Digital_Microscope_Salient_Characteristics.pdf

Equipment Specification – Keyence VHX-6000 Digital Microscope

1. The US Army AMRDEC Protection Technology Laboratory has a requirement for a Keyence Corp. VHX- 6000 digital microscope. The required Keyence system includes the following:

Part # Qty Description

Microscope

a) VHX-6000 1 Digital Microscope

b) VHX-6100 1 Camera with Pixel Shifting

c) VHX-A60E 1 Console and Manual for VHX-6000

d) VHX-S660E 1 VH Free Angle Stand, Motorized Z, 100 mm motorized XY

Lenses and lens joints

e) VH-Z20T 1 VH Zoom Lens, 20x to 200x magnification

f) VHX-J20T 1 VH Lens Joint for VH-Z20T

g) VH-Z100T 1 VH Zoom Lens, 100x to 1,000x magnification

h) VHX-J100T 1 VH Lens Joint for VH-Z100T

i) VH-Z50T 1 VH Zoom lens, 50x to 500x magnification, long working distance

j) VHX-J50T 1 VH Lens Joint for VH-Z50T

Accessories

k) VHX-H4M 1 3D measurement for VHX-6000

l) 971927 1 Optical Fiber Light – Light Guide – for VHZ-50T

m) 971928 1 Optical Fiber Light – Light Guide Holder – for VH-Z50T

n) 971930 1 PL-55R polarizing filter for 971927 / VHZ50T

o) OP-87800 1 VH Lens Accessory - Rotating analyzer for Z100T/ Z100UT

p) OP-72406 1 VH Lens Accessory - Z100 Coaxial Polarizer

q) OP-87792 1 VH Fiber Adapter – Cable Converter for VH-Z250R/W

r) OP-81800 1 VH Lens Adapter – Contact Adapter for Z100 and Z100U

s) OP-87429 1 VH Lens Adapter – Polarizer for VH-Z20

This equipment is to be used in the execution of the laboratory’s mission relative to failure analysis is silicon devices.

2. The following are the salient characteristics of the Keyence system, as configured above:

a) Depth of field of 34mm or better at 20x magnification

b) Single lens with continuous 20x to 200x magnification with minimum working distance (WD) of 25mm or longer

c) Single lens with continuous 50x to 500x magnification with minimum WD of 85mm or longer.

d) Single lens with continuous 100x to 1,000x magnification with minimum WD of 25mm or longer.

e) Working distance of 3.5” for a magnification range of 50x to 500x in a single lens

f) Required field of view (FOV):

- 15mm or more at 20x

- 6mm or more at 50x

- 3mm or more at 100x

- 1.5mm or more at 200x

- 0.3mm or more at 1,000x

g) Handheld capability with continuous magnification from 20x to 1,000x

h) Lens tiltable around device under test (DUT) from -60 degrees to +90 degrees or wider continuously while keeping DUT centered in the FOV

i) Microscope stage motorized in X,Y, and Z, with minimum translation distance of 100mm in both X and

Y.

j) Record and process images with 16-bit or better dynamic range to produce glare-free high contrast images.

k) Identify and automatically measure particles based on optical characteristics including, but not limited to, color, brightness, contrast, and hue.

l) Manipulate lighting of an image from all directions in both real-time and post-capture.

m) No-cost service available over the lifetime of the system.