N0042119R0043_XPS_Attachment_1.docx

Minimum Equipment Requirements NAVAIR Patuxent River 4.3.4.6. Corrosion and Wear Lab X-Ray Photoelectric Spectrometer (XPS) System General Requirements:

· The XPS system shall be modular.

· The XPS system shall be equipped with a focusable, scanning, monochromatic X-ray beam.

· The XPS X-ray source shall have a user configurable beam size between 10um and 300um or better.

· The XPS X-ray source shall utilize a repositionable aluminum anode with an integrated cooling system.

· The XPS system shall utilize a 180o hemispherical electron energy analyzer.

· The system shall be equipped with both a sample analysis chamber and a sample introductory chamber that can be quickly pumped down to UHV conditions.

· The XPS system shall include a user configurable and software controlled beam aperture capable of +/-5o or greater.

· The XPS system shall utilize a 5-axis (x, y, z, rotation, and tilt) automated sample stage for gross sample positioning.

· All motors and/or actuators used in the sample stage shall be rated for operation in a UHV environment.

· The XPS shall not utilize mechanical or piezoelectric means for raster scanning in order to reduce backlash and maintain maximum resolution and precision.

· All sample stage control shall be integrated into the system software package.

· The sample stage shall be capable of compucentric rotation and automated compucentric tilt.

· The sample stage shall be compatible with both a 25mm and 60mm sample stage at a minimum.

· The manufacturer of the XPS system shall have an Auger Electron Spectroscopy option available for future equipment upgrade. This unit shall be fully compatible and interoperable with the delivered base XPS unit.

Sample Monitoring:

· The XPS system shall be equipped with a sample monitoring camera within the sample introduction chamber.

· The XPS system shall be equipped with a sample monitoring camera and light source within the analysis chamber.

· All sample monitoring cameras shall be high resolution color digital cameras.

· The XPS system and control software shall be capable of displaying real-time x-ray induced secondary x-ray images (SXI) to determine sample position, orientation, and alignment.

Equipment Construction

· All XPS sample chambers and sealed vessels shall be rated for ultra-high vacuum (UHV) environments.

· By default, all vacuum chambers shall be equipped with ion pumps and/or titanium sublimation pumps.

· A turbo-molecular pump option shall be available and included in this equipment configuration.

· All system bake-out functions shall be fully automated and equipped with safety interlocks.

· The analysis and sample introductory chambers shall be separated by a gate valve.

· The process to transfer the sample stage from the introductory chamber to the analysis chamber shall be fully automated and controlled by the system control software.

Primary Argon Ion Gun:

· The XPS system shall include a primary argon ion gun.

· The primary argon ion gun shall be capable of operation between 0kV and 5kV.

· The ion gun operating voltage shall be displayed in real time in the system control software while the ion gun is active.

· The primary argon ion gun shall be capable of sample cleaning, depth profiling, and sample charge neutralization at a minimum.

· The primary argon ion gun shall utilize a curved column in order to maximize ion beam efficiency.

Dual Beam Charge Compensation System:

· The XPS system shall come equipped with a secondary cold cathode electron source.

· This secondary electron source shall be used to flood the sample surface with low energy electrons for the purposes of charge neutralization and compensation.

· This electron source shall act in complement with the primary argon ion source.

· This charge compensation system function shall be user configurable and fully integrated into the system software package.

Vacuum Transfer Vessel:

· The XPS system shall include a vacuum transfer vessel to allow inert gas transfer between laboratory sample storage and the XPS introductory sample chamber.

· The vacuum transfer vessel shall be compatible with standard 25mm sample mounts as well as any other same mount size and/or geometries used by the XPS system.

· The vacuum transfer vessel shall be compatible with the full spectrum of commonly used laboratory inert gasses as well as a UHV environment.

Turbo-Pump:

· All turbo-molecular pumps in the XPS system shall be rated at 500 L/s or higher.

Gas Cluster Ion Source (Gun):

· The XPS shall come equipped with a Gas Cluster Ion Source (GCIB).

· The GCIB shall be capable of operation voltages between 3kV and 18kV or better.

· The GCIB operating voltage shall be displayed in real time in the system control software package while the GCIB is active.

· The GCIB shall utilize a 2-stage differential turbo-molecular pumping system that incorporates two turbo-molecular pumps as well as two rotary backing pumps.

· The GCIB shall selectively utilize argon clusters up to Ar5000 or higher.

· All functions of the GCIB shall be fully integrated into the system computer and software packages.

· All functions of the GCIB shall be controlled digitally via the system computer.

Introduction Chamber Ion Gauge:

· The XPS system shall come equipped with either a Pirani or Bayard-Alpert Hot Cathode Ion Gauge in the sample introduction chamber

· The ion gauge shall be capable of pressure measurements down to 4x10-8 Pa or lower.

· The ion gauge shall display the current gas pressure on the body of the gauge itself.

· The ion gauge shall be integrated into the XPS system computer and be capable of outputting the current gas pressure during system operation.

· The ion gauge shall have user-configurable pressure settings.

Argon Gas Regulation Kit:

· The XPS system shall come with an argon tank and all required regulation and mounting hardware to ensure safe laboratory operation and compatibility with the primary argon ion gun.

· The argon tank shall come pre-charged with argon gas of 99.9995% purity or higher.

Computer Hardware and XPS Control Software:

· The included system computer shall be equipped with a Windows 10 operating system.

· All included software shall be compatible with the included system computer.

· The included system computer shall include a DVD burner.

· The XPS system shall communicate with the system computer via a standard USB interface and communication protocol.

· The XPS system shall directly stream data to the system computer.

· The XPS system control software shall provide a real-time display of user-defined system parameters, system status, and measured data.

· The included system software shall include the following analysis capabilities:

· Chemical composition surveys

· High resolution multiplexes

· Sputter depth profiles

· Linear scans

· Chemical data mapped images

· Angle dependent XPS analysis

· Fully automated analysis

· User-configurable settings for all of the above

· The system shall come with a library of post-analysis data processing tools either integrated into the system control software package or in a separate tool. These tools shall include data processing algorithms for the following functions:

· Atomic state concentration quantification

· Background subtraction

· Data smoothing

· Spectrum peak identification

· Linear least-squares fitting

· Target factor analysis

· Spectrum curve/peak analysis

· Separation and isolation of chemical states. This data shall be available as either:

· Maps

· Linear Scans

· Depth Profiles Additional Documentation and Equipment:

· An instruction manual for the equipment and all associated devices shall be included.

· A system maintenance tool kit shall be included that includes equipment necessary to completed user-serviceable maintenance tasks.

· Hands-on, on-site training by an OEM certified technician or engineer on equipment functions, operation, and maintenance shall be included for a period of three years.

· Professional system assembly, start-up, and verification by an OEM certified technician shall be included.

Warranty:

· The XPS system shall be warrantied for a period of three years from installation.