2_Additional_Questions_and_Answers.docx

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Thin Film Dielectric/Metal Deposition System
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NB686040-15-03301
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2 Additional Questions and Answers

1. 600W RF source for the specified 3” diameter cathodes, can this be 300W? To achieve 600W will be much more expensive and requires the cooling water to be a direct contact with cathode versus if we can go with 300W we can use an indirect contact or clamped connection between cathode and cooling water tube which makes cathode changes much easier.

300 W RF source with auto-matching network is acceptable.

1. CF Ports in deposition chamber. Can they be in the same quantity, but different sizes than specified?

We would like to have at least one 6” size CF view port with integrated shutter.

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