use with the thermal chuck in the probe sta�on is a separate, standalone component. Does the 48” square restric�on require both the probe sta�on and the chiller be within the 48” square?
A. We are flexible in terms of the footprint. Ideally it would be under 48”X72” but we have some wiggle room.
7. Can you accept -60°C as the minimum temperature?
A. Yes, -60 would be acceptable.
8. The probing stage should have high voltage capability (for backside probing) -> Do you mean a backside contact and probing through the chuck?
A. Yes. For our devices we need to be able to put a probe on the back side of the device and on top. Does that answer your question?
9. Is this vibra�on isola�on table breadboard a must, specifically the breadboard part? Can the vibra�on isola�on be integrated with the system for a more seamless solu�on? Why is a breadboard needed?
A. Vibration isolation can be integrated with the system. The idea behind the breadboard is to allow us to customize the setup in case we need to.
10. How cri�cal is this requirement; “Maximum dimensions for the equipment are: 48” x 48”? Can you consider 55”x 51.2” for a motorized stage prober or 49.6” x 51” for a non-motorized (manual) system?
A. The larger dimensions are ok. We would want a motorized stage.
11. Is it important to be solu�ons partner with Keysight?
A. It is absolutely critical that the equipment is designed to work with the Keysight B1505A, including integration with the safety interlocks.
12. Regarding the imaging system and the requirement “and microscope with mul�ple objec�ve lenses: 5x, 10x, 20x, and 50x”-> how cri�cal is this spec and is it for the manual system or the motorized stage system?
A. We need a microscope that we can see very small details of the device we are testing. Many devices have pads around 100um. A microscope to view the device and probe placement should have somewhere between 20x-200x magnification.
Submit offers to the NREL RFQ Contact below
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