UPDATED SPECS FOR ION MILLING SYSTEM.docx

Technical Specifications for ION Milling System

Scope

A small bench top Ion Milling system, hereafter referred to as the “instrument”, is being sought for use on a wide range of research projects at the National Energy Technology Laboratory (NETL). This instrument shall be delivered and installed at the NETL’s Pittsburgh site. The requirements of the instrument are provided in paragraphs II and V.

a) These specifications are the minimum requirements for the instrument. If the Supplier’s instrument cannot fully meet a specification, the Supplier must state both the specification and exactly what part of the specification the Supplier’s instrument can and cannot meet. The Supplier must also state whether the proposed instrument has an equivalent capability that meets or exceeds the specification. The Supplier must supply sufficient detail for the Buyer to technically evaluate the adequacy of the proposed instrument to meet the Buyer’s needs.

b) Equipment and software that exceeds the specifications defined herein and is not necessary for a completely operational instrument should be considered as optional equipment. The Supplier shall identify what optional equipment is included.

c) The Supplier shall accept full responsibility for the entire instrument, regardless of the manufacturer of any given component.

General Description and Overview

Ion Milling is a physical etching technique whereby the ions of an inert gas (typically Argon) are accelerated from a wide beam ion source into the surface of a substrate in vacuum in order to remove material to some desired depth or underlayer.

The supplier shall provide a self-contained, bench top sized, fully automated argon ion polishing system suitable for preparation of SEM samples to prepare damage free surfaces, cross sections and deposit coatings to protect or eliminate charging.

The unit shall have the following specifications:

· Small Tabletop (benchtop) Design

· Intermittent Beam Irradiation Mode

· Mass Flow Argon Gas Controller

· TMP + RP Pumping System

· Cross-section milling AND flat-section Performance

· Polish, etch with a single pump down

· Etch at voltages as low as 100 V for rapid and damage free preparation of sample surfaces

· Permit samples as large as 32 mm in diameter

· Optional Sample Holders (specimen stuff for cross section, SEM attachment base plate for sample stub)

NRTL Certification The ion milling system shall be NRTL (Nationally Recognized Testing Laboratory) certified. If the unit is not NRTL certified, the manufacturer will provide the NRTL inspection and certification by a third-party inspector.

Shipping The vendor shall ship the load frame to NETL, 626 Cochrans Mill Road, Pittsburgh, PA 15236. Shipping costs shall be included in the response to the RFQ.

Warranty, Installation, Calibration and training Full installation and commissioning shall be provided by this contract after instrument is uncrated and set up. A one-year warranty on all manufacturing and materials defects shall be provided.