Plasma Silicon Etcher Specification 11.19.2024.pdf

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PlasmaPro 100 Fluorine Etcher
Solicitation number
RFP334983
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This is a technical specification document for a Plasma Silicon Etcher, dated 11/19/2024, associated with Department of Energy solicitation RFP334983 for a PlasmaPro 100 Fluorine Etcher.

The specification requires an Inductively Coupled Plasma (ICP) Deep Reactive Ion Etcher (DRIE) capable of Bosch® silicon etching, shallow silicon etching at room temperature, cryogenic etching, and heated silicon etching. Key technical requirements include a 3kW ICP etch source, 600W plasma bias RF source, 300W low frequency plasma bias RF source, cryogenically cooled and electrically heated substrate electrode, and mechanical clamping for 100mm wafers. The system must include automated loadlock capabilities, specific pump interfaces (Kashiyama NeoDry loadlock pump and Handbell PD120 chamber backing pump), an Adixen ATH1600MT turbopump, integrated 200-850nm spectrometer for endpoint detection, factory and field NRTL certifications, and a minimum 3-year warranty.

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Plasma Silicon Etcher Specification 11/19/2024

The new CNMS Plasma etcher shall be an Inductively Coupled Plasma (ICP) Deep Reactive Ion Etcher (DRIE).

The plasma etcher shall be demonstrably capable of true Bosch® silicon etching, shallow silicon etching at room temperature, cryogenic etching, as well as heated silicon etching.

The plasma etcher shall include the following features:

• 3kW ICP etch source

• 600W plasma bias RF source

• Low Frequency 300W plasma bias RF source

• Cryogenically cooled and electrically heated substrate electrode

• Mechanical clamping and helium backing for 100mm wafer

• Close coupled gas source for Bosch® etching

• 200 – 850nm spectrometer integrated to the etcher software for end point detection

• Loadlock capable of automatically loading single 100mm diameter wafer

• Kit to interface CNMS supplied Kashiyama NeoDry loadlock pump

• Process chamber equipped with Adixen ATH1600MT turbopump

• Kit to interface CNMS supplied Handbell PD120 chamber backing pump

• Factory and Field NRTL Certifications

• 3 year or greater warranty

File details come from the government source that posted it. Updated .