Revised_Requirements_for_Tabletop_Scanning_Electron_Microscope.pdf

Requirements for Tabletop Scanning Electron Microscope

The System Simulation and Software Integration (S3I) Directorate of the Aviation and Missile Research Development and Engineering Center (AMRDEC) of the U.S. Army has the requirement to procure a compact scanning electron microscope (SEM).

The required characteristics of this tabletop SEM are as follows:

• System size and power requirements o Fit within a footprint of ≤30”(W) x ≤ 30”(D), to include the SEM unit, itself, and all ancillary equipment (e.g. power supplies, monitor, keyboard, etc.)

o Operable on 60Hz, 110/220 VAC o Provide system protection against power, heat, and vacuum failure

• SEM performance requirements o Light optical magnification variable from ≤5x to ≥15x o Electron magnification range variable from ≤100x to ≥100,000x o Resolution of <15nm o Acceleration voltage adjustable between ≤ 1 kV and ≥20 kV (30 kV maximum desired) o Includes backscatter electron detection (BSD) detector o Includes secondary electron detection (SED) detector o Includes energy dispersive x-ray spectroscopy (EDS) detector o Provide automatic filament saturation, emission current, gun alignment, and condenser lens alignment o Continuous monitoring and automatic adjustment of filament saturation.

• Sample size and handling requirements o Allows for sample sizes of up to at least 70mm x 70mm (ability to handle 100mm

(4”) diameter wafers highly desirable) o Computer control of sample position with movements in tilt, rotation, height and

x. Eucentric tilt up to 90o and compucentric 360o rotation for sample sizes up to at least 35mm x 35mm (larger sample size highly desirable)

• Navigation and image processing o Capable of elemental mapping o Capable of 3D roughness reconstruction o Correlation between optical and electron image to allow for accurate navigation o Automated image stitching of a minimum of 1,000 individual images; image alignment accurate to +/- 0.25 µm.