Under a $425,448 Project Grant from the National Science Foundation (NSF) Division of Chemistry, the University of Florida is conducting collaborative research on electron-induced reactivity of organometallic precursors for focused electron beam-induced deposition (FEBID) and extreme ultraviolet (EUV) lithography resists. This 3-year research effort, in partnership with Johns Hopkins University, aims to develop a holistic understanding of electron interactions with organometallic complexes to...
This National Science Foundation (NSF) award under the Mathematical and Physical Sciences (CFDA 47.049) program provides $150,000 in funding to The Johns Hopkins University for a project titled "FMSG: ECO: SOLVENT-FREE PROCESSING OF METAL-IMIDAZOLATE EUV PHOTORESISTS FOR SEMICONDUCTOR MANUFACTURING GUIDED BY MACHINE LEARNING." The project aims to develop a new, environmentally-friendly process for creating metal-based photoresists for use in extreme ultraviolet (EUV) lithography for...
This National Science Foundation (NSF) Project Grant award under the Mathematical and Physical Sciences program (CFDA 47.049) provides $300,000 in funding to the University of Washington over a two-year period from June 1, 2025 to May 31, 2027. The project aims to advance the field of semiconductor manufacturing by addressing a critical challenge in extreme ultraviolet (EUV) photolithography, a key technology for creating the next generation of integrated circuits with features smaller than 10...
This Project Grant award of $548,000 from the National Science Foundation's (NSF) Mathematical and Physical Sciences program (CFDA 47.049) supports research at Louisiana State University (LSU) to design, synthesize, and investigate new polymeric materials and processes for high-resolution patterning in semiconductor manufacturing. Key products and services include: Developing new classes of extreme ultraviolet (EUV)-sensitive polymers and investigating their fundamental interactions with photons...
This $466,735 Project Grant award from the National Science Foundation (NSF) Engineering program (CFDA 47.041) supports fundamental research to develop an electron beam-activated atomic layer etching (EB-ALE) process for advanced materials manufacturing. The primary objectives are to obtain the required knowledge on the surface chemical and physical aspects of the EB-ALE mechanism, and to enable layer-by-layer etching for critical applications involving complex multi-element materials that are...
This Project Grant from the National Science Foundation Division of Chemistry, under the Mathematical and Physical Sciences federal grant program (CFDA 47.049), provides $182,589 to support collaborative research between Georgia Institute of Technology, University of Florida, and Virginia Polytechnic Institute & State University (Virginia Tech) from June 1, 2023 to May 31, 2026. The researchers will examine the connections between the structure, dynamics, and catalysis of reactions with...
The National Science Foundation (NSF) awarded a $482,663 Project Grant under the Mathematical and Physical Sciences (CFDA 47.049) program to the University of Florida. The funding supports Professor Chenjie Zeng's research on developing generalizable methodologies for the synthesis of atomically precise II-VI semiconductor nanoclusters. The project aims to enable atomic-level control over the structures and properties of these nanomaterials, which have promising applications in electronics and...
The National Science Foundation (NSF) Division of Chemistry awarded a $142,387 Project Grant to the University of Florida under the Mathematical and Physical Sciences Federal Grant Program (CFDA 47.049). The grant supports the development, implementation, and testing of general computational methods capable of accurately describing strongly correlated electron systems. The key objectives are: (1) designing new wavefunction approaches for multi-reference problems; (2) developing a robust...
This $600,000 federal Project Grant award from the National Science Foundation (NSF) Division of Chemistry under the Mathematical and Physical Sciences program (CFDA 47.049) supports a collaborative research project to understand and control interfacial mass, charge, and energy transfer processes in hybrid nanomaterials composed of metal nanoparticles with conductive polymer coatings. The goal is to utilize charge transfer plasmons to optically transduce nanoscale details about the interfacial...
The National Science Foundation (NSF) Division of Chemistry awarded a $300,000 EAGER (Early-concept Grants for Exploratory Research) project grant to the University of Pittsburgh. The objective of this 2-year project is to develop new methods that leverage the advantages of light in the chemical synthesis of nanomaterials. Specifically, the project aims to use catalytic, photoredox-mediated nanoparticle synthesis to elucidate how the nucleation of bimetallic nanoparticles impacts their size,...