23-3B1 Task Order Sustainment PWS_R1.docx

PERFORMANCE WORK STATEMENT (PWS)

DMEA 23-3B1

Date TBD Contract Officer Representative: Kwissy Ang, DMEA/MEXA, (916) 999-2610

1.0 SCOPE

1.1 TITLE: Manufacturing Sustainment & Engineering Support

1.2 APPLICABILITY: Study, integrate, enhance and provide engineering support for wafer processing and microelectronics-based activities of the DoD’s only semiconductor foundry, DMEA’s Advanced Reconfigurable Manufacturing for Semiconductors (ARMS) Foundry, and activities of the DMEA’s Integrated Circuits Manufacturing Support Labs (ICM-SL) mission requirements.

1.3 PURPOSE: The ARMS Foundry utilizes advanced semiconductor solutions to resolve obsolescence issues, add capability, improve performance, improve reliability, improve maintainability, and improve availability of microelectronics-based weapons systems. This task order will provide operations and engineering support for the ARMS Foundry and ICM-SL through resources, equipment and operations activities. Additionally, this task may provide recommendations that enhance and/or support ARMS Foundry and ICM-SL activities for the processes that are installed, are being installed, and/or are planning to be installed. This task will ensure that the ARMS Foundry and ICM-SL meet or exceed performance metrics according to section 3.3 Task Requirements.

2.0 REFERENCED GOVERNMENT PROVIDED RESOURCES

2.1 GOVERNMENT DOCUMENTS:

OI Number: 9

Equipment & Personal Property

2.2 OTHER DOCUMENTS:

2.3 GOVERNMENT FURNISHED PROPERTY: This task includes the use of accountable government furnished property (GFP). Please see the GFP attachment to this letter.

2.4 GOVERNMENT FURNISHED INFORMATION:

Exhibit 1. DMEA ARMS Foundry Equipment and Parts List_Best Effort

Upon Request

Exhibit 2A. DMEA PAS Lab General Lab Equipment and Parts List

Upon Request

Exhibit 2B. DMEA Microcircuit Assembly Equipment and Parts List

Upon Request

Exhibit 2C. DMEA Printed Circuit Board Assembly Equipment and Parts List

Upon Request

Exhibit 4. DMEA SEGIT Lab Equipment and Parts List

Upon Request

Exhibit 5. DMEA Test Lab Equipment and Parts List

Upon Request

Exhibit 7. Wafer Requirement Estimate & Approved Vendors

Upon Request

Exhibit 8. Gases and Chemicals List

Upon Request

Exhibit 10. Outsource Services Estimates for Foundry

Upon Request

Exhibit 11A. Outsource Services Estimates for Microcircuit Assembly

Upon Request

Exhibit 11B. Outsource Services Estimates for Printed Circuit Board Assembly

Upon Request

Exhibit 12. Outsource Services Estimates for Satellite Telecommunications

Upon Request

Exhibit 13. Past Purchase History of CPC Materials (20XX-20XX)

Upon Request

Exhibit 14. Current Facility Drawings for ARMS and ICM-SL (Hardcopy)

Upon Request

Exhibit 15A. Contractor Facilities, Foundry, and ICM-SL Training Requirements

Upon Request

Exhibit 15B. Contractor IT Training and Certification Requirements

Upon Request

Exhibit 16. Past ARMS Foundry Shutdown Schedules (2020, 2021, 2022)

Upon Request

Exhibit 17. ARMS Foundry Certification Requirement

Upon Request

Exhibit 18. Sample Tool Maintenance Documents

Upon Request

Exhibit 19: DMEA Facility Requirement List

Upon Request

2.5 GOVERNMENT FURNISHED FACILITIES/ACCESS:

Facility/Access Note: Access may be time-sensitive and escorts may be required.

Date

3.0 REQUIREMENTS

3.1 GENERAL REQUIREMENTS

3.1.1 NOTIFICATION OF RIGHTS: The Contractor shall identify and receive written government approval from the Procuring Contracting Officer (PCO) prior to committing to the use of any privately developed items, components, processes, computer software, and/or technical data which they:

(i) Intend to deliver with Limited Rights

(ii) Intend to deliver with Government Purpose Rights

(iii) Intend to deliver with Restricted Rights

(iv) Have not yet determined if such rights should apply

3.1.2 GOVERNMENT-FURNISHED PROPERTY AND SERVICES: The Government will provide the facilities, equipment, materials, and services listed in the GFP attachment. The contractor shall contact the COR if replacement of GFE becomes necessary. (A003)

3.1.3 DISPOSITION OF EXCESS MATERIAL AND CAP: The Contractor shall deliver a list of all Contractor Acquired Property (CAP) items. Excess material and CAP shall be dispositioned in accordance with the Government Property clause in Section 3.1.2 in this contract and the Contractors approved property management system. (A003)

3.1.4 GOVERNMENT INFORMATION SYSTEMS: Per DoD 8570.01-M and DMEA OP-8570.01 and DFARS 252.239.7001, all Contractor employees and associated subcontractor employees supporting Information Assurance (IA)/Information Technology (IT) functions shall be trained before issuance of network access. All Contractor employees and associated subcontractors shall be appropriately certified upon contract award and must comply with DOD training requirements in DOD 8570.01-M and DMEA OP-8570.01. Details of specific certifications, training, and frequency requirements can be found in Exhibit 15B.

3.1.5 POSTAL DISTRIBUTION: The Contractor is responsible for all business related postage services to include but not limited to: Federal Express, United Parcel Service, and United States Postal Service fees.

3.2 PROGRAM MANAGEMENT

3.2.1 MANAGEMENT AND ADMINISTRATIVE SUPPORT: The Contractor shall perform program, administrative, technical, and financial management during the course of this effort and shall maintain a status of their effort towards achieving the PWS objectives, including all technical activities and efforts, problems/deficiencies, impacts, and recommended solutions. (A001)

3.2.1.1 DOCUMENTATION AND FAMILIARIZATION: The Contractor shall provide documentation, self-paced tutorials and familiarization for equipment, software, and processes purchased in conjunction with this task. The Contractor shall provide on-site familiarization on the maintenance and use of the installed equipment. The extent of this familiarization shall consist of that which is normally provided by the manufacturer to operate and maintain the installed equipment and process. The documentation shall be delivered as needed during the installation and integration of the equipment and processes. The Contractor shall provide installation drawings for newly acquired equipment and facility modifications required to install the equipment. (A010)

3.2.1.2 MEETINGS: The Contractor shall participate and/or lead in meetings with stakeholders as required. These meetings may include but is not limited to:

TOOL STATUS MEETINGS: The Contractor shall coordinate tool status meetings as required, anticipated to be held weekly. Meeting minutes and/or a report of each meeting shall be furnished to the Government within two (2) working days or sooner.

PROGRESS MEETINGS: The Contractor Project Manager shall present progress status updates to the COR(s) as required, anticipated to be held monthly. Other project specific planning/progress meetings shall be coordinated between the Contractor and respective stakeholders as required.

PROGRAM MANAGEMENT REVIEW (PMR) MEETINGS: The Contractor shall present program performance status updates to the COR(s) as required, anticipated to be held quarterly. Presentation copies and meeting minutes shall be furnished to the Government.

TECHNICAL INTERCHANGE MEETING (TIM): The Contractor shall conduct TIMs as necessary in the performance of this task. The TIM with the Contractor shall be scheduled when there is need for technical interchange between the government and the Contractor. The content of the meeting can include the discussion of any information that has impact upon the task activities, including documentation contents or format. (A002)

3.2.1.3 QUALITY AND ENVIRONMENTAL: The Contractor shall adhere to the existing ISO 9001 Quality Management Program of the Foundry and ISO/IEC-17025 of the ICM-SL’s Science Engineering Gamma Irradiation Test (SEGIT) lab. The Contractor shall comply with DMEA’s licensing, permits, and inventory control systems in the handling and storage of hazardous materials and installation, integration, and operation of hazardous materials ordering, acceptance, monitoring, and control systems. The Contractor shall decommission and dispose of any equipment not integrated into the existing or new processes according to OI Number: 9, reference to section 2.1

3.2.1.4 TRAVEL: The Contractor is required to travel to accomplish this requirement. Additional/changed travel requiring an increase in delivery order funding shall be forwarded to the PCO for approval prior to travel. If an increase in delivery order funding is not required, the Contractor shall notify the DMEA COR, in writing, of additional/changed travel. Additional/changed travel shall be briefed at DMEA Program Management Reviews (PMRs) and/or Progress Meetings.

3.2.2 CONTRACTOR PERSONNEL: For the purpose of this contract, the term "Contractor Personnel" applies to all Contractor Personnel, subcontractor personnel, or any other person(s) acting for or on behalf of the Contractor to perform work on this contract. The Contractor shall provide necessary personnel to accomplish all Contract work and services within specified time frames. The Contractor shall ensure that sufficient personnel are fully trained, certified, and/or licensed under the requirements specified in Exhibits 15A and 15B. The Contractor's work shall include all planning, programming, administration, and management necessary to provide services as specified in this contract. Contractor personnel shall be in compliance with all applicable Federal, State and local laws, policies, procedures, regulations, codes, and directives. The Contractor shall ensure that all work meets critical reliability rates or tolerances specified throughout this contract.

3.2.2.1 KEY CONTRACTOR PERSONNEL: Key Contractor personnel may include the following: Program Manager, Project Manager, Maintenance Engineers, Implanter Specialist, Technician, Contract and Purchasing Specialist. Contractor is encouraged to propose personnel in the most efficient way possible. Key on-site personnel shall be required to obtain and maintain a Secret clearance. If any of the Key Contractor Personnel become unavailable for work under this contract for a continuous period exceeding 30 days, have any change in work status, or are expected to devote less effort to the work than required by this contract, the Contractor shall immediately notify the Contracting Officer (CO) and Contracting Officer’s Representative (COR) in writing. The Contractor shall replace such personnel with personnel of at least equal abilities and qualifications, as approved by the CO, unless stated otherwise by the CO. The Contractor shall submit resumes for all key personnel to the Contracting Officer’s Representative (COR). If the Contractor changes designated key personnel or alternate key personnel prior to contract start date or during the life of this contract, the Contractor shall submit the name, resume, and appropriate documentation necessary to substantiate qualifications of proposed replacement personnel. Proposed changes shall be submitted 30 days in advance or as soon as the Contractor is aware of the position being vacated. Appropriate documentation is defined as training certificates, copies of technical certifications or technical school transcripts, or other material necessary to support the qualifications of the replacement personnel.

Program Manager (PM). Has overall responsibility for execution of this contract and/or task orders. PM proposed shall have a recognized four-year college degree or equivalent experience in engineering, business management, or related field. However, contractor may substitute education with substantial experience managing and supervising cleanroom/sustainment projects.

Maintenance Engineer. Maintenance engineers proposed shall have a minimum of four (4) years of direct experience with tools specified in Exhibits 1-5, excluding Ion Implantation tools, to perform preventative maintenance services; diagnosing, repairing, and acquiring parts to keep equipment in working order; coordinating tool upgrades, subcontractor preventative maintenance and repair services, and provide emergency and after hours support as needed.

Implanter Specialist. Has direct responsibility for the Ion Implantation (I/I) tools specified in Exhibit 1. Specialist proposed should have a minimum of four (4) years of direct experience with Ion Implantation (I/I) tools listed in Exhibit 1 and exhibit familiarity with the various OEM specifications per tool. Implanter Specialist should have substantial experience with preventative maintenance services; diagnosing, repairing and acquiring parts to keep equipment in working order; coordinating tool upgrades as needed; providing Implanter parts cleaning services; and providing emergency and after hours support as needed.

Foundry Technician. Has responsibility for daily foundry/lab operations support, including but not limited to performing periodic tool qualification tasks according to established specification. Other responsibilities include but not limited to clerical and inventory management tasks, chemical and gas support, foundry/lab capability enhancement oversight, preventative equipment/tool maintenance. Desirable qualification for proposed technician has two (2+) years of experience with cleanroom operations, preferably with direct experience with tools listed in Exhibit 1. However, Contractor may substitute education for the required experience. Technician proposed shall meet established requirements according to Standard Operating Procedures (SOPs) and Process Qualification Procedures, accountable to adhering to all quality and safety guidelines and requirements.

Contract and Purchasing Specialists. Has responsibility for execution of contract task orders and purchasing/receiving activities. Specialist proposed shall have substantial experience executing contract and purchasing/receiving activities to support cleanroom operation and/or wafer fabrication facility, forecasting needs for service, and preferably with direct experience with equipment listed in Exhibits 1-5, gases and chemicals listed in Exhibit 8, has experience with vendors listed in Exhibits 7-12.

3.2.2.2 CONTRACTOR EMPLOYEES: The Contractor shall ensure that sufficient personnel are fully trained, certified, and/or licensed with respect to their task order responsibilities under the requirements specified in Exhibit 15A and 15B. All employees shall be citizens of the United States (US). The Contractor shall not employ any person for work on this contract if such person is identified to the Contractor as a potential threat to the health, safety, security, general well-being, or operational mission of the DMEA campus and its population. The Contractor shall maintain the workforce in such a manner as to ensure that this contract workforce continues to meet the skill qualifications necessary to perform the work required of this contract. Where reading, understanding, and discussing safety and environmental warnings are an integral part of a Contractor’s employee’s duties, that employee shall be able to understand, read, write, and speak English, except where a Contractor employee is hearing impaired.

3.2.2.3 CONTRACTOR PERSONNEL APPEARANCE AND IDENTIFICATION: Contractor personnel shall present a neat appearance and be easily recognized as Contractor employees. Contractor and subcontractor personnel shall be readily identifiable as Contractor personnel and not Government employees via a DMEA-provided badge. Contractor personnel shall wear the ID badge at all times when performing work under this contract. Unless otherwise specified in the contract, each Contractor employee shall wear the ID badge in a conspicuous place on the front of exterior clothing and above the waist except when safety, health, or PPE reasons prohibit. Upon expiration or termination of this contract, task orders or of the employment of any individual, the Contractor shall collect and return to DMEA all affected employee's ID badges. If any are not collected, the Contractor shall notify the Contracting Officer’s Representative (COR) within 24 hours upon expiration or termination of this contract or the employment of any individual, whichever occurs first.

3.2.2.4 PERSONNEL QUALIFICATIONS: Before allowing employees to start work under the terms of this contract, the Contractor shall ensure that employees have the required qualifications and, if applicable, have the required current and valid professional certifications or licenses, in compliance with federal, state, and local environmental requirements or laws. Personnel operating motor vehicles will have a valid state driver’s license and necessary equivalent certifications.

3.2.2.5 EMPLOYMENT RESTRICTIONS. The Contractor shall not employ any person who is an employee of the US Government if employing that person would create a conflict of interest (COI) or the appearance of a COI. Additionally, the Contractor shall not employ any person who is an employee of the Department of Defense (DOD), either military or civilian, unless such persons seek and receive approval according to DOD Directive 5500.7, Joint Ethics Regulations (JER).

3.2.2.6 EMPLOYEE CONDUCT. The Contractor shall be responsible for the performance and conduct of Contractor and subcontractor personnel at all times. Personnel employed by the Contractor in the performance of this contract, or any representative of the Contractor entering the general locations listed in this contract, shall abide by the security regulations listed in the contract and shall be subject to such checks by the Government, as deemed necessary. Personnel shall not loiter in any working or patron area. Upon completion of their assigned duties, personnel shall depart the facility. Personnel shall not have possession of or be under the influence of alcohol or controlled substances to perform work under this contract. The Contractor shall provide and ensure that all personnel are appropriately dressed, including individual protective clothing and equipment, for the work to be performed. The Contractor shall remove from the job site any employee for reasons of misconduct or security. IAW DOD Directive 5500.7-R, “Joint Ethics Regulation”, Contractor employees must avoid being improperly influenced in the execution of their duties under this contract. Particular attention shall be paid to acceptance of gifts/ gratuities, and on non- disclosure of sensitive or classified information. The Contractor shall ensure employee conduct complies with 41 U.S.C 423 relative to release of acquisition related information or actions or discussions which may prejudice future competitions. The Contractor shall ensure no Contractor employees conduct political related activities or events on, at, or around DMEA Facilities.

3.2.2.7 CONTRACTOR PERSONNEL REMOVAL. The Government may bar an individual from the DMEA campus for conduct that is determined contrary to good order, discipline, or security. The Contractor shall collect and return all affected contract personnel ID badges to the COR. Such removals may not impact the performance of this contract and do not justify an adjustment of contract pricing.

3.2.2.8 PERSONNEL SECURITY CLEARANCES. The Contractor shall pre-screen all contractor personnel and also provide the required information for background checks to meet DMEA access requirements in order to obtain personnel security clearances, when required, in accordance with individual task order PWS requirements and shall maintain clearances throughout the task order Period of Performance (POP).

3.2.2.9 ACCESS AND GENERAL PROTECTION/SECURITY PROCEDURES: All Contractor and all associated subcontractors employees shall comply with applicable DMEA campus access and local security policies and procedures (provided by Government representative). The Contractor shall also provide the information required for background checks or background investigation and to meet installation access requirements to be accomplished by the DMEA Security Office. Contractor workforce must comply with all personal identity verification requirements as directed by DOD, DMEA, and/or local policy. In addition to the changes otherwise authorized by the changes clause of this contract, should the Force Protection Condition at the DMEA site change, the DMEA may require changes in Contractor security matters or processes.

3.2.2.10 PERSONNEL ROSTER: The Contractor shall provide the COR a roster of Contractor personnel employed under this contract by location. This roster shall show each employee's name, position title, security clearance (if applicable), and shift the employee is scheduled to work. The roster shall also provide a telephone number for the Program Manager, Project Manager, and alternates.

3.2.2.11 ESCORTING OF EMPLOYEES: All Contract employees, including subcontractor employees who are not in possession of the appropriate security clearance or access privileges, will be escorted in areas where they may be exposed to classified and/or sensitive materials and/or sensitive or restricted areas.

3.2.2.12 HOURS OF OPERATION: The Contractor shall perform the services required under this contract primarily during the duty hours of 0630 to 1730, Monday through Friday. Additional hours may be scheduled to accomplish activities to minimize impact to mission requirements.

3.2.2.12.1 Work Restrictions: There may be mission situations that require the Contractor to work other than normal duty hours and during holidays. Examples of these situations are military and/or distinguished visitors, contingency operations, or weather emergencies. When access to a work area conflicts with the mission requirement, work will be scheduled to minimize the disruption. Such scheduling may require work to be accomplished at times other than normal duty hours. Work may be cancelled or postponed at short notice, and will be rescheduled at no cost to the Government.

3.2.2.12.2 Hours of Operation Other Than Normal. The Contractor shall schedule work activities to minimize impact on the facility and respective labs. Scheduled maintenance work that is canceled due to mission requirements will be rescheduled without additional cost to the Government.

3.2.2.12.3 Emergency or Special Event Services. Temporary and emergency power generation services may be necessary to accomplish certain maintenance, repair, and new service connections. Such temporary and emergency services will be coordinated with the COR and shall be accomplished using methods to avoid service interruptions, where possible, or to minimize system downtime where such interruptions of service are unavoidable. The COR will be notified of the scheduled temporary service conditions at the time of job scheduling and will be notified of all service interruptions as soon as possible, with notification time NTE one hour after Contractor identifies emergency situation. For purposes of this specification, an emergency situation is defined as any condition that requires immediate action to eliminate hazards to life or serious injury hazards to personnel, prevent loss or damage to Government property, or restore essential services.

Emergency Services. The Contractor may be required to respond to emergency situations with qualified personnel outside of normal duty hours. If required, emergency work outside of normal duty hours will be performed IAW the corrective maintenance processes.

Special Events. The Contractor may be required to provide O&M related services to support special events during and outside of normal duty hours for anticipated special events that include, but are not limited to open house, distinguished visitor support, exercises, change-of commands, and inspection preparation.

3.2.2.14 TRUSTED FACILITIES: The Contractor must be familiar with and comply with the DMEA 5200 Operating Procedures whenever the ARMS Foundry and/or ICM-SL operate in Normal and Trusted Mode(s).

3.2.2.15 FACILITY ACCESS: The Contractor shall provide a list of personnel and locations requiring unescorted and escorted access to perform this task. (A008)

3.3 TASK REQUIREMENTS

3.3.1 EQUIPMENT SUSTAINMENT

3.3.1.1 PREVENTATIVE MAINTENANCE (PM) AND REPAIR: The Contractor shall schedule, coordinate and perform/provide systematic and scheduled cyclic check, inspection, and correction of minor deficiencies, as well as reporting of deficiencies, to preserve and/or maintain equipment, system, system feature, and/or components in such a condition that it may be effectively used for its designated functional purpose. Preventive maintenance includes the accomplishment of minor maintenance and repair. Maintenance includes work to sustain the equipment and/or its components, or to investigate and identify the source of deficiencies. Preventive maintenance may include any or all of the following actions: inspection, testing, cleaning, lubrication, adjustment, calibration, minor repairs, and part or component replacement and programming as required. Maintenance work that is required to be performed on an ongoing, recurring basis, such as daily, weekly, monthly, semiannually, annually, or biannually. The Contractor shall submit PM requirements and schedule status updates to the COR.

The Contractor shall coordinate escort badging requests and provide escort duties for Original Equipment Manufacturer (OEM), approved vendor, and/or field service engineer/technician. The Contractor shall oversee on-site PM actions including obtaining, where applicable, updated certificates/documents, service check list, field service reports, and/or repair action summaries. The contractor shall ensure that Quality Program records are collected, maintained and retained in the ARMS and ICM-SL document repository system. At a minimum the following documents shall be collected/retained, Purchase Orders, Calibration Certificates, Field Service Reports and Service Checklist. Where required, the Contractor shall coordinate with the government lab representative, package appropriately the equipment to prevent any damage, and ship equipment to the approved vendor. The Contractor shall monitor equipment to and from the service destination, ensure all services are appropriately rendered by the approved vendor, and upon equipment return recommission the system at its respective location. A list of OEMs, approved vendors and/or past contracted service organizations for PM or calibration actions are specified in Exhibits 1,2,4,5 respectively for the ARMS and ICM-SL. The government will provide the minimum required number of frequencies for each PM action and/or calibration for each equipment as specified in Exhibits 1,2,4,5.

3.3.1.2 CORRECTIVE MAINTENANCE (CM) AND EMERGENCY REPAIR: The Contractor shall schedule, coordinate and perform/provide unscheduled corrective maintenance, emergency repairs, ad-hoc calibrations and/or upgrades due to a failure as required to restore the equipment, system, system feature, or component to a specified condition IAW maintenance standards requirements. Corrective maintenance may include but is not limited to the following steps: localization, isolation, disassembly, interchange, reassembly, alignment, and checkout as specified. Corrective maintenance shall require the replacement of a system or feature if beyond economical repair as specified. Corrective maintenance shall include repair as required to support the equipment, system, system feature, or mission requirement as specified.

The Contractor shall coordinate escort badging requests and provide escort duties for Original Equipment Manufacturer (OEM), approved vendor, and/or field service engineer/technician. The Contractor shall oversee on-site CM actions, emergency repairs, calibrations and/or upgrades including obtaining, where applicable, updated certificates/documents, field service reports, and/or repair action summaries. The contractor shall ensure that Quality Program records are collected, maintained and retained in the ARMS and ICM-SL document repository system. At a minimum the following documents shall be collected and retained, Purchase Orders, Calibration Certificates, Field Service Reports and Service Checklist. Where required, the Contractor shall coordinate with the government lab representative, package appropriately the equipment to prevent any damage, and ship equipment to the approved vendor. The Contractor shall monitor equipment to and from the service destination, ensure all services are appropriately rendered by the approved vendor, and upon equipment return recommission the system at its respective location. A list of OEMs, approved vendors and/or past contracted service organizations for CM or emergency repair actions are specified in Exhibits 1-5 respectively for the ARMS and ICM-SL. The government will notify and/or coordinate with the contractor if a CM, emergency repair, and ad-hoc calibration and/or upgrade actions for each equipment as specified in Exhibits 1,2,4,5.

3.3.1.3 EQUIPMENT MAINTENANCE SUPPLIES AND PARTS: The Contractor shall acquire materials, supplies and/or parts to ensure no interruption of operations occur. Equipment maintenance supplies may include but is not limited to: hardware, electrical, electronics, adhesives, batteries, fasteners, lighting, pumps, pipes, hose, tubes, fittings, valves, sensors. The Contractor shall notify DMEA of any issues arising with supply chains, recommend alternative supplier with supporting data, and coordinate qualification of replacement.

3.3.1.4 ISO AND IEC QUALITY STANDARDS AND VERIFICATION: Ensure that calibrations and conformance tests for SEGIT Facility equipment (see Exhibit 4) come from ISO/IEC-17025 accredited sources. The requirement for ISO/IEC-17025 must be included on any/all documentation including but not limited to as-found/as-left data, request for quotation, purchase order, and purchase request. Documentation should be provided per metric defined in section 3.3.1.6.4.

3.3.1.5 MAINTENANCE STANDARDS: Minimum acceptable standards will be according to the procedures contained in applicable preventive maintenance standards manuals and manufacturers published maintenance guidance. The preferred document shall be the manufacturer’s recommendations as modified for site conditions and requirements. If manufacturer’s recommendations are more stringent than industry standards, the Contractor will notify the COR for approval prior to implementation.

3.3.1.6 EQUIPMENT OPERATING SYSTEM MAINTENANCE: The Contractor shall ensure that the Operating System, any Relational Database Management System Software, and Third-Party software/hardware is supported by both the system and/or software vendors for the system lifecycle with system updates and security patches as need. System Software includes, but is not restricted to, micro-code embedded in hardware (i.e., “firmware”), operating systems, communications, system and network management, and utility software.

3.3.1.6 PERFORMANCE MEASURES

3.3.1.6.1 ARMS Foundry Maintenance Metrics: The Contractor shall perform/provide periodic equipment preventive maintenance (PM), corrective maintenance (CM), and/or repairs listed in Exhibit 1. Performance metrics are listed as follows:

(time from “Unknown” to any equipment repair state):

within one (1) working day

(process issue and/or more repair needed due to PM) 10 per year

3.3.1.6.2 PAS Lab Maintenance Metrics: The Contractor shall perform/provide periodic equipment calibration, preventive maintenance (PM), corrective maintenance (CM), and/or repairs listed in Exhibit 2. Performance metrics are listed as follows:

(time from “Unknown” to any equipment repair state) within one (1) working day

3.3.1.6.3 SEGIT Lab Maintenance Metrics: The Contractor shall perform/provide periodic equipment preventive maintenance (PM), corrective maintenance (CM), and/or repairs listed in Exhibit 4. Performance metrics are listed as follows:

3.3.1.6.4 Test Lab Maintenance Metrics: The Contractor shall perform/provide periodic equipment preventive maintenance (PM), corrective maintenance (CM), and/or repairs listed in Exhibit 5. Performance metrics are listed as follows:

3.3.1.6.5 SAFE Lab Maintenance Metrics: The Contractor shall perform/provide corrective maintenance (CM), and/or repairs as requested and approved by COR. Performance metrics are listed as follows:

3.3.2 OPERATIONS SUPPORT

3.3.2.1 INVENTORY MANAGEMENT: Inventory records shall be computerized by the Contractor using a Government-provided commercial software program. The Contractor shall be responsible for entering all data required to establish and maintain records for new and existing Commercial Parts Code (CPC) inventory including inputting/modifying data, generating reports, performing work reception related work (i.e., receiving and inputting information relating to inventory, generating Purchase Order (PO) reports, inputting completed PO data, etc.), and other data entry/maintenance/output activities.

3.3.2.2 DOCUMENT MANAGEMENT: The Contractor shall ensure proper documentation management support. Support may include but is not limited to data input, report generations, collection of Safety Data Sheets with respective acquired gases and chemicals, and calibration certification management via software programs managed by DMEA, including but not limited to current and future DMEA’s Configuration Management system(s).

3.3.2.3 GARMENT CLEANING: The Contractor shall ensure cleanroom garments and ESD lab coats are monitored, stocked, cleaned and properly distributed to the ARMS Foundry and ICM-SL.

3.3.2.4 MATERIALS AND SUPPLIES: The Contractor shall acquire materials and supplies to ensure no interruption of operations occur. Materials and supplies include but are not limited to: wafer carriers and boxes, cleanroom Personal Protective Equipment (PPE), HAZMAT PPE, cleanroom stationary, sticky mats, pickle jars, general cleaning and wiping cleanroom supplies, ESD-safe bags and containers (e.g., membrane boxes, gel-packs, and dissipative antistatic bags), ESD-labels and ESD-tape (e.g. Kapton), Desiccant packs, moisture indicator cards, moisture sensitivity level-labels, artificial graphite plates, components, ceramic packages, combo-lids, PCB/stencil and preassembly cleaning supplies/surfactants, solder stencil cleaning/wiping fabric rolls, and wafer dicing/grinding film. The Contractor shall notify DMEA of any issues arising with supply chains, and recommend alternative supplier with supporting data, and coordinate qualification of replacement.

3.3.3 FACILITIES SUPPORT

3.3.3.1 SYSTEMS SUPPORT: The Contractor shall provide/perform facilities engineering support for coordinating facility related activities. Facility systems may include: Waste Neutralization System (WNS), Water Scrubber System, acid and base lift stations, RO/DI water system, gas monitoring system, Marathon Abatement System, Gas Bunker maintenance support, and HAZWASTE disposal/removal from DMEA site (per Paragraph 3.3.6.3). The government will provide the minimum required number of frequencies for each maintenance action for each system as specified in Exhibits 19. Additional activities may include but are not limited to: periodic waste pick up from satellite collection sites inside the foundry/ICM-SL, periodic checks inside foundry/ICM-SL for eye wash and fire extinguisher expiration dates, monitoring and re-calibration/adjustment of oxygen monitoring systems inside the PAS lab, periodic monitoring/recording/digital data transfer of desiccant cabinets’ moisture indicators, and be responsible for minor chemical spills with coordination and approval from DMEA EH&S or Facilities personnel. The Contractor shall also maintain self-contained breathing apparatus’ (SCBA) and refill the oxygen tanks. The Contractor shall follow all applicable federal, state, and local laws and regulations and the most stringent requirement shall be used when conflicting regulations are provided. The applicable regulations include but are not limited to: 29 CFR 1910 OSHA regulations, to include 1910.1200 and 1910.120; 40 CFR Parts 260-279; Title 22 of the CCR, Division 4.5, Chapters 10-50; 49 CFR 105-178.

3.3.3.2 DOCUMENT MANAGEMENT: The Contractor shall document, record, and maintain all documentation in accordance with DMEA’s Quality Program requirements. All quality program records shall be controlled, maintained and made available for auditing purposes through current and future DMEA’s Configuration Management system. In addition, the Contractor shall provide documentation, self-paced tutorials and familiarization for all equipment, software, and processes purchased in conjunction with this PWS. The contractor shall provide on-site familiarization on the maintenance and use of the installed equipment. The extent of this familiarization shall consist of that which is normally provided by the manufacturer to operate and ensure the continued operation of installed equipment and process. The documentation shall be delivered with the installation and integration of the equipment and processes, and shall adhere to DMEA’s Quality Program document-control requirements. (A010)

3.3.4 OUTSOURCE SERVICES: The Contractor shall coordinate and provide the following outsource services (see Exhibits 10-12 for specifications):

3.3.4.1 WAFER PROCESSING SERVICES: Wafer processing services may include but is not limited to: annealing, implants, wafer reclaim and polishing, dicing, wafer downsizing/laser cut down, epitaxial wafer services, laser marking, lithography, wafer thinning (Reference Exhibit 10).

3.3.4.2 WAFER FILM SERVICES: Custom film processing may include but is not limited to: thermal oxide, silicon nitride films, deposited metals, photoresist, polyimide processing, polysilicon, low particle wafer TEOS, low-K films, silicon carbide films, chemical vapor deposition (Reference Exhibit 10).

3.3.4.3 WAFER ANALYSIS/INSPECTION SERVICES: Wafer analysis and inspection services may include but is not limited to: elemental analysis, dopant profile, and device characterization (Reference Exhibit 10).

3.3.4.4 PHOTOMASK SERVICES: Mask generation, pellicilization, and photomask cleaning or re-pellicilization based upon DMEA data files. Proper verification, review and approval procedures must be followed and provided to the SME and COR (Reference Exhibit 10).

3.3.4.5 MICROCIRCUIT ASSEMBLY (MCA) SERVICES: MCA services may include but is not limited to: Wafer Grinding, Dicing, Wafer Bumping and Die Harvesting, Die Bonding, Wire Bonding, Hermetic Lid Seal, Injection Molding, Package Lead Trim, Flip-Chip, under-fill, substrate manufacturing and qualification/verification tests including Leak Tests, Constant Acceleration Tests, PIND Tests, and Environmental Stress Tests. (Reference Exhibit 11A)

3.3.4.6 PRINTED CIRCUIT BOARD and ASSEMBLY (PCBA) SERVICES: PCBA services may include but is not limited to: Printed Circuit Board (PCB) and panel fabrication, PCB design for manufacturability (DFM) analysis, PCB solder stencil fabrication, PCB soldering and assembly, rigid-flex and flex PCB Fabrication, PCB Assembly Cleaning/Rework, PCBA Conformal Coating tasks, and PCBA environmental stress tests. (Reference Exhibit 11B)

3.3.4.7 SATELLITE TELECOMMUNICATION SERVICES: The Contractor shall provide software support for the Front/Backend services including obtaining, coordinating, managing monthly airtime services and provisioning modems as outlined in the equipment vendor list. (Reference Exhibit 12)

3.3.5 SUBSTRATE WAFERS: The Contractor shall coordinate and provide substrate wafers with specifications listed in Exhibit 7 and any new type of substrates based on requirement provided by DMEA that support the processes that are installed or are being installed. The Contractor shall plan with the Project Engineer and request approval from the COR before proceeding with wafer purchases including but not limited to product wafer starting material, test wafers, and test wafers with oxide as listed in Exhibit 7.

3.3.6 GASES AND CHEMICALS: The Contractor shall obtain, monitor and coordinate the gases, chemicals and respective equipment (e.g. cylinders, parts, gas cabinet, etc.) rentals required to maintain and ensure no interruption of process operations occur due to lack of gases and chemicals in the ARMS Foundry and ICM-SL. If any issues occur with vendor supply chains the Contractor shall notify the COR, provide replacement recommendations and coordinate qualification procedures for replacement. The Contractor shall provide recommendations and coordinate acquisition and qualification for new gas, chemical and support equipment based on new requirement provided by DMEA. These gases and chemicals include but are not limited to the list in Exhibit 8.

3.3.6.1 MAINTENANCE AND DISPOSAL: The Contractor will coordinate the handling, filling, and storing chemicals and gases in appropriate designated locations including but not limited to toxic and hazardous chemicals. The Contractor shall ensure that all HAZMAT containers are clearly labeled as to contents. All HAZMAT shall be stored in accordance with requirements in the SDS, 40 CFR, 49 CFR, State of California regulation, and DMEA Fire, Safety, and Environmental regulations. The Contractor shall ensure that materials stored together are compatible. Flammable materials shall be stored in properly marked fireproof lockers or other approved containers. All HAZMAT shall be stored in such a manner as to prevent exposure to the natural elements such as rain, dust, and wind. Perishable materials shall be properly stored in the appropriate storage location (i.e. HAZMAT refrigerators and freezers) to prevent product damage and expiration. The Contractor shall ensure adequate containment, documentation, transportation, tracking, and turn-in for the disposal of HAZMAT through DMEA’s EH&S personnel. The Contractor shall coordinate quarterly foundry disposals and weekly ICM-SL disposals of contaminated or hazardous waste and hazardous gas cylinder change out as needed.

3.3.6.2 COMPLIANCE WITH LAWS AND REGULATIONS: The Contractor shall ensure that sufficient personnel are fully trained, certified, and/or licensed to work and handle hazardous materials. The Contractor shall be knowledgeable of and comply with all applicable Federal, State, and local requirements, DOD regulations, and requirements regarding environmental protection. The Contractor will ensure policies and procedures are established that protect the health and safety of employees and the community and minimize/eliminate the risk of environmental pollution. Training may include but is not limited to those listed per Exhibit 15.

3.3.6.3 MINOR HAZARDOUS SPILLS: The Contractor shall plan for minor spill cleanup, containment and neutralization of all potential HAZMAT/HAZWASTE and health hazards encountered during performance of this contract, maintaining on hand HAZMAT/HAZWASTE handling safety equipment and clothing appropriate for the materials/hazards expected to be encountered. The Contractor shall properly dispose of pails, drums, or other containers that contain or did contain HAZMAT and HAZWASTE. The Contractor shall clean up any minor HAZMAT spilled inside ARMS facilities with coordination and approval from the DMEA EH&S personnel. The incident must be reported in accordance with DMEA reporting procedures (OI 1000.3-1). The Contractor shall comply with and accomplish the operational requirements concerning HAZWASTE as defined in 40 CFR Sections 260-265 and the State of California Regulations. The Contractor shall comply with operations and training requirements as identified in applicable Federal and State of California laws, regulations, and directives.

3.3.7 CLEANROOM CLEANING SERVICES: The Contractor shall obtain, schedule and coordinate monthly cleanroom cleaning services for ARMS I – IV and quarterly services for the PAS Lab to maintain ISO 14644 levels:

3.3.7.1 ARMS FOUNDRY CLEANROOMS:

3.3.7.2 PAS LAB CLEANROOMS:

3.3.8 ARMS FOUNDRY SHUTDOWN: The Contractor shall provide/perform, schedule, coordinate, and monitor the activities of the annual ARMS foundry shutdown alongside the Government. The purpose of the annual shutdown is to ensure that foundry facility related systems’ maintenance, upgrades, repairs and/or other related items are performed according to schedule to enable reliable facility operations. Shutdown activities may include but will not be limited to: placing Purchase Orders in advance, scheduling vendors, coordinating visitor requests, coordinating scrubber cleaning/media replacement, coordinating RO/DI water sanitation, cleaning and calibrating the Waste Neutralization System (WNS), cleaning and inspecting the PAS Lab and ARMS foundry cleanrooms, calibrating cleanroom temperature humidity for both PAS Lab and ARMS foundry, coordinating waste pickups, testing leak detectors and sump level sensors, checking and restocking inventory, testing alarms, coordinating chemical cart PMs, verifying/qualifying facilities, coordinating a post-shutdown close-out meeting and turnover documentation. The Contractor shall provide/perform cleanroom certifications as listed in Exhibit 17. (A002, A009, A011)

3.4 PROGRAM SUMMARY: The Contractor shall summarize all work accomplished under this PWS, including significant technical accomplishments, problems encountered, solutions implemented, recommendations for improvement, and a comparison of planned schedules and costs with final performance. The contractor shall provide metrics as outlined in Section 3.2.1.2 in Program Management Reviews (PMRs) and final report. (A011)

4.0 DATA ITEMS: The following CDRLs apply to this delivery order and shall be submitted as described below. Indicate on the cover of all delivered data the contract number, delivery order number, PWS number, PWS title, and the current DMEA COR name and office symbol.

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