23-3A7 PWS Keithley Service 2023 Redacted.doc

PERFORMANCE WORK STATEMENT (PWS)

DMEA 23-3A7

17 January 2023 Project Engineer:

Contract Officer Representative:

1.0 SCOPE:

1.1 TITLE: Keithley Systems Service and Upgrade

1.2 APPLICABILITY: The Keithley equipment is used to support Defense Microelectronics Activity (DMEA) foundry and external customer testing requirements.

1.3 BACKGROUND: The Keithley equipment is owned by DMEA and is used to test wafers that are produced by DMEA and received from external customers. There are two (2) Keithley S530 test systems and three (3) Keithley 4200 test systems. The equipment is used to provide Process Control Monitor (PCM), semiconductor device characterization data, and semiconductor device reliability data. The equipment requires trained operators and must be vendor calibrated and/or maintained.

1.4 PURPOSE: The purpose of this PWS is to acquire maintenance/repair service, calibration services, system upgrades, and technical support for DMEA owned Keithley S530 test systems and Keithley 4200 test systems.

2.0 REFERENCED GOVERNMENT PROVIDED RESOURCES:

2.1 GOVERNMENT FURNISHED EQUIPMENT:

2.2 GOVERNMENT FURNISHED FACILITIES/ACCESS:

3.0 REQUIREMENTS:

3.1 GENERAL REQUIREMENTS:

3.1.1 RESERVED

3.2 PROGRAM MANAGEMENT: None.

3.3 TASK REQUIREMENTS: The task requirements are listed below:

1. Acquire maintenance/repair service, calibration service, and technical support for the two (2) DMEA owned Keithley S530 test systems.

2. Upgrade the three (3) DMEA owned Keithley 4200 systems to 4200A model and add the external Current-Voltage/Capacitance-voltage (I-V/C-V) Multi-Switch Module to each 4200A system.

3.3.1 CALIBRATION SERVICE REQUIREMENT: The contractor shall provide one onsite calibration service for the equipment listed below.

For each equipment calibration, the contractor must provide the following:

1. One (1) calibration sticker on equipment upon completion of service

2. One (1) calibration certificate upon completion of service.

3.3.2 MAINTENANCE/REPAIR SERVICE REQUIREMENT: The contractor shall provide one preventative maintenance and repair service as needed for the equipment listed below. Part costs are included.

3.3.3 TECHNICAL SUPPORT REQUIREMENT: The contractor shall provide technical support for DMEA for the equipment listed below. Any travel costs incurred by the technical support are covered under the service contract.

3.3.4 UPGRADE REQUIREMENT: The contractor shall provide the following upgrades for the three (3) DMEA owned Keithley 4200 systems listed below. DMEA’s Keithley 4200 systems shall be sent to the contractor’s facility where the upgrade activity shall take place and returned to DMEA once upgrade is complete. Shipping cost to contractor facility and back to DMEA will be at the contractor expense. [Note: Existing components may be replaced in the upgraded configuration as needed to meet specifications.]

3.3.4.1 Hardware Requirement: Hardware upgrade requirements are listed below

1) Upgrade shall replace the existing 4200 mainframe with the 4200A mainframe

2) Upgrade shall move existing 4200 instrument modules into the 4200A mainframe

3) Upgrade shall include an external Current-Voltage/Capacitance-voltage (I-V/C-V) Multi-Switch Module for each 4200A system

3.3.4.2 Software Requirement: Software upgrade requirements for upgraded system are listed below

1) Upgrade shall include software required for the 4200A to function and operate as designed

2) Upgrade shall include 4200A model Window 10 Operating System (OS)

3) Upgrade shall include semiconductor characterization software environment for the 4200A model

3.3.4.4 Calibration Requirement: Upgrade calibration requirement listed below

1) Upgrade shall receive a factory calibration for the instrument modules from date of upgrade

3.3.4.5 Warranty Requirement: Upgrade warranty requirements listed below

1) Upgrade shall receive a one year warranty on the mainframe and instrument modules from date of upgrade

2) Upgrade shall receive technical support under the one year warranty

3.5 SECURITY REQUIREMENT: The contractor shall provide advance notification prior to conducting any onsite maintenance/repair, calibration, and/or technical support. A forty-eight (48) hours minimum notice during normal business hours shall be given. All contractor work at DMEA shall be performed by United States citizens unless an exception is granted, in writing, by DMEA. Prior to being allowed entry, contractor personnel shall provide proof of citizenship in accordance with the DMEA visitor approval process in effect at the time the visit is requested. During periods of exceptionally heightened security, additional advance notice background investigations of contractor personnel may be required prior to gaining entry into DMEA.

3.6 PROGRAM SUMMARY: None.

4.0 POINTS OF CONTACT:

DMEA/MEBB/Project Engineer:

Address: 4234 54th Street

McClellan, CA 95652-2100

Voice:

E-Mail:

DMEA/MEBB/Contract Officer Representative:

Address: 4234 54th Street

McClellan, CA 95652-2100

Voice:

E-Mail:

SOW PWS Template 2021 June.doc