Recovery - i-line stepper optical lithography system

Added: Jul 12, 2010 4:27 pm The purpose of this amendment is provide answers to additional questions submitted by potential offerors concerning the solicitation (see attachment). The response date for receipt of offers remains UNCHANGED.

Added: Jul 06, 2010 9:15 am Amendment is issued to 1) provide answer(s) to question(s) submitted by prospective offeror(s) concerning the solicitation, and 2) to extend the response date. As a result, the solicitation is amended as follows:

1) Q1. Please Clarify the Performance Specification on section 3.4 table.

Overlay (tool-to-self) = <= 0.1um
Overlay (toll-to-other) = <= 0.08um

Are these transposed?

A1. The requirements are transposed. The specification should be tool-to-self = <= 0.08um and Overlay tool-to-other = <= 0.10um

2) The "Response Date" is hereby extended to July 14, 2010 at 12PM EDT.

Added: Jun 29, 2010 3:13 pm

This Amendment is issued to extend the number of days from 10 calendar days to 13 calendar days after the issuance date of this solicitation that inquiries/questions concerning the solicitation may be submitted in writing to the Contracting Officer, Todd Hill, pursuant to CAR 1352.215-72, Inquiries (Apr 2010).     

Added: Jun 18, 2010 11:45 am RECOVERY: THIS ACQUISITION IS BEING FUNDED BY THE AMERICAN RECOVERY AND REINVESTMENT ACT (ARRA) OF 2009.

RECOVERY - The National Institute of Standards and Technology (NIST) has a requirement for an i-Line Stepper Optical Lithography System to be used at the Center for Nanoscale Science & Technology (CNST) located on the campus of NIST, Gaithersburg, MD.

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A SEPARATE WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF FAR 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS.

THE SOLICITATION AND CLAUSES ARE ATTACHED.