Variable-angle Angle Spectroscopic Ellipsometer (VASE)

The requirement is for a complete turn-key Variable-angle Angle Spectroscopic Ellipsometer (VASE) from J. A. Woollam, Inc., which includes an autoretarder, operator computer, software, photomultiplier tube (PMT) Detector, Camera, and other accessories. Only the J.A. Woollam special high-sensitivity VASE ellipsometer system can satisfy the Government's requirements, because it is unique in measuring both scattering and ellipsometry over the broadband ultraviolet-visible-infrared spectrum (due to its proprietary technology including very broadband sources, angle-of-incidence up to 90 degrees, focused fiber light delivery, multiple advanced (Si and PMT) detectors, and wide angle-of-incidence capability). No other company sells instruments with both broadband
ellipsometry and scattering measurements. Specifically, the VASE system is unique at measuring scattering intensity ~4 orders of magnitude less than that of the specularly-reflected beam and can measure optical indices of refraction, film thickness, and other optical properties over a uniquely broad spectral range of 240 nm - 3600 nm. This instrumental resource will enable the NSRDEC to conduct new research in the quantitative analysis of visible and infrared (beyond 3 micrometers in wavelength) optical properties, film thickness, surface roughness, and scattering/haze.