SB1341-16-RQ-0417_PsSOW.pdf

STATEMENT OF WORK

TITLE: Procurement of a Variable Pressure Scanning Electron Microscope (VP SEM)

LAB REQUESTING SERVICE: Material Measurement Laboratory, Materials Measurement Science Division

I. BACKGROUND INFORMATION

Materials Measurement Science Division (MMSD) is involved in the development of measurement methodologies for the chemical, morphological, and crystallographic characterization of matter down to nanometer spatial scales using excitation beams of electrons and x-rays to generate a variety of secondary signals that yield elemental and molecular information; studies fundamental measurements including x-ray and electron spectroscopies, computer aided imaging, and diffractometry to understand the basic chemistry and physics of microbeam sample interactions; develops improved methods of quantification as well as Standard Reference Materials and Data; and applies enhanced and multidisciplinary microanalysis and surface analysis techniques to diverse problems in material, semiconductor, optoelectronic, environmental, biological, and process technologies. In order to meet that mission, MMSD is in need of a new high resolution scanning electron microscope (SEM) with variable pressure capabilities. The variable pressure capabilities allow the examination of insulating and non-traditional specimens without the need to conductively coat the specimens for inspection and analysis. This allows for the rapid, direct to SEM examination of unknowns to inform sample preparation direction. The ability to examine in-process specimens without the need to conductively coat them allows for those specimens to be returned to process or be moved to other analytical techniques without having changed the nature of the specimen irreversibly.

II. SCOPE OF WORK

The vendor will provide a field emission gun variable pressure scanning electron microscope and microanalysis system. The microscope will be capable of operating as a conventional scanning electron microscope (SEM) with high vacuum in the specimen chamber as well as operating in variable pressure (VP) mode (other names for this mode include low vacuum and wet but they all represent a state where a gas is introduced to the specimen chamber in order to facilitate the reduction of specimen charging under the primary electron beam). The microscope will be outfitted with the highest resolution secondary electron and backscattered electron detectors for both modes and in-lens detectors and scanning transmission electron microscopy (STEM) detectors for the visualization of specimens. The vendor will have system responsibility for installing a high solid angle silicon drift detector (SDD) based energy dispersive spectroscopy and analysis system. The vendor will also take system responsibility for the move of an existing Gatan MonoCL4 elite spectroscopy and analysis system from the current microscope, to storage, and then reinstall and upgrade computer and software once the new VP SEM has met specifications.

III. SPECIFICATIONS

The Contractor shall provide one (1) VP SEM instrument system that meets the following minimum System Requirements as listed below. The Contractor shall install the instrument and provide training as described below.

System Requirements:

Field emission gun scanning electron microscope and all the necessary pumps, chillers, and connections necessary for operation (chilled water and compressed air are available) Sample chamber capable of both high vacuum SEM and variable pressure SEM operation Accelerating voltage and/or landing energy from 50V to 30kV Current range from 3pA to 20nA or wider 5-axis motorized stage with 100 mm or greater travel in X and Y directions, 50 mm or greater travel in Z direction, tilt capable of 90 degrees from normal, and rotation of 360 degrees

Image resolution in high vacuum; 1.2 nm or less at 15kV and 2 nm or less at 1kV secondary electron image resolution with gold on carbon or equivalent imaging test standard.

Image resolution in variable pressure mode; 2 nm or less image resolution with gold on carbon or equivalent imaging test standard.

Imaging detectors, including secondary electron (SE) and motorized, retractable multi-segment backscattered electron (BSE) for use in high vacuum and variable pressure modes

In-lens or in-column detectors for high resolution imaging Scanning transmission electron microscopy detector (STEM) system, fully integrated into the microscope control software for the collection of images Silicon Drift Detector (SDD) quantitative x-ray analysis system, with stage control and communication with the microscope control software. Primary SDD take-off angle shall be greater than 30 degrees, 50 mm square or larger, 126eV or better. The system shall have the ability to mount a second SDD with the same specifications as the primary SDD and shall have the ability to integrate the data. The contractor shall provide Software for qualitative and quantitative analyses and mapping of bulk, thin films, and particles including remote software license

IR chamber camera (IRCC) integrated into the microscope operation software Plasma cleaner, in vacuum (Plasma) A supply of consumables (i.e. replaceable apertures, lubricants, filters) sufficient to cover 4 preventive maintenance visits Inclusion of software for “large area image collection” and “sample navigation” The control computer shall meet the following minimum specifications:

o Operating System: Windows 7 or later, 64 bit o At least a 500 GB hard drive o Intel i5, i7, Xenon processor or better o At least 8 GB of RAM o At least a 24-inch monitor

The system shall include a control panel that allows for manual operation of the system for sample navigation, focus, and adjustments.

The system must include an operations and maintenance manual covering proper operation, routine maintenance, and troubleshooting for the instrument and controlling software. The manual may be supplied to the TPOC/COR in hard copy and/or electronic format.

Contract Options (depending on the availability of funds may be exercised at award or by contract mod before the end of the period of performance if additional funds become available)

The contractor shall provide three option years of maintenance services. The maintenance services shall provide, at a minimum, preventative maintenance services as specified in version of the manufacturer’s operations and maintenance manual at time of award, all released software upgrades, unlimited telephone support during NIST business hours, and 2nd business day on-site technical downtime support. The maintenance services shall cover all parts, labor and travel.

A complete service technician’s toolkit A stand-alone benchtop Au/Pd plasma coater with quartz crystal thickness monitor with spare target and 10 spare crystals Liquid Helium cryo-stage for ultra-cold CL work (He cryo) An optional second SDD detector with take-off angle greater than 30 degrees, 50 mm square or larger, 126eV or better with installation and integration into the required x-ray analysis system (2nd SDD)

Software for the Silicon Drift Detector (SDD) x-ray analysis system that will perform automated particle analysis and reporting

Installation and Integration of Gatan MonoCL4 Elite:

The Contractor shall install the instrument in Building 217, Room D101, at NIST Gaithersburg, MD. It will be the contractor’s responsibility to see that the instrument is delivered to the installation site including rigging from the dock to the lab if necessary. Installation shall include, at a minimum, uncrating/unpacking of all equipment, set-up and hook-up of all equipment, start-up, demonstration of specifications, and removal of all trash. Instrument will operate to manufacturer’s specifications upon installation. Installation will take place during normal business hours, between 8:30 am and 5:00 pm Eastern Time, Monday through Friday except Federal Holidays, and will be coordinated with the NIST Technical Point of Contact (TPOC).

Installation is to occur within 150 days of award.

Additionally, NIST requires the Contractor to integrate an existing Gatan MonoCL4 Elite Cathodoluminescence imaging and spectroscopy system (CL), serial number G09328 onto the equipment. NIST currently owns this system, and it is currently installed on a NIST owned FEI Company Quanta 200 SEM, serial number D8439. The contractor shall subcontract with Gatan service to remove the existing the MonoCL4 Elite from the FEI Company SEM and pack the system in its original shipping boxes for storage in the current lab location. Once the required SEM system is delivered, installed, and passed acceptance testing; the contractor Shall subcontract with Gatan services to unpack, install the MonoCL4 on the specified SEM and upgrade the MonoCL4 acquisition package to 64 bit, Gatan Microscopy Suite (GMS) to version 3.1, and add the field stitching montage package.

Warranty:

The Contractor shall provide, at a minimum, a one year warranty for the equipment including all released software upgrades and unlimited telephone support during NIST business hours, preventative maintenance services as specified in version of the manufacturer’s operations and maintenance manual at time of award and 2nd business day on-site technical downtime support.

The warranty shall cover all parts, labor and travel. The warranty shall commence upon successful completion of delivery, installation, training and demonstration of all required specifications.

Training:

Include at least 1 day of training by the installation engineer at NIST for a minimum of 2 NIST personnel covering normal operation, troubleshooting, and routine maintenance. Training will be provided during normal business hours, between 8:30am and 5:00pm Eastern Time, Monday through Friday, except Federal Holidays, and will be coordinated with the NIST Technical Point of Contact (TPOC) to ensure maximum availability of NIST personnel. Training is to occur within 10 days of the completion of installation.

Two or more additional days of applications training either on-site or at vendor site to occur 60 to 90 days after installation.

IV. PERIOD OF PERFORMANCE

The period of performance shall be one (1) year from award of this requirement.

V. PLACE OF PERFORMANCE

Installation of the instrument and training shall be accomplished at NIST, Gaithersburg, Maryland. Normal duty hours are Monday through Friday, 8:30 a.m. to 5:00 p.m. with the exception of Federal holidays.

VI. DELIVERABLES

Description Quantity Due Date

Analytical instrument One (1) 120 days after award of this requirement.

Installation of the analytical instrument Once 150 days after award of this requirement.

Operations and maintenance manual for the analytical instrument

One (1) 60 days after award of this requirement

Training of NIST personnel at NIST, Gaithersburg, MD

Once 10 days after installation.

Description Quantity Due Date Applications training of TPOC or designee Once 60-90 days after installation

VII. ACCEPTANCE CRITERIA

The Contractor shall supply a gold on carbon or equivalent imaging test specimen for use during the acceptance tests. The Contractor shall demonstrate that all imaging specifications and performance standards in their quote have been met. The vendor engineer and the TPOC/COR will sit down together and review how each of the specifications are met. Collect images to demonstrate the image resolutions listed in the vendor’s proposal with gold on carbon or an equivalent imaging standard specimen. Images from each mode will be measured with the David Joy algorithm described in Journal of Microscopy, Vol. 208, Pt 1, October 2002, pp 24-

34. The third party accessories may be demonstrated by the vendor engineer or by a third party engineer.

VIII. GENERAL INFORMATION

Safety: The Contractor employee shall be responsible for knowing and complying with NIST installation safety prevention regulations (http://www-i.nist.gov/mml/safety/policies/index.htm.)

Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and also is shown to the armed Security Police when entering the campus.