Salient Characteristics (Stylus Pro).doc
DOC document 80 KB Posted
- Attached to
- Stylus Profilometer
- Solicitation number
- W911QX23Q0166
About this file
This document outlines the salient characteristics for a stylus profilometer solicitation. The solicitation seeks a stylus profilometer meeting several key specifications, including the ability to operate on 100-120V power, scan samples up to six inches in both axes, rotate samples 360 degrees, apply less than 0.03mg of force, reduce acoustic noise, hold wafers from two to six inches in diameter, and include a two micron radius stylus and spare. Additionally, the profilometer must have a one millimeter vertical scan range, perform 2D and 3D measurements on six inch surfaces, achieve four angstrom or better vertical height repeatability, and include data analysis software capable of calculating 2D stress profiles on wafers up to six inches and exporting data in non-binary formats. The contractor must also provide manuals, installation guides, and a one year warranty. The related federal contract opportunity is solicitation number W911QX23Q0166 for a stylus profilometer through the Department of the Army Materiel Command Army Contracting Command located at Aberdeen Proving Ground.
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Other files
| File | Type | Posted |
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| Evaluation Criteria (Comparative) (Stylus Pro).docx | DOCX document | |
| Provisions and Clauses Full-Text Attachment (for Combo Synopsis-Solicitation) (Stylus Pro).doc | DOC document | |
| Combination Synopsis-Solicitation for Commercial Purchases (Under SAT) (Stylus Pro).docx | DOCX document |
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Salient Characteristics
Commercial Availability Certification:
I have evaluated the commercial marketplace and determined that all of the salient characteristics documented below are available in products/services offered in the commercial marketplace.
Signature (typed name): Thomas Parker Technical Point of Contact (TPOC) or Contracting Officer’s Representative (COR)
1. One (1) stylus profilometer meeting the following specifications:
a. System Power: 100-120 Volts (V), 50-60 Hertz (Hz)
b. System shall have a motorized X-Y stage with a scan range of at least six (6) inches in each axis
c. System shall have motorized sample rotation over a full 360 degrees
d. System shall have a low force mode capable of applying 0.03 milligrams or less
e. System shall include an environmental enclosure to reduce the transmission of acoustic noise to the profilometer
f. System shall be equipped with a series of vacuum chucks or an individual chuck capable of holding wafers ranging from two (2) inches to six (6) inches in diameter for wafer curvature/stress measurements
g. System shall be supplied with a two (2) micron radius of curvature stylus as well as an additional spare two (2) micron radius of curvature stylus
h. System shall come with a vibration isolation air table
i. System shall be capable of a vertical scan range of one (1) millimeter or more
j. System shall be equipped with the capability to perform 2D and 3D measurements over a six (6) inch diameter surface
k. System shall have a vertical height measurement repeatability of four (4) angstrom or smaller
l. Stylus Profilometer shall come with a data analysis package
i. Data analysis package shall be able to calculate 2D stress profiles of two (2) inch to six (6) inch wafers (or larger)
ii. Data collected shall be exportable in a non-binary format such as CSV (comma separated values), TXT (Text), or ASCII (American Standard Code for Information Interchange)
m. The contractor shall provide all associated user manuals, pre-installation guides, and supplementary information
n. The contractor shall provide warranty service for at least one (1) year
Contracting Officer:
Template last updated 07/28/2016
File details come from the government source that posted it. Updated .