Attachment 1 - Requirements Document.pdf

REQUIREMENTS DOCUMENT

Title: Semiconductor Electronics Test System

Lab: Materials Measurement Laboratory/Applied Chemicals and Materials Division (647)

I. BACKGROUND INFORMATION

As part of the CHIPS Act, researchers at the National Institute of Standards and Technology (NIST) are engaged in metrology research and development to promote innovation and industrial competitiveness in U.S. semiconductor device manufacturing. NIST has identified seven Grand Challenges in metrology research and development that require critical attention. As part of efforts to advance metrology tools and measurement science for Metrology for Materials Purity, Properties, and Provenance (Grand Challenge 1), NIST requires instruments for measurement of semiconductor microelectronic devices and their constituent materials.

Pursuant to the CHIPS mission, the Grand Challenge 1 Program’s strategy is to develop measurement technologies, properties data, and standards focused on defect and contaminant identification to support uniform materials quality and traceability across the supply chain. One specific effort within this program performs research and development to enable evaluation of two-dimensional and wide bandgap materials to further device reliability. This work is led by NIST’s Applied Chemicals and Materials Division, which characterizes the properties and structures of industrially important materials.

As part of this program to characterize two-dimensional and wide bandgap materials, NIST requires a semiconductor electronics test system to allow for lab scale testing of test structures and devices to evaluate material performance.

II. PURPOSE

The equipment requested is a semiconductor electronics system for the CHIPS Metrology 1.01 project on the Evaluation of 2D and wide band gap material quality Towards Devices Reliability. This equipment will be used to perform electronic device measurements. These tests are used to ensure that devices perform as intended and will be reliable for the expected lifetime of the electronics. This is essential for this project as these materials are innovative next generation materials that are being considered for new and improved electronics, but their reliability and performance are not well known yet.

This purchase of a new electronics system is to replace 30+ year old electronics. The new materials require that the desired equipment be capable of performing at extended ranges and sensitivity for current and voltage measurements which the old electronics are not able to measure. Updating this equipment will allow for accurate measurements on these materials where the old electronics will only provide limited data or with unacceptable uncertainty. All testing goals for the project rely on these electronics, so this procurement is the most vital piece of equipment towards the success of the project and should be awarded as soon as possible. From this work, we will establish reliability limits for next generation electronics, inform US manufacturers of potential reliability pitfalls to enable more effective manufacturing as these electronics are developed and advance the US industry innovation for new, next-generation electronics.

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III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award.

Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

This power device analyzer/curve tracer mainframe must have the ability to characterize power devices up to 10kV and 1600 A. It must be able to measure capacitance with up to 3000 V of DC bias and support high-power pulsed measurements to prevent device self-heating that distorts measurement results. The associated software must have built-in auto analysis functions to simplify data analysis and facilitate easy data export to PC based work environments.

Line Item 0001:

Description: Keysight B1505A Power Device Analyzer/Curve Tracer Mainframe with integrated SMUs Quantity: 1

A. Technical Specifications

a. Power Device Analyzer/Curve Tracer Mainframe

i. Includes enhanced care plan and warranty for 5 years with less than 2 business hour remote technical support response times, repair turnaround or response time of less than 7 business days, includes calibration services with less than 5 business day turnaround and regular firmware releases.

ii. Includes one medium power source/measure unit (SMU)

iii. Includes one high voltage SMU

iv. Includes two medium current SMUs

v. Includes a multi-frequency capacitance measurement unit,

vi. Includes all necessary cables and connection tees including

1. A 3 m cable

2. 60 Hz line frequency

3. Coaxial tee male-BNC to female BNC 500 VAC

4. High voltage SMU unit cables (1.5 M)

5. High current BNC coaxial cables (1.5 M)

6. Triaxial cable for DC voltage = 210V

7. Triaxial guard connected to BNC (DC 210V)

8. High voltage plug connector for panel mount

9. SHV cables (x 3)

vii. Modules selector to switch between devices under test with a 5 year extended warranty and high voltage bias tee. The module selector unit should automatically switch between the high-current measurement (up to 1500 A), high-voltage measurement (up to 3kV) and precision SMU measurement (10 fA resolution) without having to change any cabling.

viii. 1 kOhm R-box for gate – enables testing for vertical and lateral devices

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ix. On-wafer gate charge measurement adaptors for 20A/3kV with a 5 year extended warranty to enable gate charge measurement on packaged parts or on wafer. The measurement shall be able to be done with drain/collector bias up to 3 kV and 500 A and +/- 40V gate/base sweep.

Line Item 0002:

Description: Precision SMU Quantity: Insert quantity required

A. Technical Specifications

a. 2 channel SMU with 10fA resolution, 210 V, 3A DC/10.5 pulse, 5 years of support and extended calibration plan. This SMU unit should have a wide output range up to 210 V, 3A DC, 10.5 A pulsed. It should have a resolution of 10 nV/10 fA (6.5 digit), 10 us high speed digitizing capability, fast sweep measurement capabilities, and 100 k deep data buffer.

IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear. Keep in mind that every task does not require a deliverable. Deliverables are always tangible items (i.e., report, minutes, etc.)

Complete the table providing the information for all the tasks identified above.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Power Device

Analyzer/Curve Tracer Mainframe with integrated SMUs

1 No later than 6 weeks after receipt of order.

NIST Boulder

2 Precision SMU 1 No later than 6 weeks after receipt of order.

NIST Boulder

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 1 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

PLACE OF PERFORMANCE

All work, including installation, site acceptance, and training, shall be performed at NIST (325 Broadway, Boulder CO 80305) Building 2. The government will provide access to the Building for the contractor for the entire period of performance of this contract. The day-to-day

4 | P a g e supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

Regular Business Hours (usually pertains if work is being performed onsite at NIST;

otherwise, delete if not needed).

Regular business hours are Monday through Friday, (8:00 am to 4:00 pm) Mountain Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

Up to 15 weeks from the date of award, not including warranty or extended service agreement options.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Attn: Elisabeth Mansfield 325 Broadway Boulder, CO 80305

VI. TRAINING

The contractor shall be available for support session during installation and initial use as part of the extended care agreement. The support shall include the ability to contact the company for a walk through and thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting.

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

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1. NIST shall acquire data on the NIST instrument on NIST supplied electronic test structures. The data shall be required to demonstrate conformance with the performance specifications defined herein.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 5 years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

1. All parts and labor included to return to factory specs.

2. Calibration after warranty service completed.

3. Remote technical support within 2 business hours

4. Response time of less than 7 business days turnaround for repair services.

IX. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise

6 | P a g e requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800- 171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

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If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XI. REQUIREMENTS FOR CONTRACTOR PERSONNEL (Remove if not applicable)

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO).

There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.