SATPC0041822 Tab 04 4 SOW Redacted.pdf
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- Attached to
- To procure a high-voltage power for E-beam tools
- Solicitation number
- 80NSSC26938359Q
About this file
This is a Statement of Work for the procurement of an electron beam evaporation system by NASA Goddard Space Flight Center's Integrated Detector and Electronic Systems Branch (Code 521) to support thin-film deposition processes for detector and electronic systems development.
The contractor shall provide one complete electron beam evaporation system consisting of: one ST-6 Solid State Electron Beam Power Supply with 208VAC input power (either -8kV at 750mA or -10kV at 600mA, to be specified at time of order); one TT/ST/SX Remote Control unit (Part No. 123-1130-2-15); one High Voltage Grounding Probe (Part No. 110-0016-1); and one Model 861 Deposition Controller with dual sensor/source capability expandable to four sensors/sources. The Deposition Controller must include sequential control of two sources, one oscillator unit, a 25-foot shielded RJ45 cable, one 6-inch BNC to BNC cable, RS-232 communication interface, and either a 37-pin I/O board (Part No. 120-0564-1) or an optional 25-pin input/output board set. The system shall be delivered ready for integration into existing vacuum deposition chambers. Delivery is estimated at 8-10 weeks after receipt of order to NASA Goddard Space Flight Center, Building 11, Room E041, 8800 Greenbelt Road, Greenbelt, MD 20771. The procurement references Telemark Quotation Q20260623-6kv dated June 23, 2026, as the specification baseline.
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STATEMENT OF WORK
Procurement of Electron Beam Evaporation System Components
PR: ____________________
BACKGROUND
NASA Goddard Space Flight Center's Integrated Detector and Electronic Systems Branch (Code 521) requires advanced electron beam evaporation equipment to support thin-film deposition processes for detector and electronic systems development. This procurement will provide a complete solid-state electron beam power supply system with associated control, monitoring, and deposition measurement capabilities necessary for precision materials processing operations supporting NASA's mission objectives.
SCOPE OF WORK
The contractor shall provide one (1) complete electron beam evaporation system consisting of a solid-state electron beam power supply and associated control/monitoring equipment as specified in Telemark Quotation Q20260623-6kv dated June 23, 2026. The system shall be delivered ready for integration into existing vacuum deposition chambers at NASA GSFC.
Equipment to be Provided:
1. One (1) ST-6 Solid State Electron Beam Power Supply with 208VAC input power
(specify either -8kV, 750mA version OR -10kV, 600mA version at time of order)
2. One (1) TT/ST/SX Remote Control unit (Part No. 123-1130-2-15) for remote control and display of high voltage and emission current
3. One (1) High Voltage Grounding Probe (Part No. 110-0016-1)
4. One (1) Model 861 Deposition Controller with dual sensor/source capability
TECHNICAL REQUIREMENTS
Solid State Electron Beam Power Supply Power Input: 208VAC High Voltage Output: -8kV at 750mA OR -10kV at 600mA
Deposition Controller Support for two sensors with expansion to four sensors/sources Sequential control of two sources Includes one oscillator unit 25-foot shielded RJ45 cable for oscillator connection One 6-inch BNC to BNC cable RS-232 communication interface 37-pin I/O board (Part No. 120-0564-1) OR optional 25-pin input/output board set
DELIVERY REQUIREMENTS
Delivery Schedule Estimated Delivery: 8-10 weeks After Receipt of Order (ARO)
Delivery Location NASA Goddard Space Flight Center Building 11, Room E041 8800 Greenbelt Road Greenbelt, MD 20771
Receiving Contact:
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