Attachment II - Requirements_v3 current.pdf

Attachment II – Specifications/Requirements Document

Semi-Automatic Microwave Probe Station Requirements

General Statement of Need: The National Institute of Standards and Technology (NIST)/Communications Technology Laboratory (CTL) needs to perform automated measurements of integrated circuits up to 200mm at frequencies up to 1.1 THz over a variable temperature range from minus 60C to +200C. As such, CTL requires a semi-automatic microwave probe station to enable precise automatic placement of microwave probes on wafers up to 200 mm in diameter. The probe station must support integration of microwave network analyzer extender heads available from commercial vendors on fully programmable manipulators while minimizing cable length for precise microwave probe placement to enable accurate two-port measurements at measurement frequencies up to 1.1 THz. The probe station must be compatible with measurements at temperatures down to -65C without condensation or frost on samples. The probe station must further accommodate an additional two rf probes on manual positioners for 4-port microwave measurements, and additionally accommodate 2 additional dc probes on manual positioners.

Detailed Specifications:

1. Semi-automatic probe station must accommodate wafer sizes up to 200mm; must have fully programmable stage with 210 x 300 mm total stage movement in the XY directions with positional accuracy of 2 microns or less; must have 50mm chuck z movement with positional accuracy of 1 micron or less; must have at least +/- 5 degree chuck theta rotation;

2. Must have design that allows for measurements at temperatures down to minus 60C without condensation or frost formation on wafer or probes while minimizing cable losses at microwave and mm-wave frequencies;

3. Must have thermal chuck that enables stable measurements at temperatures from 20C to +200C with 0.1C resolution; include option for expanded temperature range from minus 60C to +200C;

4. Must have two programmable micro-positioners in east-west configuration with 25mm travel range in XY and 10mm travel range in Z-direction suitable for millimeter wave applications; positioners must include optional hardware needed to accommodate vector network analyzer extender heads from all major manufacturers including Anritsu, Rhode & Schwarz, Keysight, Virginia Diodes (VDI), Olsen Microwave Laboratories (OML) with minimal required path length between extender heads and probes; micro-positioners must include capability for in-situ probe planarization; must include capability for manual operation; include specific option for integration of Anritsu ME7838 A/E/D series broadband converters with minimal path length between extender heads and probe; include two additional microwave probe arms on manual manipulators in north-south configuration for 4-probe microwave measurements up to 67 GHz as options; include two additional dc probe arms on manual manipulators for simultaneous dc bias as option;

5. Must include digital video microscope/camera capable of image capture; working distance of 45 mm or greater; fully programmable microscope motion over range 50x50x140mm (XYZ); integrated monitor(s);

Attachment II – Specifications/Requirements Document

6. Integrated programmable motion control incorporating stage, manipulators, and microscope movement;

7. Chuck must have vacuum areas for single ICs down to 5mm x 5mm and up to 200mm diameter;

8. Must have four auxiliary chucks with independent vacuum control for calibration substrates and/or cleaning pads;

9. Must include Integrated anti-vibration table;

10. Must include instrument shelf/rack for mounting of microwave instruments close to wafer probes/extension heads;

11. Must include GPIB or equivalent interface for remote control operation;

12. Must include delivery and installation;

13. Must include on-site training for up to 3 technical staff members;