In this phase II project, amag consulting aims to address a critical GAP in commercially available beam simulation capability

Amag Consulting, LLC received a $400,000 cooperative agreement from the National Institute of Standards and Technology (NIST) under the Science, Technology, Business and/or Education Outreach program (CFDA 11.620), effective October 1, 2025 through September 30, 2027. The award funds development and enhancement of SIMUSEM simulation software designed to model electron beam and solid interactions, Scanning Electron Microscope (SEM) imaging, and electron trajectories. During this Phase II project, Amag will refine the SIMUSEM charging model by comparing simulated results to actual SEM images of charging-prone structures, such as silicon dioxide lines on silicon substrates. The company will also integrate magnetic field and roughness effects into the simulation to produce more realistic and accurate imaging capabilities.

The enhanced simulation technology is intended to enable semiconductor manufacturers to better understand nanoscale device structure and metrology while qualifying measurement processes for next-generation, smaller, and more energy-efficient chips. Binghamton University will serve as a subrecipient, with staff providing analytical support and comparison of simulated images. This cooperative agreement supports NIST's mission to stimulate technological innovation in the private sector and strengthen small business participation in federal research and development initiatives.

Activities

During its phase II project, amag will image structures which exhibit charging (such as silicon dioxide lines on a silicon substrate), and compare them to its simusem results. The comparison will be used to refine their simusem charging model. In addition, amag proposes to add magnetic field and roughness effects to the simulation to more accurately produce realistic images.

Expected outcomes

By simulating electron beam/solid interactions, scanning electron microscope (SEM) images, and electron trajectories, amag's enhanced technology proposes to help semiconductor companies understand the structure and metrology of manufactured nanoscale devices, and qualify metrology processes for next generation chips that are smaller and more energy efficient.

Intended beneficiaries

Semiconductor industrysubrecipient activities: binghamton university staff member will provide assistance with analysis and comparison of simulated images.