Requirement final.pdf

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Low Temp Asher System
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1333ND23QNB640006
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Statement of Requirements TITLE: Low Temperature Asher (LTA)

I.BACKGROUND INFORMATION

NIST has the need for a benchtop radiofrequency oxygen plasma etching system to remove organic materials from silicon wafers leaving behind the inorganic particles. The thickness of the primary organic material, flexible Collodion, requires an RF generator with 13.56MHz frequency and a minimum of 100 Watts.

II.SPECIFICATIONS

The Contractor shall provide one (1) oxygen plasma radiofrequency low temperature asher system that includes a mechanical pump and oil for oxygen service that meets the following minimum technical requirements. NIST will install the equipment upon receipt and with telephone support if needed.

System minimum Requirements:

• The system must be a benchtop model, the chamber must be capable of processing six 1-inch diameter silicon wafers simultaneously.

• Oxygen plasma for low temperature organic material ashing.

• Radiofrequency generator with 13.56MHz frequency and at least 100W of power.

• Oxygen service vacuum pump and oil.

• Vacuum gauge and display.

• Rotameter control of oxygen flow (oxygen is NIST supplied).

• Must operate on 110V, 15A and 3-prong power cord.

• Must be capable of continuous unattended operation for at least 36 hours.

• Must include an Operations and maintenance manual in either electronic or hard copy.

Installation:

NIST will install the equipment within the laboratory.

Warranty:

The Contractor shall provide, at a minimum, a one year warranty for the equipment. The warranty shall cover all parts, labor and travel. The warranty shall commence upon Government acceptance.

III.DELIVERABLES

Delivery shall be to:

National Institute of Standards and Technology NIST 100 Bureau Dr.

Gaithersburg, MD. 20899-1640

Description Quantity Due Date

Low Temperature Asher One (1) Within 60 days after award of this requirement.

Operations and maintenance manual for the analytical instrument

One (1) Within 60 days after award of this requirement

IV.ACCEPTANCE CRITERIA

Final acceptance by the Government will be given after successful delivery, and demonstration of item specifications.

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