Stepper Photolithography Tool
Closed Pre-Solicitation Posted
- Solicitation number
- 80GSFC20R0062
- Agency
- Goddard Space Center National Aeronautics and Space Administration
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
Notice details come from SAM.gov. Updated .
About this opportunity
NASA/GSFC seeks to acquire a 5x i-line stepper photolithography system from Canon USA on a sole source basis. The stepper must pattern wafers from 100-200mm in diameter with minimum feature sizes down to 350nm and linewidth uniformity of less than 30nm. Interested parties may submit capabilities by August 24, 2020 for consideration of competitive procurement instead of sole source award.
There is no set-aside designation. The stepper will support NASA's technology development and production needs including for cosmic microwave background polarization detectors and microelectromechanical components. As the only supplier able to meet laboratory space and environmental restrictions, Canon USA is identified as the potential sole source recipient. The statement of work provides detailed technical requirements for the optical, mechanical, and interface specifications of the tool.
Notice text
NASA/GSFC has a requirement for a 5x i-Line Stepper Photolithography system (Stepper). The system is used to define submicron scale geometry structures in polymer based photoresists. The stepper shall align and expose patterns through a reticle transferring it onto the wafer under fabrication. The stepper shall be suitable for patterning wafers of 100, 150 and 200 mm diameter and have high resolution accuracy, repeatability of feature geometry and nanoscale registration accuracy. This is an essential tool for nearly all device fabrication projects under development and in production in the Detector Systems Branch at GSFC. In particular, this equipment is immediately needed for the technology development and production of detectors for Cosmic Microwave Background Polarization technology, Microwave Kinetic Inductance Detectors, Far-Infrared Detectors, X-Ray Calorimeters, Large Format Magnetic Calorimeters, and Microfluidic Components, EUV and Far-IR/Sub-mm optical components, superconducting amplifiers, and MicroElectroMechanical Microshutters which are important to Goddard’s lines of business.
NASA/GSFC intends to issue a sole source contract to acquire the items from Canon USA. In accordance with 10 U.S.C. 2304(c) (1), as implemented by Federal Acquisition Regulation (FAR) 6.302-1, “Only one responsible source and no other supplies or services will satisfy agency requirements,” Canon USA is the only company capable to provide a brand new i-line stepper with a newly manufactured lens that can meet the environmental and size restrictions of the Detector Development laboratory.
The Government intends to acquire a commercial item using FAR Part 12.
Interested organizations may submit their capabilities and qualifications to perform the effort electronically via email to Alpana Jenne at Alpana.K.Jenne@nasa.gov not later than 3pm EST on August 24, 2020. Such capabilities/qualifications will be evaluated solely for the purpose of determining whether or not to conduct this acquisition on a competitive basis. A determination by the Government not to compete this acquisition on a full and open competition basis, based upon responses to this notice, is solely within the discretion of the Government.
NASA Clause 1852.215-84, Ombudsman, is applicable. The Center Ombudsman for this acquisition can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html
Attachments
| File | Type | Posted |
|---|---|---|
| SOW for 5x_Stepper_Lithography FINAL (003).pdf |
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