Attachment 3 Dated January 20, 2026

Vendor performance requirements Vendor Experience & Proven Installations Offeror shall have successfully manufactured, delivered, and installed a minimum of five

(5) units of comparable equipment within the past five (5) years for research laboratories, universities, or equivalent institutions.

“Comparable equipment” is defined as equipment of equal or greater complexity, capability, and performance specifications as described in this solicitation.

Evidence of such installations shall include:

Customer organization name and address Contact person (name, title, phone, email) Date of delivery and installation Summary of operational performance and period in service

Maintenance Support Offeror shall provide a written warranty with coverage terms, duration, and guaranteed response times for on-site service.

Offeror shall provide evidence that service maintenance agreements are available which include the availability of replacement parts and trained service personnel throughout the expected lifecycle of the equipment (at least 7 years).

Remote Demonstration Capability Requirement The offeror shall provide a remote demonstration of comparable equipment in operation, either at a customer site or through a factory demonstration, at the request of NLR.

Failure to satisfactorily demonstrate equipment performance will result in removal from further technical consideration.

Installation location and utility requirements Physical Space & Location Constraints Pathing to the installation location has the following restrictions:

• The unit(s) must be able to fit through a roll-up loading dock door that is 8’ wide and 10’ tall. See the attached drawing.

• The unit(s) must be moved through a section of hallway (transit area) that has overhead obstacles at 9’ above floor level. See attached drawing.

The installation location has the following restrictions:

• The fully assembled tool, including all ancillary equipment and egress requirements, must fit in the cross-hatched area defined within the attached drawing.

• Egress-related requirements:

o There is a safety-related egress requirement that necessities a ≥36” wide path exist to allows people to vacate the adjacent lab. One example path that satisfies this criterion is shown in the drawing.

o Equipment access and maintenance panels must be configured such that they do not interfere with the egress path. An example of a configuration violating this would be an access panel that opens in a way that blocks the path of egress for the worker, such as a door that only open 90 degrees blocking their only path around equipment. In such a case, the door would need to either open 180 degrees, open 90 degrees but into the dead-end direction, or be a panel that needs to be removed entirely for work.

o Any area requiring access for equipment maintenance requires a minimum of 28” of clearance between the tool and the wall, or other fixed obstacle.

o Positioning must allow for chamber door positioning and module loading, given the positioning of adjacent equipment and walls.

• Final tool height is restricted to 12’ high within 3’ of the facility walls (to accommodate existing utility lines) but can be up to 18’11” high within the interior of the space.

Utility constraints:

• Electrical power consumption shall be less than 160 kW

• Chamber cooling water energy requirement must be less than 239,000 btu/h (70

KW) with a cooling water ΔT between inlet and outlet of 16 deg F (8.9 deg C).

• The system (chamber and all associated equipment) must dissipate less than 12,000 btu/h of heat to ambient air.

• To assist with ensuring cooling requirements can be met, submit the following information:

o With 55 deg F (12.8 deg C) entering water temperature (EWT), what is the expected water temperature rise (delta T) and chilled water (CHW) flow through the chamber?

o How much heat will the chamber dissipate into the lab space environment under normal operating conditions?

• Note, this location does not have access to LN2 for chamber cooling.