NB643030-25-02217 Statement of Work.pdf

STATEMENT OF WORK

Title: Sputter & Carbon Thread Coater System

NB643030-25-02217

I. BACKGROUND INFORMATION

The Material Measurement Laboratory’s Materials Measurement Science Division (MMSD) conducts research on the development of innovative metrologies and measurement protocols for micro/nano-scale heterosystems analysis. MMSD acquires measurements and data using electron microscopy in support of NIST and division priorities on a multitude of materials, including those that are non-conductive in focus areas including Safety and Security, MNP Metrology, Semiconductors, and more. When evaluating a nonconductive material, it is necessary to coat the surface with a conductive, thin film consisting of a metal or carbon. MMSD’s capabilities to that extent include 2 instruments that are both at end of life and have become safety hazard due to missing switches and buttons necessary to operate the equipment to manufacturers. To that end, MMSD plans to replace the existing sputter and carbon coating systems to maintain our capability to coat samples prior to SEM analysis, as required for non-conductive materials such as particles, dielectrics, and ceramics (all of which are done routinely). To eliminate the training requirement for staff, we will be requesting a brand name or equivalent sputter and carbon coating system as the Leica EM ACE600 to which the staff already have access.

Objective:

The objective is to obtain a new Sputter and Carbon Thread Coater System, brand name or equivalent to the Leica EM ACE600, for NIST Gaithersburg in Building 217, Laboratory D115. The new system will be employed for sample preparation of non-conductive surfaces prior to electron microscopy.

II. PURPOSE

The contractor shall supply and install the new Sputter and Carbon Thread coater system, brand name or equivalent to the Leica EM ACE600, at NIST Gaithersburg in Building 217, Laboratory D115. The contractor shall ensure that training is provided after demonstrating the coater system is successfully installed. The contractor shall ensure there is at least a 1-year warranty starting from acceptance of the installation.

PERIOD OF PERFORMANCE

Period of Performance will be 2 months after receipt of order (ARO) and 7 business days for acceptance of deliverables.

III. SPECIFIC REQUIREMENTS

TASKS

The Contractor shall provide a brand name or equivalent Sputter and Carbon Thread coater to the Leica EM ACE600. The system shall meet the following minimum specifications:

1) The Contractor shall supply and install a new Sputter and Carbon Thread coater system brand name or equivalent to the Leica EM ACE600. The coater system shall meet the following minimum specifications:

a) Planar magnetron sputter head and carbon thread head

b) Metal vacuum chamber for high vacuum operation (capable of 0.2 mPa (2 x 10-6 mbar) or lower)

c) Large vacuum chamber (200 mm wide x 150 mm deep x 195 mm high or larger)

d) Removable door

e) Ability to perform metal sputter coating and carbon thread evaporation without having to reconfigure the system.

i) Must be able to sputter all metals described in Requirements 2 and 3 as well as the options, below.

f) Integrated oil free pumping system

g) Integrated Quartz crystal thickness monitor

h) Integrated power supply

i) Allow tool-less metal target exchange.

j) Have two removable automated target shutters to prevent cross contamination.

k) Have the ability to program automated processes and save operational log files.

l) Have the ability to export/download the logs vis a USB port.

m) Have a touch screen interface for coater control.

n) Use 115V/60Hz electrical connection.

o) Include a connection for venting gas (nitrogen or air).

p) Motorized stage capable of holding 20 or more standard 10 mm pin stubs

q) Exchangeable planetary drive stage for coating highly uneven specimen surfaces.

r) Exchangeable glass slide stage for two standard slides (approximately 76 mm x 25 mm)

s) Exchangeable grid stage for holding 12 or more 3 mm TEM grids securely during coating and the side QSG holder for the grid stage.

2) Gold/Palladium metal target compatible with the coater system identified in Task 1.

3) Tungsten metal target compatible with the coater system identified in Task 1.

4) A spare sputter source for the coater system identified in Task 1.

5) Installation of Deliverables

6) 1-year Warranty on Deliverables

Options include:

A. Iridium metal target compatible with the coater system identified in Task 1 B. Au metal target compatible with the coater system identified in Task 1.

IV. GENERAL REQUIREMENTS

Include all requirements that are not specific tasks but are applicable to the overall contract and the work that will be performed. For example, IT Security, Government Property, Public Affairs Clearance, OMB clearance, printing, data rights, etc.

Inspection & Acceptance In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within seven (7) business days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

V. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear. Keep in mind that every task does not require a deliverable.

Deliverables are always tangible items (i.e., report, minutes, etc.)

Complete the table providing the information for all the tasks identified above.

Deliverable Number Description Quantity Date Completed

1 Sputter and Carbon Thread Coater System 1 2 Months ARO

2 - 6 Targets and Spare Source for Deliverable 1 1 2 Months ARO

7 Installation 1 2 Months ARO

Options A and B Acquisition and Installation of Options 1 2 Months ARO

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within seven

(7) days. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)