Atomic layer deposition system

Added: Jun 09, 2010 9:32 am This solicitation is issued as a request for quotations (RFQ).
Need one (1) Custom built Atomic Layer Deposition (ALD) system with six individual sources for reactants-including water, ozone and multiple metallo-organic compounds, including heating up to 400⁰C. Requires multiple sources that can produce indium/tin oxide thin films for transparent conductors with true atomic layer control. Must have small footprint (2'x2') to fit exisiting lab space. System must be capable of producing coating aspect ratios of greater than 1:2000 in high exposure mode using a stop valve. System must be able to deposit atomic layers from six sources with atomic monolayer precision. Must have user-modifiable software that enables future expansion or optimization. System must trap exhaust chemicals before they reach the vacuum pump. System must accommodate samples up to 4" in diameter and up to 0.5" thick. System computer, hardware and software should be included.
The size standard for this effort is 500 employees. NAICS 333295. Delivery: 4 weeks . FOB: Destination. Payment Terms Net 30 Days: Evaluation of Award will be based on Best Value to the Government. Technical evaluation will be based on past performance, demonstrated quality of coatings produced by their equipment and the required time to deliver the completed system. This solicitation document and the incorporated provisions and clauses are those in effect trhough Federal AcquisitionCircular 2005.
ATTN: The following clauses and provisions apply:
FAR 52.212-1 Instructions to Offerors-Commercial Items
FAR 52.212-2 Evaluation-Commercial Items
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FAR 52.212-4 Contract Terms and Conditions
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FAR 52.222-39 Notification of Employee Rights concerning Payment of Union Dues and Fees
FAR 52.232-33 Payments by Electronic Funds Transfer-Central Contractor Registration
FAR 52.233-3 Protest after Award
FAR 52.247-34 FOB Destination
FAR 52.252-1 Solicitation Provisions Incorporated by Reference
FAR 52.252-2 Clauses Incorporated by Reference
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Quotations: Please submit your Quotation via e-mail to Chris Hampton at christopher.hampton@wpafb.af.mil by COB, June 11, 2010. Contracting Office address - 88 CONS/PKA-Technology support Flight 1940 Allbrook Drive, STE 3 Wright-Patterson AFB, OH 45433-5309. Any questions about this solicitation should be addressed to Chris Hampton, 937-522-4646, christopher.hampton@wpafb.af.mil. Technical questions about the ALD system should be addressed to Benji Maruyama, benji.maruyama@wpafb.af.mil.