Project Grant 2522585
- This Project Grant award of $1,587,440 from the National Science Foundation's (NSF) Mathematical and Physical Sciences program (CFDA 47.049) will fund a collaborative research project to develop new photoresist materials for enabling high-volume extreme ultraviolet (EUV) lithography in semiconductor manufacturing. The project, conducted by the University of Illinois, will integrate expertise in polymer chemistry, materials characterization, computational modeling, and AI-informed materials...
- This $200,000 Project Grant award from the National Science Foundation's Engineering program (CFDA 47.041) aims to advance semiconductor manufacturing by addressing challenges in extreme ultraviolet (EUV) photolithography, a critical technology for producing integrated circuits with features smaller than 10 nanometers. The project, conducted by the University of Washington, will focus on developing new EUV photoresist materials and studying the chemical reactions that occur when these...
- This $260,000 Project Grant awarded by the National Science Foundation (NSF) under the Mathematical and Physical Sciences (CFDA 47.049) program supports a collaborative effort by researchers at the University of Texas at Dallas, Johns Hopkins University, and the University of Texas at Austin to develop new materials for advanced computer chips. The key objectives are to: (1) design novel indium-based extreme ultraviolet (EUV) resists using computational and machine learning tools; (2) synthesize...
- The National Science Foundation (NSF) awarded a $3,540,000 Project Grant under its Integrative Activities program (CFDA 47.083) to The Johns Hopkins University in Baltimore, Maryland. The grant will support the acquisition and installation of an Extreme Ultraviolet (EUV) resist flood exposure tool at the university. This state-of-the-art facility will enable systematic investigations into advanced photoresist materials and manufacturing processes critical for the development of smaller,...
- This Project Grant award from the National Science Foundation's (NSF) Mathematical and Physical Sciences program will support the development of a new solvent-free process for creating metal-based extreme ultraviolet (EUV) photoresists for semiconductor manufacturing. The $150,000 grant, awarded to The Johns Hopkins University, aims to create an environmentally-friendly fabrication method for these advanced photoresists that can enable the production of more powerful, efficient, and reliable...
- The National Science Foundation Division of Chemistry awarded a $685,000 Project Grant to the University of Wisconsin-Madison under the Mathematical and Physical Sciences program (CFDA 47.049). The five-year award beginning March 1, 2021 will support research titled "CAREER: ELECTRON-PRIMED PHOTOCATALYSIS AS A PLATFORM TO EXPAND ARYL RADICAL REACTIONS." The university's Research and Sponsored Programs division will deliver products and services focused on using electron-primed...
- This $1,800,000 Project Grant awarded by the National Science Foundation's (NSF) Mathematical and Physical Sciences Federal Grant Program (CFDA 47.049) supports a collaborative research effort led by professors from the University of Maryland and Iowa State University. The goal is to leverage artificial intelligence (AI) to accelerate the discovery and design of high-performance and biodegradable polymer nanocomposites with tunable properties such as mechanical strength, optical clarity, and...
- The National Science Foundation (NSF) has awarded a $599,756 Project Grant under the Computer and Information Science and Engineering (CISE) program to the University of Wisconsin - Madison. The grant, effective September 15, 2023 through August 31, 2026, will fund research to utilize Explainable Artificial Intelligence (XAI) to improve the computer-aided design process for very large scale integrated circuits. Key objectives include investigating how XAI can be used to avoid design rule...
- The National Science Foundation awarded a $540,712 Project Grant to the University of Washington under the Mathematical and Physical Sciences federal grant program (CFDA 47.049) from August 1, 2023 through July 31, 2026. The grant funds research investigating the structure-function relationships that govern the performance of organic semiconductors in neuromorphic computing devices. Specifically, the university will explore kinetics, nonlinearity, and geometric scaling by investigating ion...
- This award from the National Science Foundation's (NSF) Technology, Innovation, and Partnerships (CFDA 47.084) program provides $1,168,940 in funding to Exigent Solutions, Inc. to develop a physics-guided AI platform that accelerates the design of extreme ultraviolet (EUV) masks used in semiconductor manufacturing. The project aims to strengthen domestic semiconductor fabrication capacity by shortening design-to-manufacturing cycles, reducing waste, and lowering production costs. The intelligent...
The National Science Foundation's (NSF) Mathematical and Physical Sciences federal grant program awarded a $412,542 Project Grant to the University of Wisconsin - Madison to support a collaborative research project titled "AI-Informed, Closed-Loop Design of Negative Resists for High-Volume EUV Lithography." This 4-year project, running from October 1, 2025 to September 30, 2029, will integrate expertise in polymer chemistry, materials characterization, computational modeling, and artificial intelligence to develop new photoresist materials essential for enabling advanced computer chip manufacturing using extreme ultraviolet (EUV) lithography. The goal is to understand how the molecular structure of polymer-based photoresists impacts nanoscale patterning, in order to design improved materials for high-volume EUV lithography processes. This research has broad applications for advancing next-generation computing technologies, from personal electronics to supercomputing, and will also include STEM workforce development through K-12 outreach and student training.
Mod # | Description | ReasonForModification | Federal Obligation | Date |
|---|---|---|---|---|
| Not listed | $412.5k | 9/8/25 |