Attachment 1 SOW.pdf

STATEMENT OF WORK

Title: Precision Achromatic Doublet Lenses Lab: Physical Measurement lab, Sensor Science Division

I. BACKGROUND INFORMATION

The National Institute of Standards and Technology (NIST) is embarking on a project to support the EUV lithography (EUVL) community by developing characterization of EUV scintillator materials. Many techniques for measuring spatial distribution (or image) of EUV rely on scintillators or devices that convert EUV radiation into visible light.

Scintillators tend to be robust and afford the user the ability to use less costly and easier to characterize, visible light detection or imaging systems. However, their characterization requires specialized techniques and hardware which NIST must develop in order to provide accurate characterization of the performance of EUV scintillators. This procurement is for three custom optical lens doublets designed specifically for an optical microscope assembly for measuring the visible light output of scintillator samples.

This purchase supports the “Optical Metrology for Extreme Ultraviolet (EUV) Generation” Project under Grand Challenge 2, “Advanced Metrology for Future Microelectronics Manufacturing,” for CHIPS R&D Metrology.

II. PURPOSE

This procurement is for three custom optical lens doublets designed specifically for an optical microscope assembly for measuring the visible light output of scintillator samples. The purchase of these lenses enables NIST to construct an ultra-high vacuum microscope to operate in NIST SURF III EUV reflectometer beamline. The microscope will allow for the measurement of EUV scintillator efficiency, output spectrum and point spread function.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Doublet 1 Quantity: 4

A. Technical Specifications

a. Technical specifications are included in attachment Doublet1.png

b. Required optical adhesive: Norland Optical Adhesive 88

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c. Option for low outgassing edge blackening: Aeroglase Z306 or other equivalent low-outgassing material

Line Item 0002:

Description: Doublet 2 Quantity: 4

A. Technical Specifications

a. Technical specifications are included in attachment doublet2.png

b. Required optical adhesive: Norland Optical Adhesive 88

c. Option for low outgassing edge blackening: Aeroglase Z306 or other equivalent low-outgassing material

Line Item 0003:

Description: Doublet 3 Quantity: 4

A. Technical Specifications

a. Technical specifications are included in attachment doublet3.png

b. Required optical adhesive: Norland Optical Adhesive 88

c. Option for low outgassing edge blackening: Aeroglase Z306 or other equivalent low-outgassing material

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Doublet 1 4 8-16 weeks

ARO

NIST Gaithersburg

2 Doublet 2 4 8-16 weeks

ARO

NIST Gaithersburg

3 Doublet 3 4 8-16 weeks

ARO

NIST Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

PLACE OF PERFORMANCE

Completed optics will be shipped to NIST Gaithersburg Campus

PERIOD OF PERFORMANCE

16 weeks ARO. This does not include warranty.

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V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ POC/COR (Steven Grantham and building 245/C100)

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Visual inspection of optics: Review of surface coatings and finish, edge blackening if optioned

2. Review of any testing documentation included

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

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The Government will test, inspect, and accept or reject the equipment within 10 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY (Remove if no warranty is required) The contractor shall warranty the entire system for a period of a minimum of 90 days after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

1. Materials are free of defects,

2. Surface coatings remain intact: no peeling or flaking

3. Glued joint remains intact with no discoloration.

VIII. PAYMENT SCHEDULE

Define how the contractor will be paid if more information besides what is included in the payment clause is needed. If firm-fixed-price construction, for example, it may warrant further definition.

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

IX. ATTACHMENTS

1. Doublet1.png

2. Doublet2.png

3. Doublet3.png