Maskless Aligner Photolithography System
Closed Special Notice Posted
This opportunity was awarded. See the award notice from .
- Solicitation number
- N00173-19-Q-CM08
- Agency
- Office of Naval Research Secretary of the Navy, Department of Defense
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- Place of performance
- 4555 Overlook Avenue Sw Washington Dc 20375 USA
Notice details come from SAM.gov. Updated .
About this opportunity
This Special Notice announces the U.S. Department of Navy's intent to award a sole source contract to Heidelberg Instruments Inc. for a maskless writer photolithography system. The Naval Research Laboratory requires this system for micro and nano fabrication processes.
The Notice provides contractors until September 20th to submit capability statements demonstrating ability to meet the system's specifications, which include a minimum feature size of 0.6um, write area of at least 150x150mm, substrate size compatibility from 5x5mm to 6x6 inches, and line width variation not exceeding 100nm. Integration of Windows 10 software, autofocus functionality, sub-1um alignment accuracy, and throughput around 285 mm2/min are also required. Responses must be submitted within 15 days of the Notice publication date for the Navy to consider alternative award options, though sole source award to Heidelberg Instruments remains the intended approach. Training, a one year warranty, and service support must be provided by the selected vendor.
Notice text
The U.S. Department of Navy, Naval Research Laboratory (NRL) Contracting Division intends to enter into a sole source contract with Heidelberg Instruments Inc. in accordance with FAR 6.302-1 for the award of a Maskless Writer Pattern Generator (Maskless Aligner).
Please see the attached salient characteristics for additional details. The RFI posting can be referenced under N00173-19-RFI-JL07.
This is a special notice prepared in accordance with Federal Acquisition Regulation (FAR) Subpart 5.2, Synopses of Proposed Contract Actions. A solicitation will not be posted; however, any firm that believes it can meet this requirement may give written notification to the Contracting Officer within 15 days of publication of this announcement. Any submitted capability statement, proposal, quotation, or supporting evidence must be in sufficient detail to demonstrate the ability to comply with the requirement. Responses received shall be considered by the agency; however, a determination by the Government to compete the proposed procurement based on the responses to this notice is solely within the discretion of the Government.
Attachments
| File | Type | Posted |
|---|---|---|
| Specifications.pdf |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Maskless Aligner Photolithography System | Award Notice | |
| Maskless Aligner Photolithography System | Special Notice |
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