Attachment III - Evaluation Criteria - v.2.pdf
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- Attached to
- Semi-Automatic Probe Station
- Solicitation number
- NB6720102002227
About this file
This solicitation requests quotations for a semi-automatic microwave probe station. The National Institute of Standards and Technology requires this equipment to perform automated measurements of integrated circuits up to 200mm at frequencies up to 1.1 THz. Quotes are due by August 19, 2020 and must meet the technical specifications in Attachment II. Evaluation will be based on technical approach and price, with technical approach being most important. Price will be considered but is the least important factor. The award will be a single firm-fixed price purchase order made to the responsible offeror whose conforming quote represents the best value based on the evaluation factors.
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Other files
| File | Type | Posted |
|---|---|---|
| Attachment I - Provisions and Clauses v.2.pdf | ||
| Attachment II - Requirements_v3 current.pdf |
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Attachment III – Evaluation Criteria
EVALUATION FACTORS
Procurement of a Semi-Automatic Microwave Probe Station Requirements
NB6720102002227
Award will be made, if at all, to the responsible offeror whose offer conforming to the requirements of the solicitation represents the best value to the Government considering the Government's evaluation of the following factors: (1) Technical Approach, (2) Price.
The above evaluation factors are in order of most important (Technical Approach) to least important (Price). All evaluation factors other than price combined are significantly more important than price. The importance of price in the evaluation will increase with the degree of equality among quotations of the non-price factors.
1. Technical Approach NIST will evaluate the extent to which the offeror’s proposal meets the minimum requirements in the specifications document, and the extent to which the proposed solution exceeds the minimum specifications in the following areas:
• Semi-automatic probe station must accommodate wafer sizes up to 200mm; must have fully programmable stage with 210 x 300 mm total stage movement in the XY directions with positional accuracy of 1 micron or less; must have 50mm chuck z movement with positional accuracy of 1 micron or less; must have at least +/- 5-degree chuck theta rotation (Specification 1)
• Must have design that allows for measurements at temperatures down to minus 60C without condensation or frost formation on wafer probes while minimizing cable losses at microwave and mm-wave frequencies (Specification 2).
• Must have two programmable micro positioners in east-west configuration with 25mm travel range in XY and 10mm travel range in Z-direction suitable for millimeter wave applications, positioners must include optional hardware needed to accommodate vector network analyzer extender heads from all major manufacturers including Anritsu, Rhode & Schwarz, Keysight, Virginia Diodes (VDI), Olsen Microwave Laboratories (OML) with minimal required path length between extender heads and probes (Specification 4).
2. Price The proposed price will be evaluated but not scored. The price evaluation will determine whether the proposed prices are fair and reasonable in relation to the solicitation requirements.
Proposed prices shall be entirely compatible with the technical quotations.
Although price is the least important evaluation factor, it will not be ignored. The degree of importance of the proposed prices will increase with the degree of equality of the quotations in relation to the other factors on which selections is to be based.
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