Inprentus-SOW.docx
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- Mechanically Ruled, blazed grating samples
- Solicitation number
- NNX17627363Q
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Statement of Work
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STATEMENT OF WORK
PR#: 4200627363
High Line Density, Ultra Low Micro Roughness, Blazed Gratings for Extreme UV Radiation May 22, 2017
NASA Goddard Space Flight Center has a requirement for mechanically ruled, high line density, ultra low micro roughness, blazed gratings for extreme ultraviolet (EUV) radiation. Four iterations will be required to establish the mechanical ruling parameters and deposition of the layer to be ruled to make significant progress toward the goal of a 6000 line/mm ruling density with < 0.4 nm RMS surface micro roughness.
| COMPONENT: | mechanically ruled, blazed gratings for EUV | ||
| Quantity | 4 iterations | ||
| Substrate: | single crystal silicon | ||
| Substrate size: | 1” diameter circle | ||
| Optical dimensions: | 6 mm x 6 mm | ||
| Line Density: | 6000 l/mm | ||
| Micro Roughness: | < 0.4 nm RMS on spatial scales of 10-1000 nm | ||
| Profile: Blazed Angle: | 3.29° | ||
| Maximum resolving power: | λ/Δλ > 15,000 | ||
| Coating: | Au, 40nm | ||
| Deliverables: | 4 gratings, each with accompanying atomic force microscope (AFM) data of the line profiles covering spatial scales of 10-1000 nm. |
The period of performance for these items to be delivered is 12 months.
Adrian Daw NASA/GSFC Solar Physics Lab
(301) 286-2278 Adrian.Daw@NASA.gov
Page 1 V2.0 3-15-2017
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