SOW_18-8G9_AFM_26June2018_Redacted.pdf

STATEMENT OF WORK (SOW)

DMEA 18-TBD

26 June 2018

Project Engineer:

1.0 SCOPE:

1.1 TITLE: Atomic Force Microscope

1.2 APPLICABILITY: Defense Microelectronics Activity (DMEA), Semiconductor Assurance Forensics

Engineering (SAFE)

1.3 BACKGROUND: An Atomic Force Microscope (AFM) will provide a characterization and failure analysis capability to map diffusions, determine dopant concentrations, evaluate fabrication processes topography and obtain transistor IV plots at the contact level.

1.4 PURPOSE: The purpose of this task is to purchase an AFM.

2.0 REFERENCED GOVERNMENT PROVIDED RESOURCES:

2.5 GOVERNMENT FURNISHED FACILITIES/ACCESS:

Facility/Access Date

Building ARO

3.0 REQUIREMENTS:

3.1 GENERAL REQUIREMENTS:

3.1.1 RESERVED

3.2 PROGRAM MANAGEMENT: None

3.3 TASK REQUIREMENTS:

3.3.1 ATOMIC FORCE MICROSCOPE: The contractor shall provide an Atomic Force Microscope that includes the following:

3.3.1.1 X-Y Scanner: The AFM shall include an X-Y Scanner with closed loop controls. The X-Y Scanner shall have a resolution of .1nm or less. The X-Y Scanner shall have a detector noise level of 1nm or less.

3.3.1.2 Z Scanner: The AFM shall include a Z Scanner. The Z Scanner shall have a resolution of .05pm or less. The

Z Scanner shall have a detector noise level of .25nm or less.

3.3.1.3 X-Y Stage: The AFM shall include an X-Y Stage that is motorized. The X-Y Stage shall have a resolution of .6µm or less. The X-Y Stage shall have a travel range of at least 20mm.

3.3.1.4 Z Stage: The AFM shall include a Z Stage that is motorized. The Z Stage shall have a resolution of at least

80nm. The Z Stage shall have a travel of at least 10mm.

3.3.1.5 Positioning Camera: The AFM shall include an Optical Camera. The Optical Camera shall allow the user to accurately position the probe tip with submicron resolution.

3.3.1.6 Acoustic Enclosure: The AFM shall include an Acoustic Enclosure that mitigates acoustic noise in the laboratory environment, minimizing the negative impact on the performance of the AFM.

3.3.1.7 Vibration Isolation: The AFM shall include Vibration Isolation that mitigates vibration in the laboratory environment, minimizing the negative impact on the performance of the AFM.

3.3.1.8 Sample Size: The AFM shall be capable of handling samples up to at least 25mm x 25mm.

3.3.1.9 Support Computer: The AFM shall include a Support Computer that controls the AFM. The Support

Computer shall include at least one (1) viewing monitor, a mouse and keyboard. The Support Computer shall be capable of running the software described in paragraph 3.3.3.

3.3.1.10 Installation Requirements: The AFM (and all associated and required components) shall require no more than a 4’x8’ area in a laboratory. The AFM shall come with all necessary hardware to be installed on a raised floor.

3.3.2 OPERATING MODES: The contractor shall provide all necessary hardware and software to allow for the following AFM Modes, or an alternative equivalent:

3.3.2.1 Scanning Capacitance Microscopy (SCM): The AFM shall be capable of performing SCM for dopant profiling and carrier density analysis.

3.3.2.2 Conductive Atomic Force Microscopy (C-AFM): The AFM shall be capable of performing C-AFM for measuring current to obtain conductivity, resistance and IV curves. The minimum measurable current shall be 1pA or less. The maximum measurable current shall be 1µA or more.

3.3.2.3 Kelvin Probe Force Microscopy (KPFM): The AFM shall be capable of performing KPFM for non-contact measurements of surface potentials, detecting charge trapping in dielectrics, and determining doping concentration.

3.3.3 SOFTWARE: The contractor shall provide software that enables the AFM described in paragraph 3.3.1 to perform the modes described in 3.3.2. The Software shall be installed on the Support Computer described in paragraph 3.3.1.9. The Software shall have the ability to control the AFM and all the various modes described in paragraph 3.3.2. The Software shall guide the user through the step-by-step process of running the AFM. The

Software shall have the ability to self-set necessary parameters for operating the AFM at an optimal level without requiring user expertise. The Software shall have the ability for the user to perform various analysis on the data collected with the AFM.

3.3.4 DELIVERY: The contractor shall Deliver the complete system described in paragraphs 3.3.1-3.3.3 to DMEA.

3.3.5 INSTALLATION: The contractor shall Install the complete system described in paragraphs 3.3.1-3.3.3 such that it is operating at the optimal level per Original Equipment Manufacturer (OEM) specifications. The Installation shall occur at a time agreed upon by DMEA and the contractor within 30 days of delivery. Installation must be completed by a US citizen.

3.3.6 TRAINING: The contractor shall provide Training for the complete system described in paragraphs 3.3.1-

3.3.3. The Training shall occur at a time agreed upon by DMEA and the contractor after the Installation is complete.

The Training shall be on-site at DMEA for at least four (4) DMEA engineers. The Training shall be at least two (2) days and shall be performed by a US Citizen.

3.3.7 WARRANTY: The contractor shall provide on-site hardware and software warranties covering manufacturing defects for a minimum one (1) year. The contractor shall maintain the equipment provided in paragraph 3.3.1, including the repair or replacement of any failed components, under normal operation, that negatively impact the intended operation of the equipment at no additional cost within the one (1) year period.

3.3.8 DOCUMENTATION: The contractor shall provide Documentation. The Documentation shall include user manuals and applications notes. The contractor shall provide service reports for service covered under the warranty described in paragraph 3.3.7. (A001, A002)

3.4 PROGRAM SUMMARY: None

4.0 POINTS OF CONTACT: