3. AL-1704-8932A_SR - VC01 & VC16 - ESD.pdf

Advanced Light Source Upgrade Project Lawrence Berkeley National Laboratory

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Printed hard copies of this document are for reference only.

SR - VC01 & VC16 - ESD

Thomas GAUCHER

Release Date: Mar 28 2024 8:49:27 AM PDT

Document Number: AL-1704-8932 Revision: A

Document Status: Released

Document Type: SPECIFICATION

Category Code: AL7531

ALS-U - STORAGE RING

VACUUM CHAMBERS

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Downloaded by: Olusola Omolayo at March 29, 2024 09:39:11

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TABLE OF CONTENTS

1 Revision History

2 Approvals

3 Abbreviations and Acronyms

4 Introduction

4.1 Introduction to ALS-U

4.2 Subject of this Engineering Specification

5 Document Definitions

6 Description of the chamber

6.1 VC01 – Variant A

6.2 VC01 – Variant B and C

6.3 VC16 – Variant A and B

7 NEG Coating

8 Final design if geometry changed

9 Fiducialization

10 Environmental requirements

10.1 Codes and Standards

10.2 Cleanliness environment

10.3 Cleaning fluids

10.4 Cutting fluids

10.5 Fasteners

10.6 Flange and Gaskets

11 Technical requirement

11.1 Vacuum pressure

11.2 NEG Coating

11.3 Manufacturing process

11.3.1 Material

11.3.2 Fabrication

11.3.2.1 Part fabrication

11.3.2.2 Cleaning after manufacturing

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11.3.2.3 Part joining

11.4 Final Cleaning

11.5 Final Assembly

11.6 Final test and NEG coating

11.6.1 CMM Measurement before bakeout

11.6.2 Water pressure test

11.6.3 Bakeout

11.6.4 Residual Gas Analysis

11.6.5 Final He Leak Test

11.6.6 NEG coating Inspection

11.6.7 Final Pressure measurement

11.6.8 HPN2 Backfill

11.6.9 CMM Measurement after Bakeout

11.7 Packing and shipping

12 Applicable Documents ci al ly R el ea se d to th e

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1 REVISION HISTORY

Rev. CM Number Description of Change A Baseline

2 APPROVALS

The following individual(s) must approve this document:

Approver Project Role Ken Chow Chief Engineer and System Engineer Jiani Niu Project QA manager Olusola Omolayo Vacuum CAM Windchill Approved / Concurred By oomolayo,jianiniu,KPChow

3 ABBREVIATIONS AND ACRONYMS

ALS Advanced Light Source ALS-U Advanced Light Source Upgrade ASTM American Society for Testing and Materials AR Accumulator Ring CC Cooling Chanel CF Conflat Flange CMM Coordinate Measuring Machine COTS Commercial Off The Shelve DCC Document Control Center He Helium HPN2 High Pressure Nitrogen EN-ISO European International Organization for Standardization LBNL Lawrence Berkeley National Laboratory

US

UHV

Ultra sound Ultra High Vacuum

VC Vacuum Chamber VCR Vacuum Coupling Radiation WPS Welding Procedure Specification ci al ly R el ea se d to th e

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4 INTRODUCTION

4.1 Introduction to ALS-U

ALS-U is an upgrade project to the LBNL Advanced Light Source (ALS). The ALS is a 1.9

GeV storage ring operating at 500 mA of beam current. It is optimized to produce intense beams of soft x-rays, which offer spectroscopic contrast, nanometer-scale resolution, and broad temporal sensitivity. The ALS facility includes an accelerator complex and photon delivery system that is capable of providing the foundations for an upgrade that will achieve world-leading soft x-ray coherent flux. The existing ALS provides a ready-made foundation, including conventional facilities and also includes extensive beamlines (up to

40 simultaneously operating beamlines) and instrumentation, an experimental hall, computing resources, ancillary laboratories, offices, and related infrastructure that will be heavily utilized in an upgrade scenario.

The ALS will be upgraded with a multibend achromat (MBA) lattice design that will provide a soft x-ray source that is orders of magnitudes brighter — an up to 100-1000 times increase in brightness and will provide a significantly higher fraction of coherent light in the soft x-ray region than is currently available at ALS.

4.2 Subject of this Engineering Specification

The VC01 and VC16 are located in the 12 sectors of the Storage Ring (SR). Further introductory details of these chambers can be found in the SR - VC01 & VC16 - SOW - AL-

1704-8931-Rev A, in the section 4.2.

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5 DOCUMENT DEFINITIONS

Must, will, may, and should are used to define every specification listed in this document.

The definitions of these terms are as follows

May – is used to indicate a desire or goal of a specification. This can also be interpreted

‘as nice to have’ and are not contractually binding.

Must –is a specification that is contractually binding and must be implemented.

Should – is used to indicate a desire or goal of a specification. This can also be interpreted ‘as nice to have’ and are not contractually binding.

Will – is used to inform intent or declaration of purpose. This is not a specification.

Example, the author will use the word ‘must’ to indicate that a specification is contractually binding and must be implemented.

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6 DESCRIPTION OF THE CHAMBER

6.1 VC01 – Variant A

The main functions and requirements of the SR VC01 –Variant are:

Provide a round shaped electron beam channel.

Provide ports for BPM block or housing to host BPM buttons

Provide a cooling channel

The VC01 – Variant A has been designed by LBNL to meet these requirements and perform these functions. Vc01 – Variant A is shown in Figure 6-1.

Figure 6-1: VC01 – Variant A

Upstream

Downstream

Round aperture

BPM

housing Fiducial Post

Cooling Channel ci al ly R el ea se d to th e

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The chamber is primarily constructed from 316L and 316LN stainless steel. The fabrication process for the parts (flanges and BPM block) involves CNC machining. The parts are joined by TIG welding. The BPM housing body is machined from a monolithic block of stainless. The beam entry port, exit port and BPM port flanges utilizes Helicoflex vacuum seals.

Figure 6-2: VC01 – Variant A (Explode View)

The copper cooling channels are brazed on the beam channel stainless tube. The stainless steel cooling channel and the fiducial post are TIG welded on the BPM housing.

Figure 6-3: VC01 – Variant A

Brazing process

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6.2 VC01 – Variant B and C

The main functions and requirements of the SR VC01 –Variant are:

Provide an elliptical shaped electron beam channel.

Provide a cooling system

The VC01 – Variant B and C have been designed by LBNL to meet these requirements and perform these functions. Vc01 – Variant B and C is shown in Figure 6-4 and Figure 6-5.

Figure 6-4: VC01- Variant - C Chamber

Figure 6-5: VC01- Variant - B Chamber

Downstream BPM housing

Cooling Channel

Elliptical aperture

Fiducial Post

Female flange

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The chamber is primarily constructed from 316L and 316LN stainless steel. The fabrication process for the parts involves CNC and EDM machining. The parts are joined by TIG welding. The BPM housing body is machined from a monolithic block of stainless.

The beam entry port, exit port and BPM port flanges utilizes Helicoflex vacuum seals.

Figure 6-6: VC01 – Variant C (Explode View)

The stainless steel cooling channel and the fiducial pole are TIG welded on the BPM housing.

Figure 6-7: VC01 – Variant C

TIG welding

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6.3 VC16 – Variant A and B

The main functions and requirements of the SR VC16 –Variant are:

Provide a round shaped electron beam channel.

Provide a cooling system

The VC16 – Variant A and B have been designed by LBNL to meet these requirements and perform these functions. Vc16 – Variant A and B is shown in Figure 6-8 and Figure 6-9.

Figure 6-8: VC16 - Variant A Chamber

Figure 6-9: VC16- Variant B Chamber

Downstream

Keyhole aperture Cooling Channel

Female flange

Male flange

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The chamber is primarily constructed from 316L and 316LN stainless steel. The fabrication process for the parts involves CNC machining or / and sinker EDM. The parts are joined by TIG welding. The main body is machined from a monolithic block of stainless. The beam entry port and exit port flanges utilizes Helicoflex vacuum seals.

Figure 6-10: Explode view of VC16 – Variant B

Main body

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7 NEG COATING

ID NUM

(SYY-XX-)

Specification

S09-05- 000295 The chamber shall be NEG Coated. See section 11.2 for technical requirement on the NEG coating.

8 FINAL DESIGN IF GEOMETRY CHANGED

ID NUM

(SYY-XX-) Specification

S09-05- 000296 The final design shall incorporate features to alleviate the risk of trapped volume along the weld preparation.

S09-05- 000297 The mechanical deformation of any part of the chamber under atmospheric loads shall not exceed 0.2mm at any location on the chamber.

S09-05- 000298 There shall be no features that cross within +/- 2mm of the beam plane of the chamber except the external walls.

S09-05- 000301 The electron beam channel shall be void on any abrupt geometry change through the chamber.

9 FIDUCIALIZATION

(SYY-XX-) Specification

S09-05- 000299 The center axis through the BPM section shall be fiducialised.

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10 ENVIRONMENTAL REQUIREMENTS

10.1 Codes and Standards

ID NUM

(SYY-XX-) Specification

S09-94-000151

The following standards must apply for the fabrication and test of the SR

VC01 and VC16 Chambers:

EN ISO 13919 or EN ISO 5817

EN ISO 17637

ASTM E498.

EN ISO 17640

ASTM E2734/E2734 M − 10.

10.2 Cleanliness environment

ID NUM

(SYY-XX-) Specification

S09-94-000152 The cleaning environment must comply with UHV Chamber and Component Production Requirements AL-1220-7841-Rev F, §7.2

10.3 Cleaning fluids

ID NUM

(SYY-XX-) Specification

S09-94-000153 The cleaning fluids must comply with UHV Chamber and Component Production Requirements AL-1220-7841-Rev F, §7.3

10.4 Cutting fluids

ID NUM

(SYY-XX-) Specification

S09-94-000154 The cutting fluids must comply with UHV Chamber and Component Production Requirements AL-1220-7841-Rev F, §7.4

10.5 Fasteners

ID NUM

(SYY-XX-) Specification

S09-94-000155 The fasteners of the of vacuum chambers must comply with AL- 1220-7841-Rev F, §7.6 ci al ly R el ea se d to th e

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10.6 Flange and Gaskets

(SYY-XX-) Specification

S09-94-000156 The flanges and gaskets of the vacuum chambers must comply with AL-1220-7841-Rev F, §7.7

11 TECHNICAL REQUIREMENT

11.1 Vacuum pressure

ID NUM

(SYY-XX-)

Specification

S09-94-000157 The maximum thermal outgassing rate must be better than 1.00e-11 Torr.l.s-1.cm-2

S09-94-000158 Achievable final pressure must be 5.00e-10 Torr

11.2 NEG Coating

ID NUM

(SYY-XX-)

Specification

S09-05-000310 The thickness of the NEG coating shall be between 0.5 to 1.5 micron

S09-05-000311 The NEG material shall be 30%,30%,40% atomic weight. TiZrV +/- 10%

S09-05- 000312

The NEG film shall be deposited using PVD process using Krypton gas

S09-05- 000313

The vacuum pressure achieved on the NEG coating station prior to NEG coating shall be better than 1e-8 Torr and a clean RGA scan

S09-05- 000314

The NEG coated chamber shall be free of surface oxides and sufficiently cleaned prior to NEG coating to ensure adhesion

S09-05- 000315 The NEG coating coverage on the internal surface of the chamber along the electron beam path channel shall be greater than 99%

S09-05- 000316

The NEG coating shall be carried out at a chamber temperature of 100oC +40 oC /- 0oC

S09-05- 000317 The coating recipe shall be maintained from the first article to the production chamber coatings ci al ly R el ea se d to th e

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11.3 Manufacturing process

11.3.1 Material

The procurement of the raw material by the Sub-contractor must comply with the following requirements

ID NUM

(SYY-XX-) Specification

S09-94-000163 All materials must be new.

S09-94-000164 All material must be free from surface cracks and fissures, forge and other tool marks, burns, delamination and other defects that would make it incompatible with a high vacuum environment.

S09-94-000165 Certification must be in accordance with EN ISO 10204 3.1.

S09-94-000211 Magnetic permeability for vacuum chamber base material must be

1.01 and for welds or braze joints 1.04

S09-94-000168 The tube of the chamber must be seamless

S09-94-000169 The material must be compatible with synchrotron radiation ci al ly R el ea se d to th e

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11.3.2 Fabrication

11.3.2.1 PART FABRICATION

The fabrication of the SR VC01 and VC16 Chamber must comply with the following requirements

Cutting fluids

ID NUM

(SYY-XX-) Specification

S09-94-000170 A water-soluble and non-halogenated cutting fluids must be used for fabrication

S09-94-000171 All others requirements relative to the vacuum components fabrication must comply with AL-1220-7841-Rev F, §8.1, §8.2, §8.3

11.3.2.2 CLEANING AFTER MANUFACTURING

An intermediate cleaning must be done after manufacturing and must comply with the following requirements

ID NUM

(SYY-XX-) Specification

S09-94-000172 UHV surfaces must be protected as per best practices during handling operations.

S09-94-000173 Parts must be stored in a clean area from the workshop (See §10.2).

S09-94-000174 Parts must be suspended in tanks by wire, hooks or in baskets

S09-94-000175 All others requirements relative to the vacuum components cleaning must comply with AL-1220-7841-Rev F, §9

11.3.2.3 PART JOINING

The joining process of the components must comply with the following requirements

General requirement

ID NUM

(SYY-XX-) Specification

S09-94-000176 Step change in geometrical profile across weld must be less than 0.2mm

S09-94-000177 All parts must be cleaned prior to welding (See §11.4)

S09-94-000178 A WPS is not required

S09-94-000179 The weld quality must be level D according to EN ISO 13919 or EN

ISO 5817

S09-94-000182 All welds must be free from cracks and fissures or other defects that would make it incompatible with a high vacuum environment.

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Inspection of welded joints

(SYY-XX-) Specification

S09-94-000183 100% of the vacuum boundary welded joints must be visually inspected

S09-94-000184 The visual inspection must comply with EN ISO 17637

Component leak check

ID NUM

(SYY-XX-) Specification

S09-94-000185 100% of the vacuum boundary welded joints must be leak tested.

S09-94-000186 The leak test of the welded joint must comply with ASTM E498.

S09-94-000187 The criteria and parameter expected for the He leak check must comply with AL-1220-7841-Rev F, §14

11.4 Final Cleaning

The final cleaning of the SR VC01 and VC16 Chamber must comply with the following requirements

General requirement

ID NUM

(SYY-XX-) Specification

S09-94-000188 Once the final cleaning process has started, it must not be stopped before the end.

S09-94-000189 After the final cleaning, all subsequent operations must be performed in a cleanroom.

Cleaning

ID NUM

(SYY-XX-) Specification

S09-94-000190 The cleaning agent used must be identified and approved by LBNL prior to the Factory acceptance test.

S09-94-000191 All other requirements regarding the final cleaning and intermediate inspection must comply with AL-1220-7841-Rev F, §11 and §12.

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11.5 Final Assembly

(SYY-XX-) Specification

S09-94-000192 All requirement with final assembly must comply AL-1220-7841- Rev F, §13

11.6 Final test and NEG coating

The final tests to ensure the performance of the SR VC01 and VC16 Chamber must be performed in the sequence shown in Figure 11-1.

Figure 11-1: Final test sequence ci al ly R el ea se d to th e

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General requirement

(SYY-XX-) Specification

S09-94-000193 All test must take place in a clean room

S09-94-000194 During pumping down of the part, all connection above the turbo pump must be all-metal

S09-94-000195 The HPN2 port must be all-metal

S09-94-000196 The HPN2 port must be a VCR to CF16 adapter that is replaced with a CF16 blank as the last connection to the chamber prior to shipping.

S09-94-000197 LBNL must have right to visit the contractor during these tests

11.6.1 CMM Measurement before bakeout

ID NUM

(SYY-XX-) Specification

S09-94-000198 A CMM measurement must be performed, on all SR VC01 and VC16 Chamber

S09-94-000200 The dimensions to be controlled must be specified by the University technical representative.

11.6.2 Water pressure test

The water pressure for the cooling channel must comply with the following requirements

ID NUM

(SYY-XX-) Specification

S09-94-000201 The cooling channel pressure test must be conducted at 120 psi

S09-94-000202 The cooling channel pressure test must last 10 mins

Criteria

ID NUM

(SYY-XX-) Specification

S09-94-000203 No leak must appear at the completion of the pressure test

11.6.3 Bakeout

ID NUM

(SYY-XX-) Specification

S09-94-000204 Bakeout must comply with AL-1220-7841-Rev F, §14.1 ci al ly R el ea se d to th e

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11.6.4 Residual Gas Analysis

(SYY-XX-) Specification

S09-94-000205 Residual Gas Analysis must comply with AL-1220-7841-Rev F, §14.2

11.6.5 Final He Leak Test

ID NUM

(SYY-XX-) Specification

S09-94-000208 Final pressure measurement must comply with AL-1220-7841-Rev F, §14.5

11.6.6 NEG coating Inspection

ID NUM

(SYY-XX-)

Specification

S09-05-000353 NEG coating coverage shall be inspected on the first article by insertion of a camera probe through the chamber

S09-05-000354

A short Stainless ribbon sample shall be placed in the extension chamber in series with every coated chamber. The thickness of coating on the ribbon sample shall be reported in a least 3 locations around the circumference of the ribbon.

11.6.7 Final Pressure measurement

ID NUM

(SYY-XX-) Specification

S09-94-000207 Final He leak test must comply with UHV Chamber and Component Production Requirements AL-1220-7841-Rev F, §14.4

11.6.8 HPN2 Backfill

ID NUM

S09-94-000209 HPN2 Back fill must comply with AL-1220-7841-Rev F, §14.6 ci al ly R el ea se d to th e

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11.6.9 CMM Measurement after Bakeout

(SYY-XX-) Specification

S09-94-000328 A CMM measurement must be performed on all SR VC01 and VC16 Chamber with the same critical dimension given in §8.6.1 after the bakeout

11.7 Packing and shipping

ID NUM

S09-94-000210 Packing and shipping must comply with AL-1220-7841-Rev F, §15

12 APPLICABLE DOCUMENTS

See applicable document table 11-1 in the AL-1704-8931-Rev A, SR - VC01 & VC16 – SOW.

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