Reactive ion etching (RIE) tool
Closed Solicitation Posted
- Solicitation number
- 6-MO34-Q-00321-00
- Agency
-
Office of Science
Department of Energy
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- PSC
- 6640 Laboratory Equipment And Supplies
- Points of contact
Notice details come from SAM.gov. Updated .
About this opportunity
The Department of Energy Office of Science seeks quotations for a Reactive Ion Etching (RIE) tool, with responses due June 24, 2026. This is a Request for Quote (RFQ) issued by Argonne National Laboratory for a complete RIE tool system used in semiconductor fabrication and material processing for research and development environments.
No set-aside applies to this procurement. The NAICS code is 54171, Research and Development in the Physical, Engineering, and Life Sciences; the PSC code is 6640, Laboratory Equipment and Supplies. The solicitation package contains specifications, delivery timelines, pricing terms, evaluation criteria, and standard Department of Energy contract terms including inspection requirements and compliance obligations. Vendors must review all solicitation documents to understand the complete scope of work and contractual obligations.
Notice text
Reactive ion etching (RIE) tool
Files
| File | Type | Posted |
|---|---|---|
| Argonne Request for Quote 6-MO34-Q-00321-00 .zip | ZIP file |
Similar open opportunities
| Opportunity | Agency | Set-aside | Responses due |
|---|---|---|---|
| Zoller Power Shrink 600 | Department of Energy | No set-aside |
On GovTribe
Work this opportunity
- Track it in your pipeline
- Find teaming partners
- Similar opportunities
- Ask GovTribe AI about this opportunity