Metal Etch Inductively Coupled Plasma Reactive Ion Etching (ICP - RIE) Tool
Closed Pre-Solicitation Posted
A newer special notice was posted. See the latest special notice from .
- Solicitation number
- N00173-20-RFI-ST01
- Agency
- Office of Naval Research Secretary of the Navy, Department of Defense
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334419 Other Electronic Component Manufacturing
- PSC
- Not on record
- Place of performance
- Washington Dc Usa
Notice details come from SAM.gov. Updated .
About this opportunity
The Naval Research Laboratory seeks potential sources for a Metal Etch Inductively Coupled Plasma Reactive Ion Etching tool capable of dry etching metals, metal oxides, and nitrides. Interested parties must provide contact and company information, a description of relevant products meeting the minimum technical specifications by March 2nd, 2020 to the Contract Specialist via email. The tool must include a process chamber, plasma source, substrate bias generator, gas delivery system, load lock, and vacuum pumping capabilities as described in the specifications document.
No set-aside will be used for this procurement. Respondents should suggest applicable NAICS and PSC codes and confirm whether proposed items would be commercial. The specifications sheet contains technical requirements for etching a variety of materials but does not include estimated value or quantity.
Notice text
2 versions
Update #2 · Latest ·
The Naval Research Laboratory is searching for potential sources that are capable of meeting the requirement described in the attached specifications for a Metal Etch Inductively Coupled Plasma Reactive Ion Etching (ICP - RIE) Tool.
CONTRACTOR RESPONSE FORMAT:
The NRL asks that interested parties, at a minimum, supply the following information via email:
Contact Information
- Name of Company and Point of Contact (POC)
- Business Size/Socioeconomic Categories
- Unique Entity ID (DUNS) and Cage Code
Technical Information
- Description of the product(s)/capabilities/resources relevant to the attached draft specifications
- Name of the company that manufactures the product/equipment for which specifications are provided (if other than the interested party submitting the response)
- If the interested party is the equipment manufacturer, a list of any authorized resellers of the equipment
- Any questions/suggestions related to the specifications
- Suggested NAICS Code of proposed solution
- Suggested PSC Code of the proposed solution
- Whether the proposed item would be considered a commercial item in accordance with FAR 2.101
Responses should be no more than 15 pages, and should be emailed to the Contract Specialist at todd.schwartz@nrl.navy.mil.
NOTE: THIS IS NOT A SOLICITATION. This is a Sources Sought Notice (SSN)/Request for Information (RFI) for planning purposes only, and is not to be construed as a commitment by the Government, nor will the Government pay for information solicited. Since this is a SSN/RFI, no evaluation letters and/or results will be issued to the respondents. The Government is not committed to awarding a contract or issuing a solicitation pursuant to this announcement. No solicitation package is available at this time.
Update #1 ·
The Naval Research Laboratory is searching for potential sources that are capable of meeting the requirement described in the attached specifications for a Metal Etch Inductively Coupled Plasma Reactive Ion Etching (ICP - RIE) Tool.
CONTRACTOR RESPONSE FORMAT:
The NRL asks that interested parties, at a minimum, supply the following information via email:
Contact Information
- Name of Company and Point of Contact (POC)
- Business Size/Socioeconomic Categories
- Unique Entity ID (DUNS) and Cage Code
Technical Information
- Description of the product(s)/capabilities/resources relevant to the attached draft specifications
- Name of the company that manufactures the product/equipment for which specifications are provided (if other than the interested party submitting the response)
- If the interested party is the equipment manufacturer, a list of any authorized resellers of the equipment
- Any questions/suggestions related to the specifications
- Suggested NAICS Code of proposed solution
- Suggested PSC Code of the proposed solution
- Whether the proposed item would be considered a commercial item in accordance with FAR 2.101
Responses should be no more than 15 pages, and should be emailed to the Contract Specialist at todd.schwartz@nrl.navy.mil.
NOTE: THIS IS NOT A SOLICITATION. This is a Sources Sought Notice (SSN)/Request for Information (RFI) for planning purposes only, and is not to be construed as a commitment by the Government, nor will the Government pay for information solicited. Since this is a SSN/RFI, no evaluation letters and/or results will be issued to the respondents. The Government is not committed to awarding a contract or issuing a solicitation pursuant to this announcement. No solicitation package is available at this time.
Attachments
| File | Type | Posted |
|---|---|---|
| 11-0017-20; 1-02_KR.TS.docx | DOCX document |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Metal Etch Inductively Coupled Plasma Reactive Ion Etching (ICP - RIE) Tool | Limited / Sole Source Justification | |
| Metal Etch Inductively Coupled Plasma Reactive Ion Etching (ICP - RIE) Tool | Special Notice | |
| Metal Etch Inductively Coupled Plasma Reactive Ion Etching (ICP - RIE) Tool | Pre-Solicitation |
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