Attachment C - RFQ401791 - Bill of Materials.pdf

Vendor Name Quote Number Date

Line Item Item Description Manufacturer Quantity Country of Origin Lead Time Unit Price Total Price

1 R&D Paket - Turbo HiPace 80 Neo DN63 C (See system specs below) or domestic equivalent

Pfeiiffer Vacuum Inc or domestic equivalent

2 Power failure venting valve (See system specs below) or domestic equivalent Pfeiiffer Vacuum Inc or domestic equivalent

3 MPT 200 PB. DN25 ISO-KF RS-485. Profib (See system specs below) or domestic equivalent

Pfeiiffer Vacuum Inc or domestic equivalent

4 Connection cable, RS 485 (See system specs below) or domestic equivalent Pfeiiffer Vacuum Inc or domestic equivalent

5 Mains cable, 115V AC, (USA/J) (See system specs below) or domestic equivalent Pfeiiffer Vacuum Inc or domestic equivalent

6 HiScroll 12 Comfort Bundle DN25 ISO-KF. (See system specs below) or domestic equivalent

Pfeiiffer Vacuum Inc or domestic equivalent

7 Mains cable, 115V AC, (USA/J) (See system specs below) or domestic equivalent Pfeiiffer Vacuum Inc or domestic equivalent

TOTAL

Line Item System Specifications

2000017384 / R&D Paket - Turbo HiPace 80 Neo DN63 C. Sales Promotion Turbo HiPace 80 Neo Package DN 63 CF-F DN 63 CF-F HiPace 80 Neo; DN 63 CF-F; mit TC 80; OmniControl 200; Netzkabel; Schnittstellenkabel, Verbindungskabel; und LuftkHigh-performance turbomolecular pump - Compact design for minimum footprint - Pumping speed for N2: 67 l/s - Patented Laser BalancingTM Technoloy

- Ideal for all standard processes, bakeable (optional) - Mounting orientation: in any orientation - Protection category: IP54 - Flange (in): DN- Flange (out): DN- Venting connection: G 1/8" -Operating voltage: 24 (± 5 %) V DC - Interfaces: RS- 485, Remote - Electronic drive unit: with TC 80 - Cooling method, standard:

Convection - Cooling method, optional: Air/Water comprehensive accessories extend the range of application. Old Material Number: PM 193 301 CT

2 2000012926 / Power failure venting valve. Power failure venting valve 24 V DC, G 1/8 for connection with TC 110. Old Material Number: PM Z01 330 A

Attachment C - RFQ401791 Bill of Materials

2000006406 / MPT 200 PB. DN25 ISO-KF RS-485. Profib.MPT 200 PB, Digital Pirani Cold Cathode Gauge DN 25 ISO-KF RS-485, Profibus Rugged combination sensor - Measurement range: 5 · 10-9 - 1000 hPa - Accuracy: 1 · 10-8 – 2 · 10-3 hPa: ± 25 % - Accuracy: 2 · 10-3 – 10 hPa: ± 10 % - Accuracy: 10 – 100 hPa: ± 30 % - Accuracy: 100 – 1000 hPa: ± 50 % - Repeatability: 1 · 10-8 – 1 · 10-2 hPa: ± 7 % - Repeatability: 1 · 10-2 – 10 hPa: ± 2 % Customizable to vacuum application - Supply voltage: 24 V DC - Communication: RS-485 and Profibus - Electrical connection, RS-485: female connector M12, 5-pole, A-coded - Profibus connection: one female connector M12, 5-pole, B-coded Insensitive to gas inrush.

Old Material Number: PT R40 142

2000007590 / Connection cable, RS 485 Connection cable, RS 485 HiPace-TC/DigiLine Transmitter M12/SUB-D, 9-pole length: 3 m

2000028157 / Mains cable, 115V AC, (USA/J) Mains cable, 115V AC, (USA/J) length: 3m with UL-plug NEMA 5-15 Euro style EN 60320/C13. Old Material Number: P 4564 309 ZE

HiScroll Comfort Bundle HiScroll 12 DN 25 ISO-KF, S = 12m³/h BC800, 100-240V, 50/60Hz, 1-ph. HiScroll Comfort Bundle including: Hi Scroll, exhaustsilencer ES 25 M, centering ring and clamps. Dry and oil-free scroll vacuum pump Inkl. ATEX II 3/- G Ex h IIC T4 Gc X +5 °C  Ta  +40 °C Certifications: cTUVus tested according to UL / CSA 61010-1 Semi S2 compatible Semi S8 compatible KC.

6 (Continued)

Pumping speed: 12.1 m³ / h Ultimate pressure without gas ballast: 6 x 10e-3 hPa Ultimate pressure with gas ballast stage 1: 5 x 10e-2 hPa Ultimate pressure with gas ballast stage 2: 4 x 10e-1 hPa Super silent: Best for use in quiet environments such as in the laboratory Noise level: <47dB (A) Low vibrations and compact design Low operating costs thanks to the highest quality, short maintenance times and long maintenance intervals Connection flange (inlet): DN 25 ISO-KF Connection flange (outlet): DN 25 ISO-KF Mains connection: 50 / 60Hz: 100 — 127 / 200 — 240 V AC (±10 %) Industry 4.0 capable: Operation with other intelligent products such as turbopumps via RS-485 Safe operation with built-in check valve Performance as required: stable pumping speed and short cycle times Sustainable: 15% higher efficiency of the drive system, less heat generation and less cooling demand BC800 drive electronics Active intelligent air cooling Level 1 gas ballast: 18,000 sccm Level 2 gas ballast: 30,000 sccm Leakage rate: <5 x 10e-7 Pa m³ / s. Old Material Number: PD 100 171 BT.

115V Main Power Cable for HiScroll 12 Vacuum Pump - Plug, NEMA 5-15 (straight) - Connector, C13 (straight) - Length, 3m. Old Material Number: P 4564

309 ZL

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