Spec_sheet_TM4000Plus_TM_4000_Attachment_01.pdf

Specifications

Item TM4000Plus TM4000

Magnification ×10~×100,000 (Photographic magnification) ×25~×250,000 (Monitor display magnification)

Accelerating voltage

5 kV, 10 kV, 15 kV

Image signal

Backscattered electrons (BSE) Secondary electrons (SE) Mix (Backscattered electrons + Secondary electrons)

Backscattered electrons

(BSE)

Vacuum mode

BSE: Conductor/Standard/Charge-up reduction SE: Standard/Charge-up reduction Mix: Standard/Charge-up reduction

BSE: Standard/Charge-up reduction

Image mode(BSE)

COMPO/Shadow 1/Shadow 2/TOPO

Sample stage traverse

X: 40 mm Y: 35 mm

Maximum sample size

80 mm (in diameter) , 50 mm (in thickness)

Electron gun Pre-centered cartridge tungsten filament

Signal detection system

BSE: High-Sensitivity 4-segment BSE detector SE: High-Sensitivity Low-Vacuum SE detector

BSE: High-Sensitivity 4-segment BSE detector

Auto image adjustment function

Auto start, Auto focus, Auto brightness/contrast

Save image size

2,560 × 1,920 pixels, 1,280 × 960 pixels, 640 × 480 pixels

Image format BMP, TIFF, JPEG

Data display Micron marker, micron value, magnification, date and time, image number and comments, WD (Working Distance), accelerating voltage, observation conditions, observation mode, image mode, detection signals

Evacuation system (vacuum pump)

Turbo molecular pump: 67 L/s x 1 unit Diaphragm pump: 20 L/min

Operation help functions

Raster rotation, Magnification presets (3 steps), Image shift (±50 µm @WD

6.0 mm)

Safety functions Over-current protection function, built-in ELCB

Size / weight Main unit:

330 (width) × 614 (depth) × 547 (height) mm, 52 kg (motorized stage)

330 (width) × 617 (depth) × 547 (height) mm, 52 kg (munual stage) Diaphragm pump : 144(width) × 270 (depth) × 216 (height) mm

Specifications