Specifications_Document.pdf

Specifications Document

Roughing (Vacuum) Pumps

NB687100-18-03361

August 4, 2018

Background: The National Institute of Standards and-Technology (NIST), located in Boulder CO., has a state-of-the-art research laboratory, which supports the most sensitive research. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF).

Many of the tools in this facility require vacuum chambers to fabricate microelectronic circuits. When one of these pumps fails, its associated tool is non-operational and NIST mission critical work is halted until the pump is repaired or a new pump can be installed. To minimize tool downtime, the BMF has standard rough pumps so that they can be interchanged between tools.

Purpose: The Microfabrication Group of the Quantum Electromagnetics Division, NIST-Boulder requires an on-hand stockage of various roughing vacuum pumps (refurbished or new) to ensure capability of immediate replacement of non-operational component pumps.

Brand Name Specifications: Items peculiar to one manufacturer. The Following items are essential to the Governments’ requirements and market research indicates other companies’ similar products, or products lacking the particular feature, do not meet, or cannot be modified to meet, the agency’s needs.

Thereby, no substitutions, changes or equivalents shall be acceptable.

Requirements: The Contractor shall provide:

• Eight (8) each Edwards XDS10 Dry Scroll Inert Roughing Vacuum Pumps.

• Two (2) each Edwards XDS35iC Dry Scroll Inert Roughing Vacuum Pumps.

• Three (3) each Edwards iH80 Dry Rotary Toxic Roughing Vacuum Pumps.

Technical Specifications:

1. Edwards XDS10:

a. Maximum Displacement (60 Hz electrical supply): 13.4 m3/hr

b. Maximum pumping speed (60 Hz electrical supply): 11.1 m3/hr

c. Maximum permitted inlet pressure and gas-ballast inlet pressure: 0.5 bar-gauge

d. Maximum permitted outlet pressure: 1 bar gauge

e. A three-position gas-ballast

f. In position ‘0’

Typical ultimate vacuum (total pressure, 60 Hz): < 6 x 10-2 mbar

g. In position ‘1’

(1) Typical ultimate vacuum (total pressure, 60 Hz): 1.2 x 10-1 mbar

(2) Gas-ballast flow: 3 l/min

(3) Water vapor pumping capacity: 70 g/hr

h. In position ‘2’

(1) Typical ultimate vacuum (total pressure, 60 Hz): 3 x 10-1 mbar

(2) Gas-ballast flow: 15 l/min

(3) Water vapor pumping capacity: 200 g/hr

(4) Water vapor tolerance: 35 mbar

i. Can be powered by both 115-120 VAC 60 Hz at 7.2 A and 230-240 VAC 60 Hz at 3.2 A.

j. Inlet Flange: NW25

k. Exhaust Flange: NW25

2. Edwards nXDS10i:

a. Nominal rotational speed: 1800 rpm

b. Displacement: 13.4 m3/hr

c. Peak Pumping Speed: 11.4 m3/hr

d. Ultimate Vacuum (total pressure): 0.007 mbar

e. Minimum standby rotational speed: 1200 rpm

f. Speed control resolution: 1 %

g. Maximum inlet pressure for water vapor: 35 mbar

h. Maximum water vapor pumping rate: 145 g/hr

i. Maximum continuous inlet pressure: 200 mbar

j. Voltage input: 100-127, 200-240 (+/- 10%)

k. Voltage frequency: 50/60 Hz

l. Inlet Flange: NW25

m. Exhaust Flange: NW25

3. Edwards XDS35i C:

a. Displacement: 43 m3/hr

b. Peak pumping speed: 35 m3/hr

c. Maximum inlet pressure for water vapor: 35 mbar

d. A three-position gas-ballast

e. In position ‘0’

Typical ultimate vacuum (total pressure, 60 Hz): < 0.01 mbar

f. In position ‘1’

1. Typical ultimate vacuum (total pressure, 60 Hz): 0.02 mbar

2. Gas-ballast flow: 3 l/min

3. Water vapor pumping capacity: 70 g/hr

g. In position ‘2’

1. Typical ultimate vacuum (total pressure, 60 Hz): < 10 mbar

2. Gas-ballast flow: 12 l/min

3. Water vapor pumping capacity: 240 g/hr

h. Maximum allowed outlet pressure: 1 bar gauge

i. Maximum allowed inlet and GB pressure: 0.5 bar gauge

j. Inlet flange: NW40

k. Exhaust Flange: NW25

l. Can be powered by both 100-120 VAC 60 Hz at 8.5 A and 200-230 VAC 60 Hz at 5 A.

m. Able to pump corrosive gasses

4. Edwards iH80:

a. Able to pump corrosive gasses that are typically used in semi-conductor microfabrication processes such fluorine and chlorine compounds and their byproducts created in plasmas.

b. Water cooling rate: 2 l/min

c. Typical peak pumping speed: 103 (at 60 Hz) m3/hr

d. Typical ultimate vacuum: 0.01 mbar

e. Inlet connection: ISO63 bolted

f. Outlet connection: NW40

g. Can be powered by 200-208/230/460 V at 60 Hz, 3-phase at a maximum of 15 A.

e. Edwards iXH100:

a. Able to pump corrosive gasses that are typically used in semi-conductor microfabrication processes such fluorine and chlorine compounds and their byproducts created in plasmas.

b. Water cooling rate: 2 l/min

c. Typical peak pumping speed: 100 m3/hr

d. Typical ultimate vacuum: 0.015 mbar

e. Inlet connection: ISO63 bolted

f. Outlet connection: NW40

g. System Power: 2.1 Kw

h. Can be powered by 200-230 at 60 Hz, 3-phase.

Technical Considerations: Refurbished units shall meet Original Equipment Manufacturer (OEM) standards. If no refurbished units are available, factory new units are acceptable. The Buy American Act applies. No foreign made units or components shall be provided or shall be accepted.

Delivery: The contractor shall deliver Fob Destination. The contractor shall delivery no later than eight

(8) weeks following receipt of order. The contractor shall deliver to NIST, 325 Broadway, Boulder CO, 80305.

3. Edwards XDS10 Dry Scroll Inert Roughing Vacuum Pump

a. If refurbished Edwards XDS10 pumps are not available, factory new Edwards XDS10 pumps are an acceptable alternative to make up the difference.

b. If there are not enough factory new Edwards XDS10 pumps available, refurbished Edwards nXDS10i pumps are an acceptable alternative to make up the difference.

c. If there are not enough refurbished Edwards nXDS10i units available, factory new Edwards nXDS10i pumps are an acceptable alternative to make up the difference

4. Edwards XDS35iC Dry Scroll Inert Roughing Vacuum Pump

If refurbished Edwards XDS35iC pumps are not available, factory new Edwards XDS35iC pumps are an acceptable alternative to make up the difference.

5. Edwards iH80 Dry Rotary Toxic Roughing Vacuum Pump (208 V models)

a. If refurbished Edwards iH80 pumps are not available, factory new Edwards iH80 pumps are an acceptable alternative to make up the difference.

b. If there are not enough factory new Edwards iH80 pumps available, refurbished Edwards iXH100 pumps are an acceptable alternative to make up the difference.

c. If there are not enough refurbished Edwards iXH100 units available, factory new Edwards iXH100 pumps are an acceptable alternative to make up the difference.

Testing / Inspection: The government will physically inspect each pump as they are received to ensure that they operate according to OEM specifications. Final acceptance will be determined within 30 calendar days of delivery.

Warranty: The contractor shall provide a one (1) year warranty for new pumps. The contractor shall provide a 90-day warranty for refurbished pumps.