5. AL-1664-4914A SR - BE&C Chamber ACL.pdf

Advanced Light Source Upgrade Project Lawrence Berkeley National Laboratory

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Printed hard copies of this document are for reference only.

SR - BE&C Chamber - ACL

Thomas GAUCHER

Release Date: Dec 11 2023 12:48:36 PM PST

Document Number: AL-1664-4914 Revision: A

Document Status: Released

Document Type: ACCEPTANCE CRITERIA LIST (ACL)

Category Code: AL7531

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TABLE OF CONTENTS

1 Revision History

2 Approvals

3 Abbreviations and Acronyms

4 Authorizing Document

5 Scope

6 Acceptance Criteria Listing Form

6.1 Visual Inspection

6.1 Mechanical Inspection

6.2 Vacuum Inspection

6.3 NEG Coating Inspection (Option)

6.4 Mechanical Inspection

6.5 Shipping inspection

6.6 Documentation

6.7 Observations / Comments

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1 REVISION HISTORY

Rev. CM Number Description of Change A Baseline

2 APPROVALS

The following individual(s) shall approve this document:

Approver Project Role Jiani Niu Project QA manager Olusola Omolayo Vacuum CAM Christoph Steier Accelerator Systems Lead Windchill Approved / Concurred By jianiniu,CSteier,oomolayo ci al ly R el ea se d to th e

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3 ABBREVIATIONS AND ACRONYMS

ALS-U Advanced Light Source Upgrade SR Storage Ring HE Helium HPN2 High purity Nitrogen QA Quality Assurance

4 AUTHORIZING DOCUMENT

LBNL QA Plan PUB 3111: https://commons.lbl.gov/display/rpm2/Quality+Assurance+Policy

LBNL ALS-U Quality Assurance Plan, AL-1024-3173, https://dcc.lbl.gov/download.php?filename=AL-

1024-3173A.pdf

5 SCOPE

This document describes the acceptance criteria for SR Aluminum Chambers. This document shall be filled out for each SR Aluminum Chamber.

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6 ACCEPTANCE CRITERIA LISTING FORM

Level of Care : ☐ Very High ☐ High ☐ Medium ☐ Low

Prepared by: Group:

Email: Location:

Phone: Date:

Part Name: Quantity:

Part Number: S/N (if applicable)

NCR Reviewers

Additional Remarks:

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6.1 Visual Inspection

Verification and Testing Requirements

ITEM

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

1.

AL-1636-

0722_SR -

BE&C

Chamber ESD

No visual damage on the outside of the vacuum chamber

NCR #: PASS ☐ FAIL ☐

INITIALS DATE

2.

AL-1636-

0722_SR -

BE&C

Chamber ESD

LBNL Part and serial number are inscribed on chamber

3.

0722_SR -

BE&C

Chamber ESD

Flange knife-edges are completely smooth and interruption-free when examined by lightly running an ethanol-wetted rubber cleanroom gloved finger around them.

4.

0722_SR -

BE&C

Chamber ESD

Cleanroom wipes wetted with electronic grade ethanol do not yield debris or particles, or discoloration of the wipes

5.

0722_SR -

BE&C

Chamber ESD

Internal welds are visually free of cracks, porosity and inclusions under bright light inspection.

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ITEM

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

6.

AL-1636-

0722_SR -

BE&C

Chamber ESD

Threaded holes inspected with an electronic grade alcohol-soaked cleanroom swab do not yield particles or discoloration.

7.

0722_SR -

BE&C

Chamber ESD

Presence of Helicoils on the BPM housing and Obround flange

8.

0722_SR -

BE&C

Chamber ESD

Presence of Pin (Round and Diamond) on the Obround flange

9.

0722_SR -

BE&C

Chamber ESD

All standard flanges are Bi-metal

10.

0722_SR -

BE&C

Chamber ESD

Presence of 5 Fiducial nests on the chamber ci al ly R el ea se d to th e

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6.1 Mechanical Inspection

ITEM

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

11.

AL-1636-

0722_SR -

BE&C

Chamber ESD

CMM measurement verification before bakeout:

Tolerancing of agreed dimension are verified.

6.2 Vacuum Inspection

ITEM

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

12.

AL-1636-

0722_SR -

BE&C

Chamber ESD

RGA scan:

Check all RGA scans reach the required criteria:

o With the chamber baked and at room temperature, the Sum of all peaks higher than Mass

44 shall be lower than

1/1,000th of total pressure o Partial pressure of Mass 18 shall be less than Mass 2 o Partial pressure of Mass 69 shall be less than 1/2,000th of total pressure o Partial pressure of Mass 14 shall be less than Mass 18.

NCR #:

PASS ☐ FAIL ☐

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ITEM

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

13.

AL-1636-

0722_SR -

BE&C

Chamber ESD

Final He Leak Test:

The chamber was pumped down below 1.0x10-4 Torr before leak checking

Verify that the maximum leak rate is below 1x10-10 torr-liters/sec

NCR #:

6.3 NEG Coating Inspection (Option)

ITEM

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

14.

AL-1636-

0722_SR -

BE&C

Chamber ESD

NEG coating visual inspection:

The NEG coating coverage on the internal surface of the chamber along the electron beam path channel shall be greater than 99%

NCR #:

15.

0722_SR -

BE&C

Chamber ESD

NEG coating thickness verification:

The thickness of the NEG coated aluminum ribbon shall be in between 0.3 to 1.5 micron.

The measurement shall be taken in at least 3 locations of the ribbon.

NCR #:

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6.4 Mechanical Inspection

ITEM

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

16.

AL-1636-

0722_SR -

BE&C

Chamber ESD

CMM measurement verification

After bakeout:

Tolerancing of agreed dimension are verified.

NCR #:

6.5 Shipping inspection

ITEM

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

17.

AL-1636-

0722_SR -

BE&C

Chamber ESD

HPN2 backfill:

The chamber shall be filled with HPN2 at or near atmospheric pressure

The chamber is shipped in sealed condition

NCR #:

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6.6 Documentation

ITE

M

NO.

REQ ID /

DCC doc #

CHARACTERISTIC OR TEST TO BE

CONDUCTED, VERIFIED or

WITNESSED

VERIFYING

VENDOR

ENTITY

NonConformance

Report # if NCR exists

PASS / FAIL

DATE

VERIFICATION REPORT/

INSPECTION DATA

18.

AL-1636-

0722_SR -

BE&C

Chamber ESD

Documentations:

All documentation related to the vacuum chamber are provided such as :

He leak test report

CMM measurement report

Certification of conformance

Etc…

NCR #:

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6.7 Observations / Comments

Use the following table to make observations on the previous tests conducted if needed.

ITEM NO. Observation / Comments ci al ly R el ea se d to th e

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