Amendment A002 to COM SYN_SOL SB1341 10 RQ 0329.pdf
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- Attached to
- RECOVERY - I-LINE STEPPER OPTICAL LITHOGRAPHY SYSTEM Federal contract opportunity
- Solicitation number
- SB1341-10-RQ-0329
About this file
Amendment is issued to provide answers to additional questions submitted by potential offerors concerning the solicitation.
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Other files for this federal contract opportunity
| File | Type | Posted |
|---|---|---|
| ATTACHMENT 1 SB1341-10-RQ-0329 061710.pdf | ||
| COMB SYNOP_ SOL SB1341-10-RQ-0329 061710.pdf |
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1. Amendment is issued to provide answers to questions submitted by prospective offeror(s) concerning solicitation SB1341-10-RQ-0329, as follows:
Q2. Section 2. And Addendum Section 2 – Operational Performance: How is uptime defined?
Is it based on one shift operation?
A2. Uptime based on 24 hour operation, 5 days per week.
Q3. Section 3.2f and Section 4.4: Please define “binary” mask.
A3. Binary meaning a typical chrome-on-glass mask with no reticle-enhancement techniques (RET) applied.
Q4. Section 3.4: DOF is specified as less than or equal to 1 micro. Should this be greater than or equal to 1 micron?
A4. Yes, it should be greater than or equal to 1 micron (DOF >/= 1 um).
Q5. Section 5: What type of software documentation needs to be provided? Please elaborate.
A5. Software documentation should explain use, reinstallation, backups and any maintenance service such as keys required to run software with the system.
Q6. Inspection and Acceptance: Please define TIC.
A6. Technical Information Contact (TIC).
Q7. Inspection and Acceptance: Will the 100 wafers supplied by NIST for the wafer handling test meet SEMI specification?
A7. Yes.
Q8. Addendum Section 3.4: Please define the k1 and k2 versus feature size plots that you are looking for.
A8. K1 and k2 are proportionality factors related to resolution and depth of focus, respectively.
Plots of k1 and k2 versus feature size for a commercially available resist system can be generated to give some insight into the overall process latitude we can expect from the system.
Q9. Please detail the number of different chucks that will be required to be quoted as well as the various sizes.
A9. Chucks to be quoted shall include:
100 mm diameter substrates 100 mm diameter substrates with backside alignment
75 mm diameter substrates 150 mm diameter substrates 200 mm diameter substrates Small piece holder
Q10. Minimum insurance requirements:
Workers Comp General Liability Automobile (Hired/Non-Hired)
Is there an excess liability requirement?
A10. No
Q11. Will a performance bond be required? If so, what is the minimum required?
A11. No.
Q12. Are there any fiscal audits required?
A12. Please read FAR 52.204-11 for requirements, if any.
Q13. Other than ARRA reporting requirements, are there any additional reports that need to be filed?
A13. No.
Q14. Must there be any specific policies in place, i.e. Affirmative Action?
A14. Please read FAR 52.212.5.
Q15. Are there any additional statutory or administrative requirements that are noteworthy and must be given consideration?
A15. All terms and conditions in the solicitation will be included in the resultant contract.
2. The “Response Date” remains unchanged, July 14, 2010, 12:00 EDT.
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