amendment_0002_SB1341_13_RQ_0487.pdf

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Attached to
Deep Silicon Etch (DSE) System Federal contract opportunity
Solicitation number
SB1341-13-RQ-0487
Issued by
Department of Commerce National Institute of Standards and Technology

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Amendment 0002

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Amendment 2 - NIST RFQ SB1341-13-RQ-0487

The purpose of this amendment is to change two specifications in the RFQ, and to extend the closing date and time.

Specification 3.a, in the “PROCESS CHAMBER AND VACUUM SYSTEM” section, is hereby amended to state:

The chamber shall be equipped with a heater to heat the chamber walls up to a minimum of 60° C.

Specification 10.d, in the “CONTROL SYSTEM AND SOFTWARE” section, is hereby amended to state:

The system shall be equipped with a Microsoft Windows XP or newer operating system.

The closing date and time are hereby extended to 3:00 p.m. Eastern time on Thursday, August 8, 2013.

All other terms and conditions of the original solicitation remain unchanged and in full effect.

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