80GSFC21Q0004 - Mask Aligner

Closed Solicitation Posted

This opportunity was awarded. See the award notice from .

Solicitation number
80GSFC21Q0004
Agency
Goddard Space Center National Aeronautics and Space Administration
Responses due
Set-aside
No set-aside

Opportunity facts

NAICS code
333242 Semiconductor Machinery Manufacturing
PSC
3670 Specialized Semiconductor, Microcircuit, And Printed Circuit Board Manufacturing Machinery
Place of performance
Greenbelt, Maryland 20771, United States

Notice details come from SAM.gov. Updated .

About this opportunity

The National Aeronautics and Space Administration Goddard Space Flight Center is seeking proposals for a contact mask aligner system with align-for-bond capabilities for use in its Detector Development Lab. The system must be capable of aligning masks to substrates up to 200mm in diameter and exposing ultraviolet light through the mask. Proposals will be evaluated based on technical capability, past performance, and price, with the non-price factors significantly more important than price. Questions are due by December 31, 2021 and proposals are due by January 7, 2022.

There is no set-aside designated for this procurement. The NAICS code is 333242 with a size standard of 1500 employees. The successful offeror must complete factory acceptance testing within 7-8 months, ship the system within 8 months, install and assemble it within 8-11 months, and complete final acceptance testing within 12 months of award. Training must also be completed within 12 months. The period of performance is 12 months and place of performance is the Goddard Space Flight Center in Greenbelt, Maryland.

Notice text

3 versions

Update #3 · Latest ·

The purpose of this amendment 00002 is to provide answers to questions received in response to the posting and extend the proposal due date from 01/14/2022 to 01/21/2022. All other terms and conditions remain unchanged.

****************************************************************************************************************************************************

The purpose of this amendment 00001 is to extend the proposal due date from 01/07/2022 to 01/14/2022. All other terms and conditions remain unchanged.

****************************************************************************************************************************************************

This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice.  This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued.

This notice is being issued as a Request for Quotation (RFQ) under solicitation number 80GSFC21Q0004 for a contact mask aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL). The system has two main functions: 1) to align a mask to a substrate (typically a wafer) and, 2) to expose ultra-violet (UV) light onto the substrate through the mask.

The provisions and clauses in the RFQ are those in effect through FAC 2021-07.

The NAICS Code and Size Standard are 333242 and 1500 employees, respectively.  The offeror shall state in their offer their size status for this acquisition.

All responsible sources may submit an offer which shall be considered by the agency.

Delivery to NASA Goddard Space Flight Center (GSFC) is required within 32 weeks after receipt of order.  Delivery shall be free on board (FOB) Destination.

Additional delivery instructions are outlined in the attached Mask Aligner and Align-for-Bond SOW.

Offers for the items(s) described above are due by 4:30 PM EST on January 14, 2022 to Stephanie.D.Stephens@nasa.gov and Giulietta.R.Dahl@nasa.gov and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative.  Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL:https://www.gsa.gov/forms-library/solicitationcontractorder-commercial-items

The following clauses and provisions are incorporated; full text of the clauses and provisions may be accessed electronically at:

FAR - https://www.acquisition.gov/browse/index/far          

NFS - https://www.hq.nasa.gov/office/procurement/regs/NFS.pdf

Offerors shall provide the information required by FAR 52.212-1, Instructions to Offerors-Commercial Items (JUN 2020) which is incorporated by reference. Addenda to FAR 52.212-1 are as follows:

52.204-7                System for Award Management (OCT 2018)

52.204-16              Commercial and Government Entity Code Reporting (AUG 2020)

52.204-24              Representation Regarding Certain Telecommunications and Video

Surveillance Services or Equipment (OCT 2020)

52.204-26              Covered Telecommunications Equipment or Services-Representation

(OCT 2020)

52.209-7                Information Regarding Responsibility Matters (OCT 2018)

52.217-5                Evaluation of Options (JULY 1990)

52.225-25              Prohibition on Contracting With Entities Engaging in Certain activities

or Transactions Relating to Iran—Representation and Certifications (JUN 2020)

1852.233-70          Protest to NASA (DEC 2015)

If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled “Buy American Act – Supplies,” the offeror shall so state and shall list the country of origin.

FAR 52.212-2, Evaluation -- Commercial Items (OCT 2014). The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforming to the solicitation will be most advantageous to the Government, price and other factors considered. The following factors are in descending order of importance and shall be used to evaluate offers: 1) Technical Capability of the items offered to meet the Government requirement, 2) Past Performance and, 3) Price. Technical capability and past performance, when combined, are significantly more important than Price.

The proposal shall contain a narrative describing the technical approach for fulfilling the Mask Aligner requirements.  If the proposed equipment can exceed the requirements listed in the Statement of Work (SOW), the vendor shall indicate a list of equipment capabilities having such technical merit as this may be considered in the technical appraisal.  Preference may be given to Offerors whose Mask Alignment unit is a production model with multiple similar units. Thus having greater than 5 similar units working in the field demonstrating all capabilities listed in the SOW may be considered favorably.

The Offeror’s proposal shall also demonstrate a verified track record of technical competence in producing mask and wafer alignment systems meeting each of the requirements listed in the SOW. Offeror’s shall provide a list of tools in the field as well as companies or government entities in which these tools were provided.  Offeror’s shall also provide a brief history in the field as well as a history of experience with bonding equipment as it pertains to the align-for-bonding requirement. If applicable, a description of experience of align-for-bond capability and functionality with various bonding systems, in addition to stating the number of units in the field utilizing this function shall be provided. 

The vendor shall ensure that products and services that use the Internet Protocol provide full feature functionality in both dual stack (IPv4 and IPv6) and IPv6-only environments in compliance with NIST USGv6 Testing Program, see Special Publication 500-267, A Profile for IPv6 in the U.S. Government – Version 1.0.  The vendor shall identify all contract specifications that do not comply with providing full feature functionality for IPv6.

In accordance with CIO Directives and with agency Enterprise Architecture and Technical Reference Model (TRM), this acquisition requires all functionality, capabilities and features to be supported and operational in both a dual-stack IPv4/IPv6 environment and an IPv6 only environment.  Furthermore, all management, user interfaces, configuration options, reports and other administrative capabilities that support IPv4 functionality will support comparable IPv6 functionality.  Respondents are required to have their products tested in an IPv6 certified 3rd party test facility to ensure it works in an IPv6 only environment and meets this requirement.  Agency reserves the right to require the respondent to provide additional information on any product capabilities that are identified as not being IPv6 capable.

In accordance with FAR 11.002(g), NFS 1811.101-70, and CIO Directives, this acquisition must comply with the NIST USGv6 Profile and IPv6 Test Program (http://www-x.antd.nist.gov/usgv6/supply.html). In addition, respondents are required to provide a Suppliers Declaration of Conformity (SDOC) or certify that the product operates on a platform that has an SDOC based on the attached Enclosure 1, “NASA Baseline IPv6 Requirements” or product specific “IPv6 requirements” and in accordance with NIST SP 500-267, NIST SP-273, and NIST SP 500-281.” If an SDOC is not immediately available, respondents must commit in writing to complete the necessary testing and provide the SDOC.

The offeror shall submit existing product literature in addition to information on previously performed contracts or on-going contracts that are similar to the statement of work/item description in the solicitation performed for Federal, State, or local Governments, and for commercial firms. Information shall be provided on either 1) all such contracts within the past three years, or 2) the last three such contracts performed, whichever is fewer, and shall be limited to the name and address of the organization for which the product was supplied and services were performed and the number (phone and fax) of a contact for each contract listed. The information should also include,  discussion of any major problems encountered on the contract listed and the corrective actions taken to resolve them. The information may also include a description of any quality awards earned by the offeror. The Government reserves the right to obtain information for use in the evaluation of past performance from any and all sources including sources outside of the Government. Offerors lacking relevant past performance history will not be evaluated favorably or unfavorably on past performance. However, the quote of an offeror with no relevant past performance history, while not rated favorably or unfavorably for past performance, may not represent the most advantageous quote to the Government and thus, may be an unsuccessful quote when compared to the responses of other quotes. The offeror should provide the information requested above for past performance evaluation, or affirmatively state that it possesses no relevant directly related or similar past performance.

All offerors shall include a completed copy of FAR 52.212-3, Offeror Representations and Certifications -- Commercial Items (OCT 2020) – Alternate I (OCT 2014), or complete electronic annual representations and certifications at SAM.gov with its offer.

FAR 52.212-4, Contract Terms and Conditions-Commercial Items (OCT 2018) is applicable. Addenda to FAR 52.212-4 are as follows:

52.252-2 CLAUSES INCORPORATED BY REFERENCE (FEB 1998)

This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es):

Federal Acquisition Regulation

https://www.acquisition.gov/browsefar

NASA FAR Supplement (NFS) clauses: 

https://www.hq.nasa.gov/office/procurement/regs/NFS.pdf

(End of clause)

Clause No.             Title

52.204-4                Printed or Copied Double-Sided on Postconsumer Fiber Content Paper (MAY 2011)

52.204-13              System for Award Management Maintenance (OCT 2018)

52.204-18              Commercial and Government Entity Code Maintenance (AUG 2020)

52.204-19              Incorporation by Reference of Representations and Certifications.

(DEC 2014)

52.232-11              Extras. (APR 1984)

52.242-13              Bankruptcy (JUL 1995)

52.242-15              Stop Work Order (AUG 1989)

52.247-34              F.o.b. Destination (JAN 1991)

52.253-1                Computer Generated Forms. (JAN 1991)

1852.203-71          Requirement to Inform Employees of Whistleblower Rights (AUG

2014)

1852.215-84          Ombudsman (NOV 2011)*

1852.223-75          Major Breach of Safety or Security (FEB 2002) - Alternate I (FEB

2006)

1852.237-73          Release of Sensitive Information (JUN 2005)

*The Center Ombudsman can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html.

1852.216-78 Firm Fixed Price (DEC 1988)

The total firm fixed price of this contract is $To Be Proposed (TBP).

(End of clause)

1852.232-80  Submission of Vouchers/Invoices for Payment (APR 2018)

(a) The designated payment office is the NASA Shared Services Center (NSSC) located

at FMD Accounts Payable, Bldg. 1111, Jerry Hlass Road, Stennis Space Center,

MS 39529.

(b) Except for classified vouchers, the Contractor shall submit all vouchers and invoices

using the steps described at NSSC’s Vendor Payment information web site at:

https://www.nssc.nasa.gov/vendorpayment. Please contact the NSSC Customer Contact Center at 1-877-NSSC123 (1-877-677-2123) with any additional questions or comments.

(c) Payment requests.

(1) The payment periods are stipulated in the payment clause(s) contained in this

contract.

(2) Vouchers submitted under cost-type contracts and invoices submitted under

fixed-price contracts shall include the items delineated in FAR 32.905(b) supported by relevant back-up documentation. Back-up documentation shall include at a minimum, the following information:

(i) Vouchers.

(A) Breakdown of billed labor costs and associated contractor generated supporting documentation for billed direct labor costs to include rates used and number of hours incurred.

(B) Breakdown of billed other direct costs (ODCs) and associated contractor generated supporting documentation for billed ODCs.

(C) Indirect rate(s) used to calculate the amount of billed indirect expenses.

(D) Progress reports, as required.

(ii) Invoices.

(A) Description of goods and services delivered as part of the contract’s terms and conditions, including the dates of delivery/performance.

(B) Progress reports, as required.

(C) Date goods and services were performed.

(iii) Fee vouchers.

(A) Listing of all provisionally-billed fee by period or date earned since contract award.

(B) A reconciliation of all billed and earned fee.

(C) A clear explanation of the fee calculations.

(d) Non-electronic payment requests. The Contractor may submit a non-electronic voucher/invoice using the steps for non-electronic payment requests described at

https://www.nssc.nasa.gov/vendorpayment, when any of the following conditions are met:

(1) The Contracting Officer administering the contract for payment has determined, in writing, that electronic submission would be unduly burdensome to the

Contractor.

(2) The contract includes provisions allowing the contractor to submit vouchers or invoices using the steps for non-electronic payment requests. In such instances the Contractor agrees to submit non-electronic payment requests using the method or methods specified in Section G of the contract.

(e) Improper vouchers/invoices. The NSSC Payment Office will notify the contractor of

any apparent error, defect, or impropriety in a voucher/invoices within seven calendar days of receipt by the NSSC Payment Office. Inquiries regarding requests for payment should be directed to the NSSC as specified in paragraph (b) of this section.

(f) Other payment clauses. In addition to the requirements of this clause, the Contractor

shall meet the requirements of the appropriate payment clauses in this contract when submitting payment requests.

(g) In the event that amounts are withheld from payment in accordance with provisions

of this contract, a separate payment request for the amount withheld will be required before payment for that amount may be made.

(End of clause)

1852.225-70 Export Licenses (FEB 2000)

(a) The Contractor shall comply with all U.S. export control laws and regulations, including the International Traffic in Arms Regulations (ITAR), 22 CFR Parts 120 through 130, and the Export Administration Regulations (EAR), 15 CFR Parts 730 through 799, in the performance of this contract. In the absence of available license exemptions/exceptions, the Contractor shall be responsible for obtaining the appropriate licenses or other approvals, if required, for exports of hardware, technical data, and software, or for the provision of technical assistance.

(b) The Contractor shall be responsible for obtaining export licenses, if required, before utilizing foreign persons in the performance of this contract, including instances where the work is to be performed on-site at [insert name of NASA installation], where the foreign person will have access to export-controlled technical data or software.

(c) The Contractor shall be responsible for all regulatory record keeping requirements associated with the use of licenses and license exemptions/exceptions.

(d) The Contractor shall be responsible for ensuring that the provisions of this clause apply to its subcontractors.

(End of clause)

1852.245–74 Identification and Marking of Government Equipment. (JAN 2011)

(a) The Contractor shall identify all equipment to be delivered to the Government using

NASA Technical Handbook (NASA–HDBK) 6003, Application of Data Matrix Identification Symbols to Aerospace Parts Using Direct Part Marking Methods/Techniques, and NASA Standard (NASA–STD) 6002, Applying Data Matrix Identification Symbols on Aerospace Parts or through the use of commercial marking techniques that: (1) are sufficiently durable to remain intact through the typical lifespan of the property: and, (2) contain the data and data format required by the standards. This requirement includes deliverable equipment listed in the schedule and other equipment when no longer required for contract performance and NASA directs physical transfer to NASA or a third party. The Contractor shall identify property in both machine and human readable form unless the use of a machine readable-only format is approved by the NASA Industrial Property Officer.

(b) Equipment shall be marked in a location that will be human readable, without

disassembly or movement of the equipment, when the items are placed in service unless such placement would have a deleterious effect on safety or on the item’s operation.

(c) Concurrent with equipment delivery or transfer, the Contractor shall provide the

following data in an electronic spreadsheet format:

(1) Item Description.

(2) Unique Identification Number (License Tag).

(3) Unit Price.

(4) An explanation of the data used to make the unique identification number.

(d) For equipment no longer needed for contract performance and physically transferred

under paragraph (a) of this clause, the following additional data is required:

(1) Date originally placed in service.

(2) Item condition.

(e) The data required in paragraphs (c) and (d) of this clause shall be delivered to the

NASA center receiving activity listed below:

Goddard Space Flight Center

Building 30, Code 553

Greenbelt, MD 20771

(f) The contractor shall include the substance of this clause, including this paragraph (f),

in all subcontracts that require delivery of equipment.

(End of clause)

GSFC 52.211-90 Supplies and/or Services To Be Provided. (SEP 2017)

The Contractor shall provide all resources (except as may be expressly stated in the contract as furnished by the Government) necessary to deliver and/or perform the items below in accordance with the Statement of Work (SOW), incorporated as Attachment A.

Item

Description

Reference (SOW Section)

Schedule

Delivery Method/Addressee(s)

1

Planned Design of tool and list of required utilities

Scope (b) & Deliverables

2 weeks from contract award date

Schedule meeting the Contracting’s Officer Representive (COR) and Electronic Format of design and list of utilities to COR

2

Factory Acceptance Test

Deliverables

Within 7 – 8 months from date of award

Electronic Format (report)

3

Shipping of tool

Scope (e) & Task or requirements (14.25)

Within 8 months of date of award

Shipping to GSFC

4

Installation/Assembly of tool

Installation/Assembly

Within 8 – 11 months of date of award date

GSFC

5

Final Acceptance Testing

Deliverables

Within 12 months of date of award

GSFC

6

Training

Training

Within 12 months of date of award

GSFC

7

Final Acceptance of Tool

Deliverables

Within 12 months of date of award.

GSFC

GSFC 52.211-91 Scope of Work. (FEB 2016)

The Contractor shall provide the personnel, materials, and facilities, except as otherwise specified in this contract, necessary to perform the work and to furnish the items specified in the Supplies and/or Services To Be Provided clause of this contract in accordance with the Statement of Work, Attachment A.

(End of clause)

GSFC 52.211-101 List of Attachments. (FEB 2016)

The following documents are attached hereto and made a part of this contract:

Attachment

Description

Date

No. of Pages (including the cover page)

A

SOW – Mask Aligner

12/20/2021

7

(End of clause)

GSFC 52.217-92 Period of Performance (JAN 2014)

The period of performance of this contract shall be for a period of 12 months from the contract effective date of TBD. 

(End of clause)

GSFC 52.232-95 Invoices – Submission of (MAR 2018)

(a) Payment Office. The designated payment office is the NASA Shared Services Center (NSSC) located at FMD Accounts Payable, Bldg. 1111, Jerry Hlass Road, Stennis Space Center, MS 39529.  Please contact the NSSC Customer Contact Center at 1-877-NSSC123 (1-877-677-2123) with any additional questions or comments.

(b) Invoices.  Except for classified invoices, invoices shall be prepared in accordance with the invoicing instructions in FAR 52.212-4(g). In addition, invoices shall be submitted using the steps described at the NSSC’s Vendor Payment information web site at https://www.nssc.nasa.gov/vendorpayment. 

(c) Improper invoices. The NSSC Payment Office will notify the contractor of any apparent error, defect, or impropriety in any invoices within seven calendar days of receipt by the NSSC Payment Office. Inquiries regarding requests for payment should be directed to the NSSC as specified in paragraph (b) of this section.

(d) In the event that amounts are withheld from payment in accordance with provisions of this award, a separate payment request for the amount withheld will be required before payment for that amount may be made.

(End of clause)

Item No.

Description

Unit

Qty

Unit Price

Total Amount

(1)

Planned Design of tool and list of required utilities

Each

1

To Be Determined (TBD)

TBD

(2) & (3)

Completion of factory acceptance testing and Shipping of tool to GSFC

Each

1

TBD

TBD

(6)

Training

Each

1

TBD

TBD

(7)

Final Acceptance of Tool

Each

1

TBD

TBD

  1. The Contractor may submit requests for payment not more frequently than monthly, in a form and manner acceptable to the Contracting Officer.  Unless otherwise authorized by the Contracting Officer, all delivery - payments in any period for which payment is being requested shall be included in a single request, appropriately itemized and totaled. 
  1. The Contractor shall not be entitled to payment of a request for delivery payment prior to successful accomplishment and acceptance of the item by the Government. The Contracting Officer shall determine whether the item for which payment is requested has been successfully accomplished and accepted by the Government in accordance with the terms of the contract.  The Contracting Officer may, at any time, require the Contractor to substantiate the acceptable performance of the services provided or supplies delivered.

GSFC 52.247-94 Shipping Instructions--Central Receiving. (FEB 2016)

Shipments of the items required under this contract shall be to:

Receiving Officer

Goddard Space Flight Center

Building 35, Code 279

Greenbelt, Maryland  20771

Marked for:

Technical Officer:  Timothy M Miller, Code 553

Building:  11

Room:  E013

Contract No.:  TBD

Item(s) No.:  1 - 7

Compliance with this clause is necessary to assure verification of delivery and acceptance and prompt payment.

If this is a fixed price type contract, delivery--for purposes of the Prompt Payment Act--must be through the above shipping address unless another location has been authorized by the Contracting Officer.  If delivery is made to other than the Receiving Officer listed above and shipment to that other location has not been authorized by the Contracting Officer, a delivery for the purposes of the Prompt Payment Act has not occurred and no interest penalty under the Act shall result.  Shipment to other than Receiving Officer listed above will be construed as contract noncompliance.

(End of clause)

FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items (APR 2021), is applicable and the following identified clauses are incorporated by reference: 

52.203-6, Restrictions on Subcontractor Sales to the Government (JUN 2020), with Alternate I (OCT 1995)

52.204-10, Reporting Executive Compensation and First-Tier Subcontract Awards (JUN 2020)

52.209-6, Protecting the Governments Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment. (JUN 2020)

52.209-9, Updates of Publicly Available Information Regarding Responsibility Matters (OCT 2018)

52.219-8, Utilization of Small Business Concerns (OCT 2018)

52.219-28, Post Award Small Business Program Rerepresentation (NOV 2020)

52.222-3, Convict Labor (JUN 2003)

52.222-19, Child Labor Cooperation with Authorities and Remedies (APR 2021)

52.222-21, Prohibition of Segregated Facilities (APR 2015)

52.222-26, Equal Opportunity (SEP 2016)

52.222-35, Equal Opportunity for Veterans (JUN 2020)

52.222-36, Affirmative Action for Workers with Disabilities (JUN 2020)

52.222-37, Employment Reports on Veterans (JUN 2020)

52.222-40, Notification of Employee Rights Under the National Labor Relations Act (DEC 2010)

52.222-50, Combating Trafficking in Persons (Oct 2020)

52.223-18, Encouraging Contractor Policies to Ban Text Messaging While Driving (JUN 2020)

52.225-1, Buy American Act-Supplies (JAN 2021)

52.225-13, Restrictions on Certain Foreign Purchases (FEB 2021)

52.232-33, Payment by Electronic Funds Transfer System for Award Management (OCT 2018)

This is not a Defense Priorities and Allocation System (DPAS) rated order.

NASA Clause 1852.215-84, Ombudsman, is applicable.  The Center Ombudsman for this acquisition can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html 

This posting, in addition to any attached documents, will be available on www.Sam.gov. Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any).

Prospective offerors are encouraged to notify this office of their intent to submit an offer.

All contractual and technical questions must be submitted electronically via email to Stephanie.D.Stephens@nasa.gov and Giulietta.R.Dahl@nasa.gov, not later than December 31, 2022at 4:30 PM EST.  Telephone questions will not be accepted.

Responses to this combined synopsis/solicitation must be received via email no later than 4:30 PM EST on January 14, 2022.    

The Government is not responsible for any failure attributable to the transmission or receipt of documents submitted using electronic means, including the missing of any established deadlines.

Failure to submit a complete electronic proposal by the due date and time specified for this RFQ shall result in the proposal being considered late and shall be handled in accordance with FAR 52.212-1 (JUN 2020).

Update #2 ·

The purpose of this amendment 00001 is to extend the proposal due date from 01/07/2022 to 01/14/2022. All other terms and conditions remain unchanged.

****************************************************************************************************************************************************

This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice.  This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued.

This notice is being issued as a Request for Quotation (RFQ) under solicitation number 80GSFC21Q0004 for a contact mask aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL). The system has two main functions: 1) to align a mask to a substrate (typically a wafer) and, 2) to expose ultra-violet (UV) light onto the substrate through the mask.

The provisions and clauses in the RFQ are those in effect through FAC 2021-07.

The NAICS Code and Size Standard are 333242 and 1500 employees, respectively.  The offeror shall state in their offer their size status for this acquisition.

All responsible sources may submit an offer which shall be considered by the agency.

Delivery to NASA Goddard Space Flight Center (GSFC) is required within 32 weeks after receipt of order.  Delivery shall be free on board (FOB) Destination.

Additional delivery instructions are outlined in the attached Mask Aligner and Align-for-Bond SOW.

Offers for the items(s) described above are due by 4:30 PM EST on January 14, 2022 to Stephanie.D.Stephens@nasa.gov and Giulietta.R.Dahl@nasa.gov and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative.  Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL:https://www.gsa.gov/forms-library/solicitationcontractorder-commercial-items

The following clauses and provisions are incorporated; full text of the clauses and provisions may be accessed electronically at:

FAR - https://www.acquisition.gov/browse/index/far          

NFS - https://www.hq.nasa.gov/office/procurement/regs/NFS.pdf

Offerors shall provide the information required by FAR 52.212-1, Instructions to Offerors-Commercial Items (JUN 2020) which is incorporated by reference. Addenda to FAR 52.212-1 are as follows:

52.204-7                System for Award Management (OCT 2018)

52.204-16              Commercial and Government Entity Code Reporting (AUG 2020)

52.204-24              Representation Regarding Certain Telecommunications and Video

Surveillance Services or Equipment (OCT 2020)

52.204-26              Covered Telecommunications Equipment or Services-Representation

(OCT 2020)

52.209-7                Information Regarding Responsibility Matters (OCT 2018)

52.217-5                Evaluation of Options (JULY 1990)

52.225-25              Prohibition on Contracting With Entities Engaging in Certain activities

or Transactions Relating to Iran—Representation and Certifications (JUN 2020)

1852.233-70          Protest to NASA (DEC 2015)

If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled “Buy American Act – Supplies,” the offeror shall so state and shall list the country of origin.

FAR 52.212-2, Evaluation -- Commercial Items (OCT 2014). The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforming to the solicitation will be most advantageous to the Government, price and other factors considered. The following factors are in descending order of importance and shall be used to evaluate offers: 1) Technical Capability of the items offered to meet the Government requirement, 2) Past Performance and, 3) Price. Technical capability and past performance, when combined, are significantly more important than Price.

The proposal shall contain a narrative describing the technical approach for fulfilling the Mask Aligner requirements.  If the proposed equipment can exceed the requirements listed in the Statement of Work (SOW), the vendor shall indicate a list of equipment capabilities having such technical merit as this may be considered in the technical appraisal.  Preference may be given to Offerors whose Mask Alignment unit is a production model with multiple similar units. Thus having greater than 5 similar units working in the field demonstrating all capabilities listed in the SOW may be considered favorably.

The Offeror’s proposal shall also demonstrate a verified track record of technical competence in producing mask and wafer alignment systems meeting each of the requirements listed in the SOW. Offeror’s shall provide a list of tools in the field as well as companies or government entities in which these tools were provided.  Offeror’s shall also provide a brief history in the field as well as a history of experience with bonding equipment as it pertains to the align-for-bonding requirement. If applicable, a description of experience of align-for-bond capability and functionality with various bonding systems, in addition to stating the number of units in the field utilizing this function shall be provided. 

The vendor shall ensure that products and services that use the Internet Protocol provide full feature functionality in both dual stack (IPv4 and IPv6) and IPv6-only environments in compliance with NIST USGv6 Testing Program, see Special Publication 500-267, A Profile for IPv6 in the U.S. Government – Version 1.0.  The vendor shall identify all contract specifications that do not comply with providing full feature functionality for IPv6.

In accordance with CIO Directives and with agency Enterprise Architecture and Technical Reference Model (TRM), this acquisition requires all functionality, capabilities and features to be supported and operational in both a dual-stack IPv4/IPv6 environment and an IPv6 only environment.  Furthermore, all management, user interfaces, configuration options, reports and other administrative capabilities that support IPv4 functionality will support comparable IPv6 functionality.  Respondents are required to have their products tested in an IPv6 certified 3rd party test facility to ensure it works in an IPv6 only environment and meets this requirement.  Agency reserves the right to require the respondent to provide additional information on any product capabilities that are identified as not being IPv6 capable.

In accordance with FAR 11.002(g), NFS 1811.101-70, and CIO Directives, this acquisition must comply with the NIST USGv6 Profile and IPv6 Test Program (http://www-x.antd.nist.gov/usgv6/supply.html). In addition, respondents are required to provide a Suppliers Declaration of Conformity (SDOC) or certify that the product operates on a platform that has an SDOC based on the attached Enclosure 1, “NASA Baseline IPv6 Requirements” or product specific “IPv6 requirements” and in accordance with NIST SP 500-267, NIST SP-273, and NIST SP 500-281.” If an SDOC is not immediately available, respondents must commit in writing to complete the necessary testing and provide the SDOC.

The offeror shall submit existing product literature in addition to information on previously performed contracts or on-going contracts that are similar to the statement of work/item description in the solicitation performed for Federal, State, or local Governments, and for commercial firms. Information shall be provided on either 1) all such contracts within the past three years, or 2) the last three such contracts performed, whichever is fewer, and shall be limited to the name and address of the organization for which the product was supplied and services were performed and the number (phone and fax) of a contact for each contract listed. The information should also include,  discussion of any major problems encountered on the contract listed and the corrective actions taken to resolve them. The information may also include a description of any quality awards earned by the offeror. The Government reserves the right to obtain information for use in the evaluation of past performance from any and all sources including sources outside of the Government. Offerors lacking relevant past performance history will not be evaluated favorably or unfavorably on past performance. However, the quote of an offeror with no relevant past performance history, while not rated favorably or unfavorably for past performance, may not represent the most advantageous quote to the Government and thus, may be an unsuccessful quote when compared to the responses of other quotes. The offeror should provide the information requested above for past performance evaluation, or affirmatively state that it possesses no relevant directly related or similar past performance.

All offerors shall include a completed copy of FAR 52.212-3, Offeror Representations and Certifications -- Commercial Items (OCT 2020) – Alternate I (OCT 2014), or complete electronic annual representations and certifications at SAM.gov with its offer.

FAR 52.212-4, Contract Terms and Conditions-Commercial Items (OCT 2018) is applicable. Addenda to FAR 52.212-4 are as follows:

52.252-2 CLAUSES INCORPORATED BY REFERENCE (FEB 1998)

This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es):

Federal Acquisition Regulation

https://www.acquisition.gov/browsefar

NASA FAR Supplement (NFS) clauses: 

https://www.hq.nasa.gov/office/procurement/regs/NFS.pdf

(End of clause)

Clause No.             Title

52.204-4                Printed or Copied Double-Sided on Postconsumer Fiber Content Paper (MAY 2011)

52.204-13              System for Award Management Maintenance (OCT 2018)

52.204-18              Commercial and Government Entity Code Maintenance (AUG 2020)

52.204-19              Incorporation by Reference of Representations and Certifications.

(DEC 2014)

52.232-11              Extras. (APR 1984)

52.242-13              Bankruptcy (JUL 1995)

52.242-15              Stop Work Order (AUG 1989)

52.247-34              F.o.b. Destination (JAN 1991)

52.253-1                Computer Generated Forms. (JAN 1991)

1852.203-71          Requirement to Inform Employees of Whistleblower Rights (AUG

2014)

1852.215-84          Ombudsman (NOV 2011)*

1852.223-75          Major Breach of Safety or Security (FEB 2002) - Alternate I (FEB

2006)

1852.237-73          Release of Sensitive Information (JUN 2005)

*The Center Ombudsman can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html.

1852.216-78 Firm Fixed Price (DEC 1988)

The total firm fixed price of this contract is $To Be Proposed (TBP).

(End of clause)

1852.232-80  Submission of Vouchers/Invoices for Payment (APR 2018)

(a) The designated payment office is the NASA Shared Services Center (NSSC) located

at FMD Accounts Payable, Bldg. 1111, Jerry Hlass Road, Stennis Space Center,

MS 39529.

(b) Except for classified vouchers, the Contractor shall submit all vouchers and invoices

using the steps described at NSSC’s Vendor Payment information web site at:

https://www.nssc.nasa.gov/vendorpayment. Please contact the NSSC Customer Contact Center at 1-877-NSSC123 (1-877-677-2123) with any additional questions or comments.

(c) Payment requests.

(1) The payment periods are stipulated in the payment clause(s) contained in this

contract.

(2) Vouchers submitted under cost-type contracts and invoices submitted under

fixed-price contracts shall include the items delineated in FAR 32.905(b) supported by relevant back-up documentation. Back-up documentation shall include at a minimum, the following information:

(i) Vouchers.

(A) Breakdown of billed labor costs and associated contractor generated supporting documentation for billed direct labor costs to include rates used and number of hours incurred.

(B) Breakdown of billed other direct costs (ODCs) and associated contractor generated supporting documentation for billed ODCs.

(C) Indirect rate(s) used to calculate the amount of billed indirect expenses.

(D) Progress reports, as required.

(ii) Invoices.

(A) Description of goods and services delivered as part of the contract’s terms and conditions, including the dates of delivery/performance.

(B) Progress reports, as required.

(C) Date goods and services were performed.

(iii) Fee vouchers.

(A) Listing of all provisionally-billed fee by period or date earned since contract award.

(B) A reconciliation of all billed and earned fee.

(C) A clear explanation of the fee calculations.

(d) Non-electronic payment requests. The Contractor may submit a non-electronic voucher/invoice using the steps for non-electronic payment requests described at

https://www.nssc.nasa.gov/vendorpayment, when any of the following conditions are met:

(1) The Contracting Officer administering the contract for payment has determined, in writing, that electronic submission would be unduly burdensome to the

Contractor.

(2) The contract includes provisions allowing the contractor to submit vouchers or invoices using the steps for non-electronic payment requests. In such instances the Contractor agrees to submit non-electronic payment requests using the method or methods specified in Section G of the contract.

(e) Improper vouchers/invoices. The NSSC Payment Office will notify the contractor of

any apparent error, defect, or impropriety in a voucher/invoices within seven calendar days of receipt by the NSSC Payment Office. Inquiries regarding requests for payment should be directed to the NSSC as specified in paragraph (b) of this section.

(f) Other payment clauses. In addition to the requirements of this clause, the Contractor

shall meet the requirements of the appropriate payment clauses in this contract when submitting payment requests.

(g) In the event that amounts are withheld from payment in accordance with provisions

of this contract, a separate payment request for the amount withheld will be required before payment for that amount may be made.

(End of clause)

1852.225-70 Export Licenses (FEB 2000)

(a) The Contractor shall comply with all U.S. export control laws and regulations, including the International Traffic in Arms Regulations (ITAR), 22 CFR Parts 120 through 130, and the Export Administration Regulations (EAR), 15 CFR Parts 730 through 799, in the performance of this contract. In the absence of available license exemptions/exceptions, the Contractor shall be responsible for obtaining the appropriate licenses or other approvals, if required, for exports of hardware, technical data, and software, or for the provision of technical assistance.

(b) The Contractor shall be responsible for obtaining export licenses, if required, before utilizing foreign persons in the performance of this contract, including instances where the work is to be performed on-site at [insert name of NASA installation], where the foreign person will have access to export-controlled technical data or software.

(c) The Contractor shall be responsible for all regulatory record keeping requirements associated with the use of licenses and license exemptions/exceptions.

(d) The Contractor shall be responsible for ensuring that the provisions of this clause apply to its subcontractors.

(End of clause)

1852.245–74 Identification and Marking of Government Equipment. (JAN 2011)

(a) The Contractor shall identify all equipment to be delivered to the Government using

NASA Technical Handbook (NASA–HDBK) 6003, Application of Data Matrix Identification Symbols to Aerospace Parts Using Direct Part Marking Methods/Techniques, and NASA Standard (NASA–STD) 6002, Applying Data Matrix Identification Symbols on Aerospace Parts or through the use of commercial marking techniques that: (1) are sufficiently durable to remain intact through the typical lifespan of the property: and, (2) contain the data and data format required by the standards. This requirement includes deliverable equipment listed in the schedule and other equipment when no longer required for contract performance and NASA directs physical transfer to NASA or a third party. The Contractor shall identify property in both machine and human readable form unless the use of a machine readable-only format is approved by the NASA Industrial Property Officer.

(b) Equipment shall be marked in a location that will be human readable, without

disassembly or movement of the equipment, when the items are placed in service unless such placement would have a deleterious effect on safety or on the item’s operation.

(c) Concurrent with equipment delivery or transfer, the Contractor shall provide the

following data in an electronic spreadsheet format:

(1) Item Description.

(2) Unique Identification Number (License Tag).

(3) Unit Price.

(4) An explanation of the data used to make the unique identification number.

(d) For equipment no longer needed for contract performance and physically transferred

under paragraph (a) of this clause, the following additional data is required:

(1) Date originally placed in service.

(2) Item condition.

(e) The data required in paragraphs (c) and (d) of this clause shall be delivered to the

NASA center receiving activity listed below:

Goddard Space Flight Center

Building 30, Code 553

Greenbelt, MD 20771

(f) The contractor shall include the substance of this clause, including this paragraph (f),

in all subcontracts that require delivery of equipment.

(End of clause)

GSFC 52.211-90 Supplies and/or Services To Be Provided. (SEP 2017)

The Contractor shall provide all resources (except as may be expressly stated in the contract as furnished by the Government) necessary to deliver and/or perform the items below in accordance with the Statement of Work (SOW), incorporated as Attachment A.

Item

Description

Reference (SOW Section)

Schedule

Delivery Method/Addressee(s)

1

Planned Design of tool and list of required utilities

Scope (b) & Deliverables

2 weeks from contract award date

Schedule meeting the Contracting’s Officer Representive (COR) and Electronic Format of design and list of utilities to COR

2

Factory Acceptance Test

Deliverables

Within 7 – 8 months from date of award

Electronic Format (report)

3

Shipping of tool

Scope (e) & Task or requirements (14.25)

Within 8 months of date of award

Shipping to GSFC

4

Installation/Assembly of tool

Installation/Assembly

Within 8 – 11 months of date of award date

GSFC

5

Final Acceptance Testing

Deliverables

Within 12 months of date of award

GSFC

6

Training

Training

Within 12 months of date of award

GSFC

7

Final Acceptance of Tool

Deliverables

Within 12 months of date of award.

GSFC

GSFC 52.211-91 Scope of Work. (FEB 2016)

The Contractor shall provide the personnel, materials, and facilities, except as otherwise specified in this contract, necessary to perform the work and to furnish the items specified in the Supplies and/or Services To Be Provided clause of this contract in accordance with the Statement of Work, Attachment A.

(End of clause)

GSFC 52.211-101 List of Attachments. (FEB 2016)

The following documents are attached hereto and made a part of this contract:

Attachment

Description

Date

No. of Pages (including the cover page)

A

SOW – Mask Aligner

12/20/2021

7

(End of clause)

GSFC 52.217-92 Period of Performance (JAN 2014)

The period of performance of this contract shall be for a period of 12 months from the contract effective date of TBD. 

(End of clause)

GSFC 52.232-95 Invoices – Submission of (MAR 2018)

(a) Payment Office. The designated payment office is the NASA Shared Services Center (NSSC) located at FMD Accounts Payable, Bldg. 1111, Jerry Hlass Road, Stennis Space Center, MS 39529.  Please contact the NSSC Customer Contact Center at 1-877-NSSC123 (1-877-677-2123) with any additional questions or comments.

(b) Invoices.  Except for classified invoices, invoices shall be prepared in accordance with the invoicing instructions in FAR 52.212-4(g). In addition, invoices shall be submitted using the steps described at the NSSC’s Vendor Payment information web site at https://www.nssc.nasa.gov/vendorpayment. 

(c) Improper invoices. The NSSC Payment Office will notify the contractor of any apparent error, defect, or impropriety in any invoices within seven calendar days of receipt by the NSSC Payment Office. Inquiries regarding requests for payment should be directed to the NSSC as specified in paragraph (b) of this section.

(d) In the event that amounts are withheld from payment in accordance with provisions of this award, a separate payment request for the amount withheld will be required before payment for that amount may be made.

(End of clause)

Item No.

Description

Unit

Qty

Unit Price

Total Amount

(1)

Planned Design of tool and list of required utilities

Each

1

To Be Determined (TBD)

TBD

(2) & (3)

Completion of factory acceptance testing and Shipping of tool to GSFC

Each

1

TBD

TBD

(6)

Training

Each

1

TBD

TBD

(7)

Final Acceptance of Tool

Each

1

TBD

TBD

  1. The Contractor may submit requests for payment not more frequently than monthly, in a form and manner acceptable to the Contracting Officer.  Unless otherwise authorized by the Contracting Officer, all delivery - payments in any period for which payment is being requested shall be included in a single request, appropriately itemized and totaled. 
  1. The Contractor shall not be entitled to payment of a request for delivery payment prior to successful accomplishment and acceptance of the item by the Government. The Contracting Officer shall determine whether the item for which payment is requested has been successfully accomplished and accepted by the Government in accordance with the terms of the contract.  The Contracting Officer may, at any time, require the Contractor to substantiate the acceptable performance of the services provided or supplies delivered.

GSFC 52.247-94 Shipping Instructions--Central Receiving. (FEB 2016)

Shipments of the items required under this contract shall be to:

Receiving Officer

Goddard Space Flight Center

Building 35, Code 279

Greenbelt, Maryland  20771

Marked for:

Technical Officer:  Timothy M Miller, Code 553

Building:  11

Room:  E013

Contract No.:  TBD

Item(s) No.:  1 - 7

Compliance with this clause is necessary to assure verification of delivery and acceptance and prompt payment.

If this is a fixed price type contract, delivery--for purposes of the Prompt Payment Act--must be through the above shipping address unless another location has been authorized by the Contracting Officer.  If delivery is made to other than the Receiving Officer listed above and shipment to that other location has not been authorized by the Contracting Officer, a delivery for the purposes of the Prompt Payment Act has not occurred and no interest penalty under the Act shall result.  Shipment to other than Receiving Officer listed above will be construed as contract noncompliance.

(End of clause)

FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items (APR 2021), is applicable and the following identified clauses are incorporated by reference: 

52.203-6, Restrictions on Subcontractor Sales to the Government (JUN 2020), with Alternate I (OCT 1995)

52.204-10, Reporting Executive Compensation and First-Tier Subcontract Awards (JUN 2020)

52.209-6, Protecting the Governments Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment. (JUN 2020)

52.209-9, Updates of Publicly Available Information Regarding Responsibility Matters (OCT 2018)

52.219-8, Utilization of Small Business Concerns (OCT 2018)

52.219-28, Post Award Small Business Program Rerepresentation (NOV 2020)

52.222-3, Convict Labor (JUN 2003)

52.222-19, Child Labor Cooperation with Authorities and Remedies (APR 2021)

52.222-21, Prohibition of Segregated Facilities (APR 2015)

52.222-26, Equal Opportunity (SEP 2016)

52.222-35, Equal Opportunity for Veterans (JUN 2020)

52.222-36, Affirmative Action for Workers with Disabilities (JUN 2020)

52.222-37, Employment Reports on Veterans (JUN 2020)

52.222-40, Notification of Employee Rights Under the National Labor Relations Act (DEC 2010)

52.222-50, Combating Trafficking in Persons (Oct 2020)

52.223-18, Encouraging Contractor Policies to Ban Text Messaging While Driving (JUN 2020)

52.225-1, Buy American Act-Supplies (JAN 2021)

52.225-13, Restrictions on Certain Foreign Purchases (FEB 2021)

52.232-33, Payment by Electronic Funds Transfer System for Award Management (OCT 2018)

This is not a Defense Priorities and Allocation System (DPAS) rated order.

NASA Clause 1852.215-84, Ombudsman, is applicable.  The Center Ombudsman for this acquisition can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html 

This posting, in addition to any attached documents, will be available on www.Sam.gov. Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any).

Prospective offerors are encouraged to notify this office of their intent to submit an offer.

All contractual and technical questions must be submitted electronically via email to Stephanie.D.Stephens@nasa.gov and Giulietta.R.Dahl@nasa.gov, not later than December 31, 2022at 4:30 PM EST.  Telephone questions will not be accepted.

Responses to this combined synopsis/solicitation must be received via email no later than 4:30 PM EST on January 14, 2022.    

The Government is not responsible for any failure attributable to the transmission or receipt of documents submitted using electronic means, including the missing of any established deadlines.

Failure to submit a complete electronic proposal by the due date and time specified for this RFQ shall result in the proposal being considered late and shall be handled in accordance with FAR 52.212-1 (JUN 2020).

Update #1 ·

This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice.  This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued.

This notice is being issued as a Request for Quotation (RFQ) under solicitation number 80GSFC21Q0004 for a contact mask aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL). The system has two main functions: 1) to align a mask to a substrate (typically a wafer) and, 2) to expose ultra-violet (UV) light onto the substrate through the mask.

The provisions and clauses in the RFQ are those in effect through FAC 2021-07.

The NAICS Code and Size Standard are 333242 and 1500 employees, respectively.  The offeror shall state in their offer their size status for this acquisition.

All responsible sources may submit an offer which shall be considered by the agency.

Delivery to NASA Goddard Space Flight Center (GSFC) is required within 32 weeks after receipt of order.  Delivery shall be free on board (FOB) Destination.

Additional delivery instructions are outlined in the attached Mask Aligner and Align-for-Bond SOW.

Offers for the items(s) described above are due by 4:30 PM EST on January 7, 2022 to Stephanie.D.Stephens@nasa.gov and Giulietta.R.Dahl@nasa.gov and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative.  Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL:https://www.gsa.gov/forms-library/solicitationcontractorder-commercial-items

The following clauses and provisions are incorporated; full text of the clauses and provisions may be accessed electronically at:

FAR - https://www.acquisition.gov/browse/index/far          

NFS - https://www.hq.nasa.gov/office/procurement/regs/NFS.pdf

Offerors shall provide the information required by FAR 52.212-1, Instructions to Offerors-Commercial Items (JUN 2020) which is incorporated by reference. Addenda to FAR 52.212-1 are as follows:

52.204-7                System for Award Management (OCT 2018)

52.204-16              Commercial and Government Entity Code Reporting (AUG 2020)

52.204-24              Representation Regarding Certain Telecommunications and Video

Surveillance Services or Equipment (OCT 2020)

52.204-26              Covered Telecommunications Equipment or Services-Representation

(OCT 2020)

52.209-7                Information Regarding Responsibility Matters (OCT 2018)

52.217-5                Evaluation of Options (JULY 1990)

52.225-25              Prohibition on Contracting With Entities Engaging in Certain activities

or Transactions Relating to Iran—Representation and Certifications (JUN 2020)

1852.233-70          Protest to NASA (DEC 2015)

If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled “Buy American Act – Supplies,” the offeror shall so state and shall list the country of origin.

FAR 52.212-2, Evaluation -- Commercial Items (OCT 2014). The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforming to the solicitation will be most advantageous to the Government, price and other factors considered. The following factors are in descending order of importance and shall be used to evaluate offers: 1) Technical Capability of the items offered to meet the Government requirement, 2) Past Performance and, 3) Price. Technical capability and past performance, when combined, are significantly more important than Price.

The proposal shall contain a narrative describing the technical approach for fulfilling the Mask Aligner requirements.  If the proposed equipment can exceed the requirements listed in the Statement of Work (SOW), the vendor shall indicate a list of equipment capabilities having such technical merit as this may be considered in the technical appraisal.  Preference may be given to Offerors whose Mask Alignment unit is a production model with multiple similar units. Thus having greater than 5 similar units working in the field demonstrating all capabilities listed in the SOW may be considered favorably.

The Offeror’s proposal shall also demonstrate a verified track record of technical competence in producing mask and wafer alignment systems meeting each of the requirements listed in the SOW. Offeror’s shall provide a list of tools in the field as well as companies or government entities in which these tools were provided.  Offeror’s shall also provide a brief history in the field as well as a history of experience with bonding equipment as it pertains to the align-for-bonding requirement. If applicable, a description of experience of align-for-bond capability and functionality with various bonding systems, in addition to stating the number of units in the field utilizing this function shall be provided. 

The vendor shall ensure that products and services that use the Internet Protocol provide full feature functionality in both dual stack (IPv4 and IPv6) and IPv6-only environments in compliance with NIST USGv6 Testing Program, see Special Publication 500-267, A Profile for IPv6 in the U.S. Government – Version 1.0.  The vendor shall identify all contract specifications that do not comply with providing full feature functionality for IPv6.

In accordance with CIO Directives and with agency Enterprise Architecture and Technical Reference Model (TRM), this acquisition requires all functionality, capabilities and features to be supported and operational in both a dual-stack IPv4/IPv6 environment and an IPv6 only environment.  Furthermore, all management, user interfaces, configuration options, reports and other administrative capabilities that support IPv4 functionality will support comparable IPv6 functionality.  Respondents are required to have their products tested in an IPv6 certified 3rd party test facility to ensure it works in an IPv6 only environment and meets this requirement.  Agency reserves the right to require the respondent to provide additional information on any product capabilities that are identified as not being IPv6 capable.

In accordance with FAR 11.002(g), NFS 1811.101-70, and CIO Directives, this acquisition must comply with the NIST USGv6 Profile and IPv6 Test Program (http://www-x.antd.nist.gov/usgv6/supply.html). In addition, respondents are required to provide a Suppliers Declaration of Conformity (SDOC) or certify that the product operates on a platform that has an SDOC based on the attached Enclosure 1, “NASA Baseline IPv6 Requirements” or product specific “IPv6 requirements” and in accordance with NIST SP 500-267, NIST SP-273, and NIST SP 500-281.” If an SDOC is not immediately available, respondents must commit in writing to complete the necessary testing and provide the SDOC.

The offeror shall submit existing product literature in addition to information on previously performed contracts or on-going contracts that are similar to the statement of work/item description in the solicitation performed for Federal, State, or local Governments, and for commercial firms. Information shall be provided on either 1) all such contracts within the past three years, or 2) the last three such contracts performed, whichever is fewer, and shall be limited to the name and address of the organization for which the product was supplied and services were performed and the number (phone and fax) of a contact for each contract listed. The information should also include,  discussion of any major problems encountered on the contract listed and the corrective actions taken to resolve them. The information may also include a description of any quality awards earned by the offeror. The Government reserves the right to obtain information for use in the evaluation of past performance from any and all sources including sources outside of the Government. Offerors lacking relevant past performance history will not be evaluated favorably or unfavorably on past performance. However, the quote of an offeror with no relevant past performance history, while not rated favorably or unfavorably for past performance, may not represent the most advantageous quote to the Government and thus, may be an unsuccessful quote when compared to the responses of other quotes. The offeror should provide the information requested above for past performance evaluation, or affirmatively state that it possesses no relevant directly related or similar past performance.

All offerors shall include a completed copy of FAR 52.212-3, Offeror Representations and Certifications -- Commercial Items (OCT 2020) – Alternate I (OCT 2014), or complete electronic annual representations and certifications at SAM.gov with its offer.

FAR 52.212-4, Contract Terms and Conditions-Commercial Items (OCT 2018) is applicable. Addenda to FAR 52.212-4 are as follows:

52.252-2 CLAUSES INCORPORATED BY REFERENCE (FEB 1998)

This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es):

Federal Acquisition Regulation

https://www.acquisition.gov/browsefar

NASA FAR Supplement (NFS) clauses: 

https://www.hq.nasa.gov/office/procurement/regs/NFS.pdf

(End of clause)

Clause No.             Title

52.204-4                Printed or Copied Double-Sided on Postconsumer Fiber Content Paper (MAY 2011)

52.204-13              System for Award Management Maintenance (OCT 2018)

52.204-18              Commercial and Government Entity Code Maintenance (AUG 2020)

52.204-19              Incorporation by Reference of Representations and Certifications.

(DEC 2014)

52.232-11              Extras. (APR 1984)

52.242-13              Bankruptcy (JUL 1995)

52.242-15              Stop Work Order (AUG 1989)

52.247-34              F.o.b. Destination (JAN 1991)

52.253-1                Computer Generated Forms. (JAN 1991)

1852.203-71          Requirement to Inform Employees of Whistleblower Rights (AUG

2014)

1852.215-84          Ombudsman (NOV 2011)*

1852.223-75          Major Breach of Safety or Security (FEB 2002) - Alternate I (FEB

2006)

1852.237-73          Release of Sensitive Information (JUN 2005)

*The Center Ombudsman can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html.

1852.216-78 Firm Fixed Price (DEC 1988)

The total firm fixed price of this contract is $To Be Proposed (TBP).

(End of clause)

1852.232-80  Submission of Vouchers/Invoices for Payment (APR 2018)

(a) The designated payment office is the NASA Shared Services Center (NSSC) located

at FMD Accounts Payable, Bldg. 1111, Jerry Hlass Road, Stennis Space Center,

MS 39529.

(b) Except for classified vouchers, the Contractor shall submit all vouchers and invoices

using the steps described at NSSC’s Vendor Payment information web site at:

https://www.nssc.nasa.gov/vendorpayment. Please contact the NSSC Customer Contact Center at 1-877-NSSC123 (1-877-677-2123) with any additional questions or comments.

(c) Payment requests.

(1) The payment periods are stipulated in the payment clause(s) contained in this

contract.

(2) Vouchers submitted under cost-type contracts and invoices submitted under

fixed-price contracts shall include the items delineated in FAR 32.905(b) supported by relevant back-up documentation. Back-up documentation shall include at a minimum, the following information:

(i) Vouchers.

(A) Breakdown of billed labor costs and associated contractor generated supporting documentation for billed direct labor costs to include rates used and number of hours incurred.

(B) Breakdown of billed other direct costs (ODCs) and associated contractor generated supporting documentation for billed ODCs.

(C) Indirect rate(s) used to calculate the amount of billed indirect expenses.

(D) Progress reports, as required.

(ii) Invoices.

(A) Description of goods and services delivered as part of the contract’s terms and conditions, including the dates of delivery/performance.

(B) Progress reports, as required.

(C) Date goods and services were performed.

(iii) Fee vouchers.

(A) Listing of all provisionally-billed fee by period or date earned since contract award.

(B) A reconciliation of all billed and earned fee.

(C) A clear explanation of the fee calculations.

(d) Non-electronic payment requests. The Contractor may submit a non-electronic voucher/invoice using the steps for non-electronic payment requests described at

https://www.nssc.nasa.gov/vendorpayment, when any of the following conditions are met:

(1) The Contracting Officer administering the contract for payment has determined, in writing, that electronic submission would be unduly burdensome to the

Contractor.

(2) The contract includes provisions allowing the contractor to submit vouchers or invoices using the steps for non-electronic payment requests. In such instances the Contractor agrees to submit non-electronic payment requests using the method or methods specified in Section G of the contract.

(e) Improper vouchers/invoices. The NSSC Payment Office will notify the contractor of

any apparent error, defect, or impropriety in a voucher/invoices within seven calendar days of receipt by the NSSC Payment Office. Inquiries regarding requests for payment should be directed to the NSSC as specified in paragraph (b) of this section.

(f) Other payment clauses. In addition to the requirements of this clause, the Contractor

shall meet the requirements of the appropriate payment clauses in this contract when submitting payment requests.

(g) In the event that amounts are withheld from payment in accordance with provisions

of this contract, a separate payment request for the amount withheld will be required before payment for that amount may be made.

(End of clause)

1852.225-70 Export Licenses (FEB 2000)

(a) The Contractor shall comply with all U.S. export control laws and regulations, including the International Traffic in Arms Regulations (ITAR), 22 CFR Parts 120 through 130, and the Export Administration Regulations (EAR), 15 CFR Parts 730 through 799, in the performance of this contract. In the absence of available license exemptions/exceptions, the Contractor shall be responsible for obtaining the appropriate licenses or other approvals, if required, for exports of hardware, technical data, and software, or for the provision of technical assistance.

(b) The Contractor shall be responsible for obtaining export licenses, if required, before utilizing foreign persons in the performance of this contract, including instances where the work is to be performed on-site at [insert name of NASA installation], where the foreign person will have access to export-controlled technical data or software.

(c) The Contractor shall be responsible for all regulatory record keeping requirements associated with the use of licenses and license exemptions/exceptions.

(d) The Contractor shall be responsible for ensuring that the provisions of this clause apply to its subcontractors.

(End of clause)

1852.245–74 Identification and Marking of Government Equipment. (JAN 2011)

(a) The Contractor shall identify all equipment to be delivered to the Government using

NASA Technical Handbook (NASA–HDBK) 6003, Application of Data Matrix Identification Symbols to Aerospace Parts Using Direct Part Marking Methods/Techniques, and NASA Standard (NASA–STD) 6002, Applying Data Matrix Identification Symbols on Aerospace Parts or through the use of commercial marking techniques that: (1) are sufficiently durable to remain intact through the typical lifespan of the property: and, (2) contain the data and data format required by the standards. This requirement includes deliverable equipment listed in the schedule and other equipment when no longer required for contract performance and NASA directs physical transfer to NASA or a third party. The Contractor shall identify property in both machine and human readable form unless the use of a machine readable-only format is approved by the NASA Industrial Property Officer.

(b) Equipment shall be marked in a location that will be human readable, without

disassembly or movement of the equipment, when the items are placed in service unless such placement would have a deleterious effect on safety or on the item’s operation.

(c) Concurrent with equipment delivery or transfer, the Contractor shall provide the

following data in an electronic spreadsheet format:

(1) Item Description.

(2) Unique Identification Number (License Tag).

(3) Unit Price.

(4) An explanation of the data used to make the unique identification number.

(d) For equipment no longer needed for contract performance and physically transferred

under paragraph (a) of this clause, the following additional data is required:

(1) Date originally placed in service.

(2) Item condition.

(e) The data required in paragraphs (c) and (d) of this clause shall be delivered to the

NASA center receiving activity listed below:

Goddard Space Flight Center

Building 30, Code 553

Greenbelt, MD 20771

(f) The contractor shall include the substance of this clause, including this paragraph (f),

in all subcontracts that require delivery of equipment.

(End of clause)

GSFC 52.211-90 Supplies and/or Services To Be Provided. (SEP 2017)

The Contractor shall provide all resources (except as may be expressly stated in the contract as furnished by the Government) necessary to deliver and/or perform the items below in accordance with the Statement of Work (SOW), incorporated as Attachment A.

Item

Description

Reference (SOW Section)

Schedule

Delivery Method/Addressee(s)

1

Planned Design of tool and list of required utilities

Scope (b) & Deliverables

2 weeks from contract award date

Schedule meeting the Contracting’s Officer Representive (COR) and Electronic Format of design and list of utilities to COR

2

Factory Acceptance Test

Deliverables

Within 7 – 8 months from date of award

Electronic Format (report)

3

Shipping of tool

Scope (e) & Task or requirements (14.25)

Within 8 months of date of award

Shipping to GSFC

4

Installation/Assembly of tool

Installation/Assembly

Within 8 – 11 months of date of award date

GSFC

5

Final Acceptance Testing

Deliverables

Within 12 months of date of award

GSFC

6

Training

Training

Within 12 months of date of award

GSFC

7

Final Acceptance of Tool

Deliverables

Within 12 months of date of award.

GSFC

GSFC 52.211-91 Scope of Work. (FEB 2016)

The Contractor shall provide the personnel, materials, and facilities, except as otherwise specified in this contract, necessary to perform the work and to furnish the items specified in the Supplies and/or Services To Be Provided clause of this contract in accordance with the Statement of Work, Attachment A.

(End of clause)

GSFC 52.211-101 List of Attachments. (FEB 2016)

The following documents are attached hereto and made a part of this contract:

Attachment

Description

Date

No. of Pages (including the cover page)

A

SOW – Mask Aligner

12/20/2021

7

(End of clause)

GSFC 52.217-92 Period of Performance (JAN 2014)

The period of performance of this contract shall be for a period of 12 months from the contract effective date of TBD. 

(End of clause)

GSFC 52.232-95 Invoices – Submission of (MAR 2018)

(a) Payment Office. The designated payment office is the NASA Shared Services Center (NSSC) located at FMD Accounts Payable, Bldg. 1111, Jerry Hlass Road, Stennis Space Center, MS 39529.  Please contact the NSSC Customer Contact Center at 1-877-NSSC123 (1-877-677-2123) with any additional questions or comments.

(b) Invoices.  Except for classified invoices, invoices shall be prepared in accordance with the invoicing instructions in FAR 52.212-4(g). In addition, invoices shall be submitted using the steps described at the NSSC’s Vendor Payment information web site at https://www.nssc.nasa.gov/vendorpayment. 

(c) Improper invoices. The NSSC Payment Office will notify the contractor of any apparent error, defect, or impropriety in any invoices within seven calendar days of receipt by the NSSC Payment Office. Inquiries regarding requests for payment should be directed to the NSSC as specified in paragraph (b) of this section.

(d) In the event that amounts are withheld from payment in accordance with provisions of this award, a separate payment request for the amount withheld will be required before payment for that amount may be made.

(End of clause)

Item No.

Description

Unit

Qty

Unit Price

Total Amount

(1)

Planned Design of tool and list of required utilities

Each

1

To Be Determined (TBD)

TBD

(2) & (3)

Completion of factory acceptance testing and Shipping of tool to GSFC

Each

1

TBD

TBD

(6)

Training

Each

1

TBD

TBD

(7)

Final Acceptance of Tool

Each

1

TBD

TBD

  1. The Contractor may submit requests for payment not more frequently than monthly, in a form and manner acceptable to the Contracting Officer.  Unless otherwise authorized by the Contracting Officer, all delivery - payments in any period for which payment is being requested shall be included in a single request, appropriately itemized and totaled. 
  1. The Contractor shall not be entitled to payment of a request for delivery payment prior to successful accomplishment and acceptance of the item by the Government. The Contracting Officer shall determine whether the item for which payment is requested has been successfully accomplished and accepted by the Government in accordance with the terms of the contract.  The Contracting Officer may, at any time, require the Contractor to substantiate the acceptable performance of the services provided or supplies delivered.

GSFC 52.247-94 Shipping Instructions--Central Receiving. (FEB 2016)

Shipments of the items required under this contract shall be to:

Receiving Officer

Goddard Space Flight Center

Building 35, Code 279

Greenbelt, Maryland  20771

Marked for:

Technical Officer:  Timothy M Miller, Code 553

Building:  11

Room:  E013

Contract No.:  TBD

Item(s) No.:  1 - 7

Compliance with this clause is necessary to assure verification of delivery and acceptance and prompt payment.

If this is a fixed price type contract, delivery--for purposes of the Prompt Payment Act--must be through the above shipping address unless another location has been authorized by the Contracting Officer.  If delivery is made to other than the Receiving Officer listed above and shipment to that other location has not been authorized by the Contracting Officer, a delivery for the purposes of the Prompt Payment Act has not occurred and no interest penalty under the Act shall result.  Shipment to other than Receiving Officer listed above will be construed as contract noncompliance.

(End of clause)

FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items (APR 2021), is applicable and the following identified clauses are incorporated by reference: 

52.203-6, Restrictions on Subcontractor Sales to the Government (JUN 2020), with Alternate I (OCT 1995)

52.204-10, Reporting Executive Compensation and First-Tier Subcontract Awards (JUN 2020)

52.209-6, Protecting the Governments Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment. (JUN 2020)

52.209-9, Updates of Publicly Available Information Regarding Responsibility Matters (OCT 2018)

52.219-8, Utilization of Small Business Concerns (OCT 2018)

52.219-28, Post Award Small Business Program Rerepresentation (NOV 2020)

52.222-3, Convict Labor (JUN 2003)

52.222-19, Child Labor Cooperation with Authorities and Remedies (APR 2021)

52.222-21, Prohibition of Segregated Facilities (APR 2015)

52.222-26, Equal Opportunity (SEP 2016)

52.222-35, Equal Opportunity for Veterans (JUN 2020)

52.222-36, Affirmative Action for Workers with Disabilities (JUN 2020)

52.222-37, Employment Reports on Veterans (JUN 2020)

52.222-40, Notification of Employee Rights Under the National Labor Relations Act (DEC 2010)

52.222-50, Combating Trafficking in Persons (Oct 2020)

52.223-18, Encouraging Contractor Policies to Ban Text Messaging While Driving (JUN 2020)

52.225-1, Buy American Act-Supplies (JAN 2021)

52.225-13, Restrictions on Certain Foreign Purchases (FEB 2021)

52.232-33, Payment by Electronic Funds Transfer System for Award Management (OCT 2018)

This is not a Defense Priorities and Allocation System (DPAS) rated order.

NASA Clause 1852.215-84, Ombudsman, is applicable.  The Center Ombudsman for this acquisition can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html 

This posting, in addition to any attached documents, will be available on www.Sam.gov. Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any).

Prospective offerors are encouraged to notify this office of their intent to submit an offer.

All contractual and technical questions must be submitted electronically via email to Stephanie.D.Stephens@nasa.gov and Giulietta.R.Dahl@nasa.gov, not later than December 31, 2022at 4:30 PM EST.  Telephone questions will not be accepted.

Responses to this combined synopsis/solicitation must be received via email no later than 4:30 PM EST on January 7, 2022.    

The Government is not responsible for any failure attributable to the transmission or receipt of documents submitted using electronic means, including the missing of any established deadlines.

Failure to submit a complete electronic proposal by the due date and time specified for this RFQ shall result in the proposal being considered late and shall be handled in accordance with FAR 52.212-1 (JUN 2020).

Attachments

Files attached to this notice, newest first
File Type Posted
QandA Mask Aligner - Final.pdf PDF
Attachment A - SOW for Mask Aligner 12-20.pdf PDF
Enclosure 1 - NASA IPv6 Baseline Requirements.pdf PDF

Notice history

Notices posted for this opportunity, newest first
Notice Type Posted
80GSFC21Q0004 - Mask Aligner Award Award Notice
80GSFC21Q0004 - Mask Aligner This notice · Latest solicitation Solicitation

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