Requirements_for_Tabletop_Scanning_Electron_Microscope.pdf

Requirements for Tabletop Scanning Electron Microscope

The System Simulation and Software Integration (S3I) Directorate of the Aviation and Missile Research Development and Engineering Center (AMRDEC) of the U.S. Army has the requirement to procure a compact scanning electron microscope (SEM).

The required characteristics of this tabletop SEM are as follows:

• Fit within a footprint of ≤12”(W) x ≤ 24”(D)

• Light optical magnification variable from ≤5x to ≥15x

• Electron magnification range variable from ≤100x to ≥100,000x

• Resolution of <15nm

• Acceleration voltage adjustable between ≤ 1 kV and ≥30 kV

• Includes backscatter electron detection (BSD) detector

• Includes secondary electron detection (SED) detector

• Includes energy dispersive x-ray spectroscopy (EDS) detector

• Provide system protection against power, heat, and vacuum failure

• Provide automatic filament saturation, emission current, gun alignment, and condenser lens alignment

• Continuous monitoring and automatic adjustment of filament saturation.

• Capable of elemental mapping

• Capable of 3D roughness reconstruction

• Correlation between optical and electron image to allow for accurate navigation

• Allows for sample sizes of at least 100mm x 100mm

• Computer control of sample position with movements in tilt, rotation, height and x.

Eucentric tilt up to 90 degrees and compucentric 360 degree rotation.

• Automated image stitching of a minimum of 1,000 individual images; image alignment accurate to +/- 0.25 µm.