NIST_SB134115RQ0551_SOW.pdf

Customizable FIB-SEM Statement of Work/Specifications

All items shall be new. Prototypes, demonstration models, used or refurbished instruments will not be considered for award.

All offerors shall provide a quotation for the following line items:

LINE ITEM 0001: Quantity One (1) Customizable Focused Ion beam scanning electron microscope

(FIB-SEM) which shall consist of the following components and shall meet or exceed all of the functional requirements as specified below for each component:

1. SEM Electron Optics and Source:

1.1. The instrument shall have a thermal (Schottky-type) field emission electron source (emitter) with beam current capability adjustable between 10 pA and 200 nA. Stronger consideration shall be given to systems with a lower minimum current and a higher maximum current.

1.2. The emitter shall be "field" replaceable (i.e., on NIST site), and emitter replacement shall be covered under the standard service contract. The time to exchange the emitter, bakeout the gun chamber and then take the first image shall be less than 48 hr.

1.3. The emitter shall have a minimum lifetime of 2000 hours of operation.

1.4. The beam voltage shall be variable, with a minimum range from 0.5 keV to 30 keV. The Offeror shall report the voltage increments available on their instrument as part of the required quotation submissions. (See addendum to FAR 52.212-1 Quotation Preparation Instructions under Technical

Capability for further details). Stronger consideration shall be given to a larger voltage range that extends to lower energies.

1.5 The microscope shall enable beam deceleration (BD) or equivalent technology for electron landing energies below 0.5 keV and imaging under these conditions. Stronger consideration shall be given to a lower minimum landing energy.

1.6 The electron optics system shall have fast beam blanking with inputs for control by an external source.

1.7. The instrument shall be equipped with both beam-current and specimen-current monitors (e.g., Faraday cups or sample current measurement). The monitors shall be displayed in the SEM GUI.

1.8. The instrument shall be equipped with aids (e.g., an image wobbler) to facilitate aperture centering, beam alignment, and stigmating.

1.9. The instrument shall have both manual and automatic stigmation controls.

1.10. An electronic image shift of at least 10 micrometers (+/- 5 micrometers) in both X and Y directions shall be provided.

2. Imaging Performance and Detectors

2.1. Minimum spot size (resolution) shall be demonstrated on gold particles on carbon specimen or other high contrast specimen. The Offeror shall include digital images to support the following spot sizes

(or best achievable) for secondary electron imaging as part of the required quotation submissions (See addendum to FAR 52.212-1 Quotation Preparation Instructions under Technical Capability for further details):

≤ 1.2 nanometers resolution at 30.0 keV

≤ 2.0 nanometers resolution at 1.0 keV

Stronger consideration shall be given to smaller spot size limits.

2.2. An image resolution equivalent to, or better than, the best resolution submitted by Offeror in response to Specification 2.1 shall be reproduced on site at NIST after installation and before acceptance.

2.3. The system shall be equipped at a minimum with the following detectors (multiple imaging capabilities can be combined in a single detector). Additional detectors will be specified as options below:

2.3.1. In-lens secondary electron (SE) detector. Stronger consideration shall be given for a user controlled adjustable bias or energy filtering.

2.3.2. Conventional (off axis) Everhardt-Thornley SE detector. Stronger consideration shall be given for a user controlled adjustable bias or energy filtering.

2.3.3. Back-scattered electron (BSE) detector (in-lens or external). Stronger considerations shall be given to a BSE detector with variable user controlled energy threshold and to a directional segmental

BSE detector for compositional, topographical and 3D imaging.

2.3.4 Secondary ion detector.

2.4. Operation of all detectors shall be integrated into the instrument control software. Stronger consideration shall be given to instruments capable of acquiring at least two detector signals simultaneously.

2.5. The detectors shall allow imaging with signal to noise ratios (SNR) greater than 1 under typical image acquisition conditions. Stronger consideration shall be given to higher signal to noise ratios.

3. FIB System

3.1 The instrument shall be equipped with a gallium liquid metal ion source (LMIS) with current capability adjustable between 1 pA and 50 nA. Stronger consideration shall be given to lower minimum current and higher maximum current.

3.2 The LMIS shall have a minimum lifetime of 2000 uA-hours.

3.3 The LMIS shall have a minimum spot size (resolution) no larger than 3 nm, based on a statistical analysis of at least 50 edges in a sample FIB image.

3.4 An image resolution equivalent to, or better than, the best resolution determined in Sections 3.3 shall be reproduced on site at NIST after installation and before acceptance.

3.5 The FIB column shall have clearance in the region of the LMIS of at least 25 mm on three sides, with at least one side free of obstructions for at least 500 mm. Stronger consideration shall be given to more clearance around the source portion of the FIB column.

4. Stage and Sample Handling

4.1 The system shall be equipped with a motorized, 5-axis, eucentric and/or compucentric stage.

4.2 The stage shall accept standard Si wafers at least 100 mm in diameter.

4.3 The stage range of motion shall be at least:

X – continuous, 100 mm

Y – continuous, 100 mm

Z – continuous, 50 mm

Tilt – continuous, 0 to 60 degrees

Rotation – continuous, 360 degrees

Stronger consideration shall be given to larger tilt range, including negative angles, and larger X, Y, Z ranges

4.4 Stage motion shall be controlled through the computer interface, both via the GUI and using a joystick or similar device. Stage translation velocity shall scale with SEM image magnification. The microscope shall be equipped with a means (software limits, collision alarm, etc.) to prevent collisions between the stage and other microscope components such as the electron gun or ion gun pole pieces.

4.5 The Offeror shall provide information on accuracy, precision, and reproducibility of stage drives and associated motors as part of the required quotation submissions. (See addendum to FAR 52.212-1

Quotation Preparation Instructions under Technical Capability for further details). Stronger consideration shall be given to a higher accuracy, precision and reproducibility.

4.6 The Offeror shall provide information on the combined drift rate of the sample stage and electron optics system as part of the required quotation submissions. (See addendum to FAR 52.212-1 Quotation

Preparation Instructions under Technical Capability for further details). Stronger consideration shall be given to a lower drift rate.

4.7 The system shall be supplied with a minimum of the following sample mounts: cross section holder; 60 degree tilt holder; a small sample holder. These holders shall not use adhesive for mounting due to known contamination problems. Acceptable solutions include mechanical clips or screw-down mountings.

4.8 The stage shall have the capability to isolate the specimen from the ground potential and a feed through shall be provided to measure the current absorbed by the specimen.

4.9 The stage shall be mounted on a pull-out door to allow full access to the sample region for ease of mounting and demounting samples, making electrical connections, and adding customizations to the sample holder.

4.10 The stage shall be fully compatible with an atomic force microscope option, as described in option 1, below.

5. Work Chamber and Vacuum System

5.1 The vacuum system shall be entirely oil-free (no diffusion or oil-sealed rotary pumps) and fully automatic and interlocked to protect the instrument, sample, and attachments during power surges or power loss.

5.2 The work chamber shall be equipped with a full-sized pull-out door on which the sample stage shall be mounted. This door shall be easily removed and replaced by technically skilled users.

5.3 The work chamber shall have a minimum interior size of 320 mm width x 310 mm depth. A larger work chamber will allow for more flexibility in adding NIST-built customized in situ electrical and optical diagnostics which are planned for this instrument. Stronger consideration shall be given to larger work chamber dimensions.

5.4 The door shall have a minimum width of 320 mm and a minimum height of 310 mm. Larger door dimensions will allow more flexibility in making customized sample stage modifications which may be part of future NIST-built enhancements to the instrument. Stronger consideration shall be given to larger door dimensions.

5.5 The work chamber shall have a variety of ports of varying size and location for mounting of custom feedthroughs and auxiliary experimentation equipment. Stronger consideration shall be given to systems with higher number and variety of ports.

5.6 The microscope shall be equipped with an infrared (IR) TV camera (“chamber scope”) including connection to specimen chamber and associated electronics to monitor sample/stage positions.

5.7 The work chamber shall be fully compatible with an atomic force microscope option, as described in option 1, below.

6. Computer Control / Automation

6.1 The computers controlling the FIB-SEM system and any options shall use the Microsoft

Windows operating system. All computers shall have the appropriate licenses for the operating system, and any other software needed to operate. Any software upgrades, patches or new optional modules released by Contractor during the initial warranty period shall be supplied free of charge.

6.2 The Offeror shall provide documentation for both the hardware and software computer components. Computers shall be configured (memory, processor, disc storage, video) with no less than the minimum requirement to perform the necessary tasks.

6.3 All functions of the SEM and FIB systems shall have an easy to understand and use GUI. The user shall have the ability to store and recall multiple alignments and microscope settings.

6.4 The computer control display shall allow the operator to select all standard FIB and SEM functions.

6.5 The software shall be configured to allow access to low level FIB and SEM functions through an

API consisting of an appropriate library of subroutines which can be called by user generated code in a language such a C++ or python. Full documentation of this API shall be provided. Stronger consideration shall be given to systems with a more complete set of library routines.

6.6 Images shall be stored in standard image formats (TIFF, JPG) annotated with imaging and acquisition parameters. Annotation information shall be customizable.

6.7 SEM scan rates shall extend from standard TV rates to at least 100 s/frame.

6.8 SEM spot mode, reduced raster scan and scan rotation shall be available.

6.9 Basic SEM metrology capability shall exist in the control software. It shall include “point-to-point” measurements as standard. All scale information shall be correct to within 5% across the entire magnification range.

6.10 FIB and SEM electronics shall be completely independent systems. It shall be possible to operate the SEM without the FIB electronics, and vice versa. Any software interlocks or interdependencies between the two systems shall be capable of being disabled by NIST technical staff. Offeror shall provide technical details for this operation if necessary.

6.11 The system shall provide a means for monitoring FIB milling with the SEM. Stronger consideration shall be given to systems allowing real-time observation of milling.

6.12 FIB control shall include the capability of producing patterns including lines, rectangles, polygons, circles, donuts, as well as arrays of these patterns. Complete control of FIB pattern generation shall be possible via user-created data files. Full documentation of this data interface shall be provided at time of delivery.

6.13 FIB spot mode, reduced raster scan and scan rotation shall be available.

7. Laboratory and Utility Requirements

7.1. Electrical Power

The FIB-SEM System, as quoted, shall function continuously to specification with power at 208 volts

AC, 60 Hz, 3 phase, 4 wire with a maximum voltage variation from normal of +/-7.5% and maximum voltage unbalance of +/-2.5%.

The FIB-SEM system including any or all options purchased shall be completely protected against damage from unexpected power loss, brown outs, surges, transients, and sags.

All additional transformers, power supplies, or other power conditioning equipment needed for operation of the instrument shall be supplied by the Contractor and delivered with the system.

7.2. Cooling Water

The System shall function continuously to specification with cooling water at a temperature of 30 degrees

Celsius maximum and a pressure of 407 kPa. All additional coolers, water-cooled water re-circulators, and other equipment needed for operation of the instruments shall be supplied by the Contractor.

7.3. Compressed Air

While the laboratory in which the System will be installed provides compressed air, and this air may be used by the System if needed, the continuity of this supply cannot be guaranteed. The FIB-SEM shall be protected from a power failure in the event of a simultaneous compressed air outage in the laboratory. The

Contractor shall provide all compressors, buffer tanks, regulators, delivery valves, fittings, and other materials needed for the instrument to operate safely.

LINE ITEM 0002: Quantity One (1) Lot, Documentation:

1. Instruments shall be supplied with full documentation including instrument user guides and operations manuals (hard and soft copies), installation routing diagrams, connection schematics, and service/maintenance manuals.

2. The Contractor shall provide to NIST personnel, within 30 days after award is made, information necessary for adapting a magneto-optical trap ion source to be used in place of the LMIS. This information shall consist of at a minimum: (1) machine drawings with dimensions of the section of the

FIB column that mates to the LMIS, and (2) a schematic of the entire ion optical column with dimensions, suitable for input into ion ray tracing software. If requested, NIST personnel will sign the standard NIST non-disclosure agreement. Stronger consideration shall be given to offerors willing to provide more detailed information.

LINE ITEM 0003: Quantity One (1) job, Installation:

The Contractor shall install the System including, at a minimum, uncrating/unpackaging of all equipment, set-up and hook-up of all equipment, start-up, and demonstration of all required specifications. Installation shall take place within four weeks of delivery.

Within two weeks of award, the Contractor shall provide a list of installation and facilitation requirements, including house services (for example, electrical power, vacuum, compressed air, cooling water, and HVAC) and furniture (for example, desks, chairs or cabinetry), with explanations. NIST shall provide any required connections to house services.

The Contractor shall provide qualified personnel to supervise and perform the installation and all activities necessary to ensure the system is 100% functional and meets or exceeds all required specifications. Personnel performing the installation shall be factory trained on all aspects of the specific model of equipment supplied in this acquisition.

The Contractor’s installation personnel shall also perform all diagnostic tests after installation in the presence of NIST personnel.

Diagnostic test data shall clearly document that the equipment meets or exceeds all of the Government’s required specifications.

This test data will be reviewed by the NIST COR. Upon review, the COR shall provide final acceptance of the equipment.

Any required rework and re-testing shall be completed at no additional cost to the Government within a mutually agreed upon time by the Government and the Contractor.

Installation shall be scheduled in advance, with the NIST COR.

LINE ITEM 0004: Quantity One (1) job, Training:

The Contractor shall provide training on-site at NIST Gaithersburg for a minimum of 3 (three) NIST personnel. This training may commence immediately upon completion of installation and demonstration of specifications, but shall commence no later than two weeks after installation.

Training shall include, at a minimum, a thorough demonstration of all equipment functions, equipment operation which will allow NIST personnel to operate the system to its full capabilities, and basic troubleshooting.

Training shall be scheduled in advance, with the NIST COR.

OPTION LINE ITEMS

LINE ITEMS 0005-0014

Line Items 0005-0014 are option line items. The Contractor shall provide pricing for these items. Award of option line items is at the sole discretion of the Government in accordance with 52.217-7 and 52.217-

9.All option line items shall include complete installation.

LINE ITEM 0005: Quantity One (1): In-situ Atomic Force Microscope (AFM), which shall meet or exceed the following minimum specifications:

1. AFM system shall be fully compatible with FIB-SEM working chamber and sample stage.

Stronger consideration shall be given to systems allowing safe transport of air-sensitive samples from a glovebox to the sample stage.

2. The Offeror shall provide information on SEM viewing angle range and working distances accessible with AFM in place as part of the required quotation submissions. (See addendum to FAR

52.212-1 Quotation Preparation Instructions under Technical Capability for further details). Stronger consideration shall be given to systems allowing larger range of SEM viewing angles and shorter SEM working distances.

3. AFM system shall be capable of performing at least both AFM and STM measurements.

Stronger consideration shall be given to systems capable of performing additional modes, including lateral force microscopy (LFM), magnetic force microscopy (MFM), Kelvin probe force microscopy

(KPFM), scanning capacitance microscopy (SCM), electrostatic force microscopy (EFM), and scanning spreading resistance microscopy (SSRM).

4. The AFM shall have a scanner range of at least 25 um in x and y, and 6 um in z.

5. The AFM shall have a Z-noise floor of 50 pm or less.

6. The AFM shall be capable of single atom resolution.

7. The AFM shall have a digital resolution of less than 13 pm in x and y and less than 1 pm in z.

8. The possibility shall exist for installing or removing the AFM in the field. Offeror shall provide a description of the steps/process necessary to effect installation or removal of the AFM in the field. (See addendum to FAR 52.212-1 Quotation Preparation Instructions under Technical Capability for further details). Stronger consideration shall be given to systems where this process is simple and quick, as illustrated in the description of the steps/process provided.

9. The AFM system shall include all control electronics necessary to perform each mode the system is capable of.

10. The AFM system shall include all software necessary for operation in each mode the system is capable of.

11. The AFM control software may run simultaneously with the FIB-SEM software on the computer(s) supplied with the FIB-SEM, or it may run on a stand-alone system. Stronger consideration shall be given to systems where data acquisition allows integration of FIB-SEM and AFM functionalities.

LINE ITEM 0006: Quantity One (1): Scanning transmission electron microscopy (STEM) detector for imaging of electron-transparent samples, which shall meet or exceed the following minimum specifications:

1. Shall include necessary sample holders for standard 3 mm TEM grids.

2. When not in use, the STEM detector shall not interfere with the operation of any other component of the microscope.

3. STEM detector shall allow working distances less than 10 mm when in operation.

LINE ITEM 0007: Quantity One (1): Cathodoluminescence (CL) detector, which shall meet the following minimum specification:

1. Suitable for detecting photoemission from samples during electron and/or ion irradiation.

LINE ITEM 0008: Quantity One (1) lot: Accessories package, which shall meet the following minimum specification:

1. Accessories needed to reduce sample and chamber contamination, such as plasma cleaner.

LINE ITEM 0009: Quantity One (1): Combination energy dispersive x ray spectroscopy (EDS) and electron backscatter diffraction (EBSD) data acquisition system, which shall meet or exceed the following minimum specifications:

1. System shall be capable of both EDS and EBSD data acquisition and analysis.

2. System shall include a high-speed, high sensitivity camera optimized for integration with the FIB-

SEM system. Camera shall be capable of acquiring up to 600 indexed points per second.

3. Camera shall include an integrated forward scatter detector for orientation, topographic, and phase contrast imaging.

4. Camera shall be mounted on a bellows-sealed motorized interface to preserve vacuum integrity.

5. System shall include all software for data acquisition and analysis of EDS and EBSD data.

6. Software shall include both streamlined workflow operation, as well as full access to, and control of, advanced features.

7. Software shall include automated optimization of EBSD camera settings.

LINE ITEM 0010: Quantity One (1): Manual sample exchange load lock, which shall meet or exceed the following minimum specification:

1. Load lock shall allow rapid exchange of samples.

LINE ITEM 0011: Quantity One (1): Service contract/extended warranty, which shall meet or exceed the following minimum specifications:

1. The Contractor shall provide as an option an annual service contract which meets the same requirements as the warranty outlined below. The service contract shall commence when the warranty expires and continue for a 12 month period.

OPTION LINE ITEM 0012, Quantity (1): Service Contract/Extended Warranty, as specified in the attached Statement of Work, to commence upon expiration of CLIN 0011, if exercised.

OPTION LINE ITEM 0013, Quantity (1): Service Contract/Extended Warranty, as specified in the attached Statement of Work, to commence upon expiration of CLIN 0012, if exercised.

OPTION LINE ITEM 0014, Quantity (1): Service Contract/Extended Warranty, as specified in the attached Statement of Work, to commence upon expiration of CLIN 0013, if exercised.