Octos 10 robotic distribution modules

Closed Pre-Solicitation Posted

This opportunity was awarded. See the award notice from .

Solicitation number
W911QX-18-T-0076
Agency
Responses due
Set-aside
No set-aside

Opportunity facts

Contract number
W911QX18P0096 Federal contract award
Awardee
Kurt J Lesker Co
NAICS code
333242 Semiconductor Machinery Manufacturing
PSC
Not on record
Place of performance
US Army Contracting Command Aberdeen Proving Ground Adelphi Contracting Division 321 Colleran Road Aberdeen Proving Ground, Maryland 21005, United States

Notice details come from SAM.gov. Updated .

Notice text

Synopsis - J&A for Other than Full and Open Competition & Request for Information (RFI)

1. Class Code: 66


2. NAICS Code: 333242


3. Subject: NOTICE OF INTENT TO SOLE SOURCE -


Quantity one (1) OCTOS 10 ROBOTIC DISTRIBUTION MODULE
Quantity one (1) Single Chamber Load Lock Module
Quantity one (1) PVD75 SPUTTER PROCESS MODULE
Quantity one (1) UPGRADE SYSTEM TO KJLC EKLIPSE ADVANCED CONTROLS PACKAGE


4. Solicitation Number: W911QX-18-T-0076


5. Set-Aside Code: N/A


6. Response Date: 13 February 2018 at 3:00PM Eastern


7. Place of Performance: 
US Army Contracting Command - Aberdeen Proving Ground
Adelphi Contracting Division
321 Colleran Road
Aberdeen Proving Ground, MD
21005, USA


8. Description:


The United States Government intends to solicit and negotiate with only one source under the authority of FAR 6.302-1, Only One Responsible Source based on proprietary information. The Government intends to solicit and negotiate with Kurt J. Lesker Company, 1925 Rte 51, Jefferson Hills, PA, 15035-3681, for the following:


Quantity one (1) OCTOS 10 ROBOTIC DISTRIBUTION MODULE
Quantity one (1) Single Chamber Load Lock Module
Quantity one (1) PVD75 SPUTTER PROCESS MODULE
Quantity one (1) UPGRADE SYSTEM TO KJLC EKLIPSE ADVANCED CONTROLS PACKAGE.


This notice of intent is not a request for competitive proposals. However, this notice does function as a Request for Information (RFI) for offeror's who believe they can meet the Government's requirement (see Section 9 below). Any responsible source who believes it is capable of meeting the requirement may submit a capability statement, proposal, or quotation, which shall be considered by the agency, only if received by the closing date and time of this notice. A determination not to compete the proposed requirement based upon the responses to this notice is solely within the discretion of the Government.


9. Requirement:


One (1) Modular Cluster Tool Core System which includes:


•One (1) sputter deposition module;
•On-Board Programmable Logic Controller (PLC);
•System shall allow up to eight (8) additional modules to be attached, and interchanged for various ouput;
•Six (6) inch (") CF viewports at each transfer position;
•Genmark GB9 five-degree of freedom servo controlled robot;
•Sample handling for 150 millimeter (mm) diameter wafers;
•CTI-10, 4000 l/s cryogenic pump with 9600 compressor;
•Scroll pump roughing;
•Wide range vacuum gauge. Ion gauge and pirani;
•One (1) Single Chamber Load Lock Module with a 304 stainless steel box chamber, O-ring sealed loading doors, and ten (10) substrate cassette included with holders for 150 mm diameter substrates;
•System shall be compatible with current dedicated Atomic Layer Deposition (ALD) systems, (PVD) evaporation system, and customized packaging system.


Responses to this notice are due No Later Than (NLT) 13 February 2018 at 3:00PM Eastern by email at rebecca.b.patterson.civ@mail.mil


Point of Contact for this notice is Rebecca Patterson, 301-394-5351, rebecca.b.patterson.civ@mail.mil

Notice history

Notice Type Posted
Octos Cluster Tool Core Award Award Notice
This notice Latest pre-solicitation Pre-Solicitation

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