Attachment_1_Statement_of_Work.pdf

Statement of Work Nitrogen Purification System Capacity Upgrade

The National Institute of Standards and Technology (NIST) Acquisition Management Division intends to procure High purity nitrogen filtration system with delivery infrastructure for use in the Physical

Measurement Laboratory (PML) NanoFab to increase capacity and provide reliable operation. Liquid nitrogen is vaporized at the liquid tank and pass through the high capacity filtration system to provide clean gaseous nitrogen to NanoFab labs instruments.

BACKGROUND INFORMATION

NIST building 215 currently utilizes a liquid nitrogen bulk gas system to provide gaseous nitrogen to the facility. The bulk system supplied by an 11,000-gallon tank and vaporizer bank. The system supports numerous areas in the facility, including the clean room facility.

The clean room facility is supplied from the bulk gas facility. Due to the equipment used in the facility, the nitrogen gas supplied to the clean room needs to be conditioned through a purification system. The system is comprised of several key components.

They Include:

1. Pre-Filter System on the bulk gas pad.

2. High Purity (HP) stainless steel gas line from the gas pad to a gas purifier in the facility.

3. Ultra-High Purity (UHP) pressure reducing manifold

4. Gas purifier system located in the facility.

5. Delta- T gas analyzer

6. Gas distribution system in the building, UHP stainless steel.

The existing system has several deficiencies that are impacting the clean room operations.

They are follows:

1. The piping system is undersized in general. The current gas delivery system consists of ¾” and ½” tubing.

2. The purification system consists of two purification canisters (Entergris Model:

SS10MF18YR, .003 micron) that have a capacity of 1000 lpm. The system was designed to operate with a demand load of less than 1000 lpm. That allows for a single canister to be in use with the second on standby to be utilized when the other canister is sent out for regeneration. The demand load of the facility now exceeds

1000 lpm. As a result, both canisters are being used in parallel. As a result, the system no longer has the capacity to ship a purification canister out for regeneration.

3. The pressure reducing manifold is undersized. The pressure reducing regulators have a capacity of 1000 lpm. As a result, both pressure reducing regulators are being used and are wide open to deliver the maximum amount of gas to the facility.

4. The gas analyzer cannot be used since the pressure being delivered to the unit exceeds the maximum inlet pressure of the unit. The elevated pressure is a result of having to deliver greater pressures to the facility to overcome an undersized distribution system.

As usage increases the NanoFab may need to bypass the nitrogen purification panel to maintain sufficient nitrogen pressure and flowrate to the equipment it serves. The reduction in nitrogen purity may affect purity levels of processes and deposited films in the NanoFab.

While the liquid nitrogen delivered is of the highest quality available, there can be batch-to-batch variation and long -term drift due to the internal bank conditions the filtration panel assures consistent high purity nitrogen to the critical process tools. Therefore, NIST requires the capacity of the high purity nitrogen system to be increased to prevent interruption of service.

CLIN 0001: PROCURE AND INSTALL NEW NITROGEN PURIFICATION SYSTEM:

In order to meet both the existing and future gas requirements for the clean room facility, the capacity and the delivery infrastructure of the high purity nitrogen gas system needs to be increased. NIST requires the installation of a new Nitrogen Purification System to deliver 5000 slpm of nitrogen gas will meet current and estimated future gas requirements. In addition, The Nitrogen Gas

Purifier shall meet the standard outlet purity as follows:

a. O2, CO, CO2, H2, H2O < 1.0PPB

b. Max # of particles: 1 ppcf

c. Particle Size @ 0.1µm.

Scope of work (Refer Drawing G-1 & P-1 to P-5):

1. The Inline filters size (Qty = 2Nos) from the bulk tank to the high purity nitrogen purifier will be increased from ¾” to 1”. The Pipe size from the bulk tank to the high purity nitrogen purifier will be increased from ¾” to 1-1/2”.

2. Replacement Regulator Bypass Manifold with 5000 SLPM capacity per regulator at 150 Psig.

3. Install New Nitrogen Purification System.

4. Regeneration gas vent pipe (3/4” lined from top of the Nitrogen Purifier) connect to acid exhaust duct 19’ above accessible floor (refer Drawing P-5).

5. Install Hydrogen Gas cabinet, switch and Hydrogen Line connection for nitrogen purifier regeneration.

6. Existing Entergris Nitrogen Purification System Model: SS10MF18YR will remain and be used as backup when new system is being serviced.

7. Demo ¾” inline filters and the ¾” pipe from the bulk tank to the high purity nitrogen purifier after acceptance of the new 1” inline filters and 1-1/2” pipe.

Utility Requirements for the Nitrogen Self Regeneration System:

i) Electrical 120VAC Circuit 20 Amp – 1 & 208, 3 Phase Circuit, 30 Amp -1

ii) Compressed Air Connection – 95 – 140 psig

iii) For Regeneration Hydrogen gas (purity 99.999%) at 100-250 psig Pressure

iv) Regeneration Gas to be Vented.

The Government is requesting the following be priced separately in the event additional funding becomes available. If additional funding becomes available, the Government will add the following to replace the current ½” distribution lines to 2” distribution lines to the cleanrooms.

CLIN 0002: OPTIONAL SYSTEM INTEGRATION (REFER DRAWING G-1 & P-1 TO P-5):

a. A 1-1/2” UHP bellows valve shall be incorporated into the new gas line after the existing filter system, within 5’ of the filter manifold.

b. The interior distribution line will be increased to a 2” main header.

c. The 2” High purity Nitrogen pipe and connect to ½” branches (total branches= 26) Refer

Drawings P-3 & P-4.

d. Demo downstream ½” pipe line from the high purity nitrogen system after acceptance of new 2” High purity pipe line for the distribution.

INSTALLATION AND REMOVAL OF EQUIPMENT

Removal of all Replaced Equipment

i) The vendor shall be responsible for all engineering, labor, and materials required.

ii) Demo ¾” inline filters and the ¾” pipe from the bulk tank to the high purity nitrogen purifier.

iii) Demo downstream ½” pipe line from the high purity nitrogen system.

iv) Vendor is responsible to move or relocate the existing filter and pressure reducing manifold shall be incorporated into the system as a backup to the new purity filtration system.

Installation of New Equipment

i) The vendor shall be responsible for all engineering, labor, and materials required to install the new high purity nitrogen system.

ii) The vendor shall be responsible for connecting the new components into the existing system.

iii) The new High Purity Nitrogen System to deliver 5000 liters per minute of nitrogen gas shall be connected in parallel with the existing nitrogen purification system.

iv) All hardware, valves, and connections required for operation and filling of the system shall be included.

Equipment and Installation Standards

i) All equipment, connections, and installation procedures shall comply with CGA standards, NFPA standards, and the site standards of the existing gas supplier to ensure safe storage and delivery are possible.

WARRANTY AND SERVICE SUPPORT

a. The High Purity gas nitrogen system shall include a minimum one year.

b. The Filtration elements shall have a minimum 5-year warranty.

c. Installation shall include a minimum 90-day warranty.

d. All warranties shall start on the date of government acceptance.

e. The vendor shall repair or replace at its cost, any defective items without any additional cost to the government including travel, labor, parts or any other expense.

f. During the warranty period, the vendor shall provide telephone support within one (1) business day of contact. Support shall be provided by a singular point-of-contact whom is familiar with the contract specifications.

DELIVERY OF EQUIPMENT

a. Packaging, crating, and shipping costs are the responsibility of the vendor.

b. All items must ship FOB destination.

c. Delivery shall take place within the vendor stated lead time.

d. The vendor shall install all equipment and make final tie in with the existing system. The

Statement of Work and attached drawings illustrate a diagrammatic concept of the project needs. The Vendor shall provide a complete Installation plan within 15 days of contract award showing proposed routing, size, means, and methods prior to material purchase and start of installation. The Notice to Proceed will be issued after approval of the installation plan and receipt of the purifier.

SECURITY CONSIDERATIONS

Contractor is required to have all personnel involved in the project to take the PML Cleanroom Training.

Additionally, Contractor badges shall be updated to allow access to the PML Sub-Fab level. This shall be performed prior to mobilization and not impact the period of performance.

TRAINING

The Vendor shall provide the following:

a. Two (2) days of training for up to three (3) NIST users.

b. The training shall be eight (8) hours in duration and shall occur on a Monday – Friday, 8:00 – 4:00PM EST.

c. Training content shall include basic operation and maintenance training.

INSPECTION/ACCEPTANCE

a. Final acceptance shall take place within 30 days of delivery.

b. In addition to the inspection and acceptance terms articulated in 52.212-4, the

Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system to be operated.

The contractor has the right to be present during tests and evaluations at the

Contractor’s expense.

ii) The Nitrogen Gas Purifier shall meet the standard outlet purity as follows:

a. O2, CO, CO2, H2, H2O < 1.0PPB

b. Max # of particles: 1 ppcf

c. Particle Size @ 0.1µm.

Place of Performance

NIST, Gaithersburg Campus, Building 215 Gas Pad and Sub-Fab Level

Period of Performance

120 days after Notice to Proceed/Approval of Installation Plan and Receipt of the Purifier