Questions_and_Responses.docx

High Purity Nitrogen Purification System Solicitation No. 1333ND19QNB680090

Question 1: What is the specification for the pre-filter to be replaced on the gas pad?

RESPONSE: Upgrade existing PALL Filters. High-Flow Emflon Filter Element with a removal rating greater than 3nm. The following PALL Filter is for informational purposes only of a filter with a removal rating greater than 3nm.

Part Numbers/Ordering Information Part Nominal Length Outer Diameter U-Cup Flow Rate Number (mm / in) (mm / in) Seal Nm3/h / SCFM

HFE620FGJU 508 / 20 171.5 / 6.75 EPR 3,250 / 1,913

HFE640FGJU 1,016 / 40 171.5 / 6.75 EPR 6,500 / 3,826

25 Harbor Park Drive Port Washington, New York 11050

1.800.360.7255 toll free (only in US)

1.516.484.3600 phone

1.516.625.3610 fax microelectronics@pall.com Question 2: What is the maximum percent concentration of hydrogen that can be vented from the purifier to the NIST exhaust system? Does it need to be below the Lower Explosive Limit (LEL) of 4%?

RESPONSE: The vented hydrogen from the purifier to the NIST exhaust system connected to the scrubber unit. The LEL for H2 is 4%. But this figure requires the hydrogen is in Air, which has 21% Oxygen.

In SAES NITORGEN PURIFICATION SYSTEM regeneration piping, there is no Oxygen present. It’s only Nitrogen and Oxygen. The same rules do not apply when there is no oxygen present.

During regeneration the H2 flow is 4.1 slpm, while the N2 flow is 166 slpm (10 Nm3/hr). This is ~2.5% H2.

Also, this regeneration hydrogen is located in an all welded system. There are no VCR connections in this section of piping.

Question 3: Per the Scope of Work, Utility Requirements, please identify the location for each utility that the contractor will be responsible to connect to.

RESPONSE: Electrical outlet is provided by NIST next to the purifier. The connection to the compressed air system that is close to the purifier and the connection to acid exhaust duct are detailed in Drawing P-5.

Question 4: If a water-cooled heat exchanger is required, is cooling water available and what is the location?

RESPONSE: Yes, in the sub fab location near the purifier. The lab cold water line is next the compressed air connection approximately 10’ from the floor and within 10-15’ from the purifier.

Question 5: The Drawing P-5 states that the hydrogen source is to be connected to existing cabinet, VMB-18. The SOW states that a new cabinet is to be supplied. Does the solicitation require the installation of a new cabinet for hydrogen and if it does, what are the specification requirements for the cabinet?

RESPONSE: No new cabinet is required. The hydrogen source is to be connected to the existing cabinet, VMB-18, as illustrated in Drawing P-5.

Question 6: Are the following features required on the purifier:

· Inlet Pressure, Transducer, 4-20mA Isolated Analog Output

· Outlet Pressure, Transducer, 4-20mA Isolated Analog Output

· Mass Flow Meter, 4-20mA Isolated Analog Output

· Water Cooled Heat Exchanger

· Separate Control Power

· Spare Parts Kit

RESPONSE: YES.