21-1A8 2021 Manufacturing Sustainment PWS 01DEC2020.pdf

PERFORMANCE WORK STATEMENT (PWS)

DMEA 21-1A8

1 December 2020 Project Engineer: Kwissy Ang, DMEA/MEF, (916) 999-2610

Contracting Officer’s Representative: Monica Lehmann, DMEA/MEFC, (916) 999-2713

1.0 SCOPE:

1.1 TITLE: 2021 Manufacturing Sustainment

1.2 APPLICABILITY: Study, integrate, enhance and/or support wafer processing and microelectronics-based activities of the DoD only semiconductor foundry, DMEA’s Advanced Reconfigurable Manufacturing for Semiconductors (ARMS) foundry, and activities of the DMEA’s Integrated Circuits Manufacturing Support Labs (ICM-SL) mission requirements. The ARMS foundry utilizes advanced semiconductor solutions to resolve obsolescence issues, add capability, improve performance, improve reliability, improve maintainability, and improve availability of microelectronics-based weapons systems.

1.3 PURPOSE: This task order will provide support for the ARMS Foundry and ICM-SL through resources, equipment and operations sustainment activities. Additionally, this task will provide recommendations that enhance and/or support ARMS Foundry and ICM-SL activities for the processes that are installed or are being installed. This task will ensure that the ARMS Foundry and ICM-SL meet or exceed performance metrics according to section 3.3 Task Requirements.

NOTE: The information described within paragraphs 1.0 through 1.3 above is given for information only and has no contractual effect.

2.0 REFERENCED GOVERNMENT PROVIDED RESOURCES:

2.1 GOVERNMENT DOCUMENTS:

Document No. Date Title OI Number: 9 Equipment & Personal Property OI Number: 16 20111001 General Receiving and Shipping OI Number: 1000.3-1 20081205 Emergency Procedures OP 5200.02 20130326 Trusted Foundry Security Plan OP 5200.05 20110203 Access Control Plan for the Trusted Foundry

2.2 OTHER DOCUMENTS:

Document No. Date Title ISO-9001:2015 20150915 Quality Management Systems – Requirements ISO/IEC-17025 2005 Quality Management System – Requirements

2.3 GOVERNMENT FURNISHED PROPERTY: This task includes the use of accountable government furnished property (GFP). Please see the GFP attachment to this letter.

2.4 GOVERNMENT FURNISHED INFORMATION:

Nomenclature Date Date Available Exhibit 1. DMEA ARMS Foundry Equipment List Upon Request Exhibit 2. DMEA Gases and Chemicals List Upon Request Exhibit 3. Equipment Vendor & Recall List for PAS Lab Upon Request Exhibit 4. Equipment Vendor & Recall List for ICM-SL Upon Request Exhibit 5. Current Facility Drawings for ARMS and ICM-SL (Hardcopy) Upon Request Exhibit 6. ARMS Foundry Equipment Recall List Upon Request

Exhibit 7. Past History & Future Need Estimate for Outsource Services Upon Request Exhibit 8. Manufacturing Sustainment Training and Certification Requirement Upon Request Exhibit 9. Past Purchase History of CPC Materials (2019-2021) Upon Request Exhibit 10. Past Annual ARMS Foundry Shutdown Schedule (2020) Upon Request Exhibit 11. Silicon Wafer History, Requirement & Approved Vendors List Upon Request Exhibit 12. ARMS Foundry Certification Requirement Upon Request Exhibit 13. Sample Tool Maintenance Documents Upon Request

2.5 GOVERNMENT FURNISHED FACILITIES/ACCESS:

Facility/Access Date Access to and utilization of ARMS Foundry, PAS, SEGIT, SAFE, RF & Design, and Test Labs will be provided as required to execute this task.

Note: Access may be time-sensitive and escorts may be required.

Upon date of award

3.0 REQUIREMENTS:

3.1 GENERAL REQUIREMENTS:

3.1.1 NOTIFICATION OF RIGHTS: The Contractor shall identify and receive written government approval from the Procuring Contracting Officer (PCO) prior to committing to the use of any privately developed items, components, processes, computer software, and/or technical data which they:

(i) Intend to deliver with Limited Rights

(ii) Intend to deliver with Government Purpose Rights

(iii) Intend to deliver with Restricted Rights

(iv) Have not yet determined if such rights should apply

3.1.2 TRAVEL: The Contractor is required to travel to accomplish this requirement. Negotiated travel is considered acceptable upon delivery order award. Additional/changed travel requiring an increase in delivery order funding shall be forwarded to the PCO for processing a delivery order modification prior to travel. If an increase in delivery order funding is not required, the Contractor shall notify the DMEA Project Engineer/customer, in writing, of additional/changed travel. Additional/changed travel shall be briefed at DMEA Program Management Reviews (PMRs).

3.1.3 DISPOSITION OF EXCESS MATERIAL AND CAP: The Contractor shall deliver a list of all Contractor Acquired Property (CAP) items. CAP items selected for delivery to the Government will be identified in an Exhibit under Section B of the contract. Excess material and CAP shall be dispositioned in accordance with the Government Property clause in this contract and the Contractors approved property management system. (A003)

3.2 PROGRAM MANAGEMENT: The Contractor shall perform administrative, technical, and financial management during the course of this effort and shall maintain a status of their effort towards achieving the PWS objectives, including all technical activities and efforts, problems/deficiencies, impacts, and recommended solutions.

(A001)

3.2.1 TECHNICAL INTERCHANGE MEETINGS (TIMs): The Contractor shall conduct TIMs as necessary in the performance of this task. The TIM with the Contractor shall be scheduled when there is need for technical interchange between the government and the Contractor. The content of the meeting can include the discussion of any information that has impact upon the task activities, including documentation contents or format. (A002)

3.2.2 DOCUMENTATION AND FAMILIARIZATION: The Contractor shall provide documentation, self-paced tutorials and familiarization for equipment, software, and processes purchased in conjunction with this task. The Contractor shall provide on-site familiarization on the maintenance and use of the installed equipment. The extent of this familiarization shall consist of that which is normally provided by the manufacturer to operate and maintain the installed equipment and process. The documentation shall be delivered as needed during the installation and integration of the equipment and processes. The Contractor shall provide installation drawings for newly acquired equipment and facility modifications required to install the equipment. (A010)

3.2.3 QUALITY AND ENVIRONMENTAL: The Contractor shall adhere to the existing ISO 9001 Quality Management Program of the foundry and ISO/IEC-17025 of the Science Engineering Gamma Irradiation Test (SEGIT) lab. The Contractor shall comply with DMEA’s licensing, permits, and inventory control systems in the handling and storage of hazardous materials and installation, integration, and operation of hazardous materials ordering, acceptance, monitoring, and control systems. The Contractor shall decommission and dispose of any equipment not integrated into the existing or new processes according to OI Number: 9.

3.2.4 FACILITY ACCESS: The Contractor shall provide a list of personnel and locations requiring unescorted and escorted access to perform this task. (A008)

3.3 TASK REQUIREMENTS:

3.3.1 CONTRACTOR PERSONNEL: For the purpose of this contract, the term "Contractor Personnel" applies to all Contractor Personnel, subcontractor personnel, or any other person(s) acting for or on behalf of the Contractor to perform work on this contract. The Contractor shall provide necessary personnel to accomplish all Contract work and services within specified time frames. The Contractor shall ensure that sufficient personnel are fully trained, certified, and/or licensed under the requirements specified in Exhibit 8. The Contractor's work shall include all planning, programming, administration, and management necessary to provide services as specified in this contract.

Contractor personnel shall be in compliance with all applicable Federal, State and local laws, policies, procedures, regulations, codes, and directives. The Contractor shall ensure that all work meets critical reliability rates or tolerances specified throughout this contract.

3.3.1.1 KEY CONTRACTOR PERSONNEL: Key Contractor personnel may include the following:

Program Manager, Project Manager, Maintenance Engineers, Implanter Specialist, Technician, Contract and Purchasing Specialist. Contractor is encouraged to propose personnel in the most efficient way possible. Key on-site personnel shall be required to obtain and maintain a Secret clearance. If any of the Key Contractor Personnel become unavailable for work under this contract for a continuous period exceeding 30 days, have any change in work status, or are expected to devote less effort to the work than required by this contract, the Contractor shall immediately notify the Contracting Officer (CO) in writing.

The Contractor shall replace such personnel with personnel of at least equal abilities and qualifications, as approved by the CO. The Contractor shall submit resumes for all key personnel to the Contracting Officer’s Representative (COR). If the Contractor changes designated key personnel or alternate key personnel prior to contract start date or during the life of this contract, the Contractor shall submit the name, resume, and appropriate documentation necessary to substantiate qualifications of proposed replacement personnel. Proposed changes shall be submitted 30 days in advance or as soon as the Contractor is aware of the position being vacated. Appropriate documentation is defined as training certificates, copies of technical certifications or technical school transcripts, or other material necessary to support the qualifications of the replacement personnel.

Program Manager. Has overall responsibility for the contract's total Operations & Management program and serves as the single point of contact and liaison between the CO and the Contractor. Program Manager proposed shall have a recognized four-year college degree in engineering, business management, or related field. Program manager proposed shall have a minimum of four (4) years of experience managing and supervising cleanroom support sustainment projects.

Project Manager. Has overall responsibility for execution of this contract and/or task orders. Project Manager (PM) proposed shall have a recognized four-year college degree or equivalent experience in engineering, business management, or related field. Project manager proposed shall have substantial experience managing and supervising cleanroom sustainment projects, preferably with direct DMEA cleanroom sustainment contract experience.

Maintenance Engineer. Maintenance engineers proposed shall have a minimum of four (4) years of direct experience with DMEA facility and tools specified in Exhibit 1, excluding Ion Implantation tools, to perform preventative maintenance services; diagnosing, repairing, and acquiring parts to keep equipment in working order; coordinating tool upgrades, subcontractor preventative maintenance and repair services, and provide emergency and after hours support as needed.

Implanter Specialist. Has direct responsibility for the Ion Implantation (I/I) tools specified in Exhibit 1.

Specialist proposed should have a minimum of four (4) years of direct experience with Ion Implantation (I/I) tools listed in Exhibit 1 and exhibit familiarity with the various OEM specifications per tool. Implanter Specialist should have substantial experience with preventative maintenance services; diagnosing, repairing and acquiring parts to keep equipment in working order; coordinating tool upgrades as needed; providing Implanter parts cleaning services; and providing emergency and after hours support as needed.

Technician. Technician proposed shall have a minimum of four (4) years of experience with cleanroom operations, preferably with direct experience with DMEA facilities and tools. Technician proposed should have demonstrated experience performing daily foundry/lab operations support, clerical and inventory management tasks, chemical and gas support, foundry/lab capability enhancement oversight, and preventative equipment/tool maintenance.

Contract and Purchasing Specialist. Has responsibility for execution of contract task orders and purchasing/receiving activities. Specialist proposed shall have substantial experience executing contract and purchasing/receiving activities to support equipment listed in Exhibit 1, 3 and 4, gases and chemicals listed in Exhibit 2, has experience with vendors listed in Exhibit 5, 7 and 9, forecasting needs for services, and preferably has direct DMEA cleanroom sustainment task order experience.

3.3.2 CONTRACTOR EMPLOYEES: The Contractor shall ensure that sufficient personnel are fully trained, certified, and/or licensed with respect to their task order responsibilities under the requirements specified in Exhibit

8. All employees shall be citizens of the United States (US). The Contractor shall not employ any person for work on this contract if such person is identified to the Contractor as a potential threat to the health, safety, security, general well-being, or operational mission of the DMEA campus and its population. The Contractor shall maintain the workforce in such a manner as to ensure that this contract workforce continues to meet the skill qualifications necessary to perform the work required of this contract. Where reading, understanding, and discussing safety and environmental warnings are an integral part of a Contractor’s employee’s duties, that employee shall be able to understand, read, write, and speak English, except where a Contractor employee is hearing impaired.

3.3.2.1 CONTRACTOR PERSONNEL APPEARANCE AND IDENTIFICATION: Contractor personnel shall present a neat appearance and be easily recognized as Contractor employees. Contractor and subcontractor personnel shall be readily identifiable as Contractor personnel and not Government employees via a DMEA-provided badge. Contractor personnel shall wear the ID badge at all times when performing work under this contract. Unless otherwise specified in the contract, each Contractor employee shall wear the ID badge in a conspicuous place on the front of exterior clothing and above the waist except when safety, health, or PPE reasons prohibit. Upon expiration or termination of this contract, task orders or of the employment of any individual, the Contractor shall collect and return to DMEA all affected employee's ID badges. If any are not collected, the Contractor shall notify the Contracting Officer’s Representative (COR) within 24 hours upon expiration or termination of this contract or the employment of any individual, whichever occurs first.

3.3.2.2 ACCESS AND GENERAL PROTECTION/ECURITY PROCEDURES: All Contractor and all associated subcontractors employees shall comply with applicable DMEA campus access and local security policies and procedures (provided by Government representative). The Contractor shall also provide the information required for background checks or background investigation and to meet installation access requirements to be accomplished by the DMEA Security Office. Contractor workforce must comply with all personal identity verification requirements as directed by DOD, DMEA, and/or local policy. In addition to the changes otherwise authorized by the changes clause of this contract, should the Force Protection Condition at the DMEA site change, the DMEA may require changes in Contractor security matters or processes.

3.3.2.3 PERSONNEL ROSTER: The Contractor shall provide the COR a roster of Contractor personnel employed under this contract by location. This roster shall show each employee's name, last four digits of social security number, position title, security clearance (if applicable), and shift the employee is scheduled to work. The roster shall also provide a telephone number for the Program Manager, Project Manager, and alternates.

3.3.2.4 ESCORTING OF EMPLOYEES: All Contract employees, including subcontractor employees who are not in possession of the appropriate security clearance or access privileges, will be escorted in areas where they may be exposed to classified and/or sensitive materials and/or sensitive or restricted areas.

3.3.2.5 HOURS OF OPERATION: The Contractor shall perform the services required under this contract primarily during the hours of 0630 to 1730, Monday through Friday. Outside normal business hours may be scheduled to accomplish activities to minimize impact to mission requirements.

3.3.2.5.1 WORK RESTRICTIONS: There may be mission situations that require the Contractor to work other than normal duty hours and during holidays. Examples of these situations are military and/or distinguished visitors, contingency operations, or weather emergencies. When access to a work area conflicts with the mission requirement, work will be scheduled to minimize the disruption. Such scheduling may require work to be accomplished at times other than normal duty hours. Work may be cancelled or postponed at short notice, and will be rescheduled at no cost to the Government.

3.3.2.6 TRUSTED FACILITIES: The Contractor must be familiar with and comply with the DMEA 5200 Operating Procedures whenever the ARMS Foundry and/or ICM-SL operate in Trusted Mode.

3.3.2.7 GOVERNMENT INFORMATION SYSTEMS: All Contractor employees with access to a Government info system, including the CMMS, must take all required DoD and DMEA training required to use a DMEA computer at commencement of services, and must successfully complete the DoD Information Assurance Awareness prior to access to the information systems and then annually thereafter.

3.3.2.7.1 IA/IT TRAINING AND CERTIFICATION: Per DoD 8570.01-M and DMEA OP-8570.01 and DFARS 252.239.7001, all Contractor employees and associated subcontractor employees supporting Information Assurance (IA)/Information Technology (IT) functions shall be trained before issuance of network access and annually thereafter. All Contractor employees and associated subcontractors shall be appropriately certified upon contract award and must comply with DOD training requirements in DOD 8570.01-M and DMEA OP-8570.01.

3.3.3 ARMS FOUNDRY EQUIPMENT SUSTAINMENT: The Contractor shall schedule, coordinate and perform/provide tool calibrations, emergency repairs/services, upgrades and preventative maintenance (PM) per Original Equipment Manufacturer (OEM) specifications on/for DMEA ARMS equipment listed in Exhibits 1 and 6.

The Contractor shall coordinate escort badging requests and provide escort duties for Original Equipment Manufacturer (OEM), approved vendor, and/or field service engineer/technician. The Contractor shall oversee on-site PM actions including obtaining, where applicable, updated certificates/documents, field service reports, and/or repair action summaries. A list of OEMs or approved vendors and past contracted service organizations for emergency repairs, calibrations or PM actions are specified in Exhibit 6. The government will provide the minimum required number of frequencies for each PM action and/or calibration for each tool as specified in Exhibit 1.

3.3.3.1 MAINTENANCE METRICS: The Contractor shall perform/provide periodic equipment preventive maintenance (PM), corrective maintenance (CM), and/or repairs listed in Exhibit 1 with specific requirement of sole source OEM vendors specified in Exhibit 6. Performance metrics are listed as follows:

# DESCRIPTION METRIC

1 Average unscheduled tool downtime: less than 10% 2 Documentation uploaded to DMEA Configuration Management system

(eB):

within 4 weeks of PM service completion

3 Maximum response time to tool down within one (1) working

(time from “Unknown” to any equipment repair state): day 4 Average time to repair (issue resolved / repaired; all downs): within 14 days 5 Maximum number of incidences of a tool being down for 14 days or less: 15 per year 6 Maximum number of incidences of a tool being down for 30 days or less: 10 per year 7 Maximum number of incidences of a tool being down for 90 days or less: 2 per year 8 Maximum number of incidences when comments are not entered in Tool

Logbook post repair or post maintenance:

20 per year

9 Maximum post-PM incidences (process issue and/or more repair needed due to PM):

10 per year

10 Foundry Engineering Request: Average response time to begin addressing new tool incidences. Request include tool issues not yet causing “DOWN” status, intermittent issues and/or proactive items.

within 14 days

3.3.3.2 EQUIPMENT MAINTENANCE SUPPLIES: The Contractor shall acquire materials and supplies to ensure no interruption of operations occur. Equipment maintenance supplies include but are not limited to: hardware, electrical, electronics, adhesives, batteries, fasteners, lighting, pumps, pipes, hose, tubes, fittings, valves, sensors. The Contractor shall notify DMEA of any issues arising with supply chains, recommend alternative supplier with supporting data, and coordinate qualification of replacement.

3.3.4 ARMS FOUNDRY OPERATIONS SUPPORT: The Contractor shall perform/provide operations support listed below to maintain a proper operational foundry environment.

3.3.4.1 FACILITY SUPPORT: The Contractor shall provide/perform facilities engineering support for coordinating facility related activities. Facility systems may include: Waste Neutralization System (WNS), acid and base lift stations, DI water system, gas monitors and sensors, Ecosys abatement system, HAZWASTE disposal and Gas Bunker maintenance support (per Paragraph 3.3.8.3). Additional activities may include but are not limited to: waste pick up inside foundry, periodic checks inside foundry for eye wash and fire extinguisher expiration dates, and be responsible for minor chemical spills with coordination and approval from DMEA EH&S or Facilities personnel. The Contractor shall also maintain self-contained breathing apparatus’ (SCBA) and refill the oxygen tanks. The Contractor shall follow all applicable federal, state, and local laws and regulations and the most stringent requirement shall be used when conflicting regulations are provided. The applicable regulations include but are not limited to: 29 CFR 1910 OSHA regulations, to include 1910.1200 and 1910.120; 40 CFR Parts 260-279; Title 22 of the CCR, Division 4.5, Chapters 10-50; 49 CFR 105-178.

3.3.4.2 MATERIALS AND SUPPLIES: The Contractor shall acquire materials and supplies to ensure no interruption of operations occur. Materials and supplies include but are not limited to: wafer carriers and boxes, cleanroom PPE, HAZMAT PPE, cleanroom stationary, tacimat, pickle jars, and general cleaning and wiping cleanroom supplies. The Contractor shall plan with the Project Engineer and request approval from the COR before proceeding with wafer purchases including but not limited to product wafer starting material, test wafers, and test wafers with oxide as listed in Exhibit 11. The Contractor shall notify DMEA of any issues arising with supply chains, recommend alternative supplier with supporting data, and coordinate qualification of replacement.

3.3.4.3 VENDOR ESCORTING: The Contractor shall coordinate activities between third-party vendors and DMEA including but not limited to completing escort/unescorted badging requirements and escorting third-party vendors within Government facilities when required.

3.3.4.4 DOCUMENT MANAGEMENT: The Contractor shall ensure proper documentation management support. Support may include but is not limited to data input, report generations, and calibration certification management via software programs managed by DMEA.

3.3.5 ICM-SL EQUIPMENT SUSTAINMENT: The Contractor shall schedule and coordinate tool calibrations, emergency services, upgrades and preventative maintenance (PM) per Original Equipment Manufacturer (OEM) specifications on/for DMEA ICM-SL equipment listed in Exhibit 3 and Exhibit 4. The Contractor shall provide escort duties of Original Equipment Manufacturer (OEM), or approved vendor, or field service engineer/technician.

The Contractor shall oversee on-site PM actions, including obtaining updated certificates/documentation, field service reports, and repair action summaries. The government will provide a list of OEMs or approved vendors and past contracted service organizations for emergency repairs, calibrations or PM action as specified in Exhibit 3 and

4. The government will provide the minimum required frequencies of PM actions and calibrations for each tool as specified in Exhibit 3 and 4.

3.3.5.1 MAINTENANCE METRICS: Provide support for facility coordinate activities.

# DESCRIPTION METRIC

1 Lab capabilities have average facility uptime At least 95%

3.3.5.2 EQUIPMENT MAINTENANCE SUPPLIES: The Contractor shall acquire materials and supplies to ensure no interruption of operations occur. Equipment maintenance supplies include but are not limited to: hardware, electrical, electronics, adhesives, batteries, fasteners, lighting, pumps, pipes, hose, tubes, fittings, valves, sensors. The Contractor shall notify DMEA of any issues arising with supply chains, recommend alternative supplier with supporting data, and coordinate qualification of replacement.

3.3.6 ICM-SL OPERATIONS SUPPORT: The Contractor shall perform/provide process engineering support for services listed below:

3.3.6.1 MATERIALS AND SUPPLIES: The Contractor shall acquire materials and supplies to ensure no interruption of operations occur. Materials and supplies include but are not limited to: ESD-safe bags and containers (e.g., membrane boxes, gel-packs, and dissipative antistatic bags), artificial graphite plates, components, ceramic packages and combo-lids. The Contractor shall notify DMEA of any issues arising with supply chains, recommend alternative supplier with supporting data, and coordinate qualification of replacement.

3.3.6.2 VENDOR ESCORTING: The Contractor shall coordinate activities between third-party vendors and DMEA including but not limited to completing escort/unescorted badging requirements and escorting third-party vendors within Government facilities when required.

3.3.6.3 SERVICE VERIFICATION: Verify PMs, valid calibration, repairs and upgrades of Test, Measurement, and Diagnostic Equipment (TMDE) on the equipment list to ensure continuous operation of the ICM-SL.

3.3.6.4 ISO/IEC-17025 VERIFICATION: Ensure that calibrations and conformance tests for SEGIT Facility equipment come from ISO/IEC-17025 accredited sources. The requirement for ISO/IEC-17025 must be included on any/all documentation including but not limited to as-found/as-left data, request for quotation, purchase order, and purchase request

3.3.7 OUTSOURCE SERVICES: The Contractor shall coordinate and provide wafer outsource services including but not limited to high dose implants, epitaxial deposition, chemical mechanical polishing (CMP), wafer analysis, photomask services, and satellite telecommunication services as listed in Exhibit 7.

3.3.7.1 HIGH DOSE IMPLANTS SERVICES:

3.3.7.2 EPITAXIAL DEPOSITION SERVICES: Epitaxial deposition per process specification requirement, including but not limited to current process of N-type.

High Dose Implant Substrate Energy Arsenic (As) 35, 40, 60, and 80 keV Phosphorus (P) 50 keV Boron (B) 30 keV Argon (Ar) 80 keV BF2 15 and 35 keV

3.3.7.3 CHEMICAL MECHANICAL POLISHING (CMP) SERVICES: Chemical Mechanical polishing (CMP) services per process requirement, including but not limited to current process of oxide CMP.

3.3.7.4 WAFER ANALYSIS SERVICES: Wafer processing services including but not limited to elemental analysis, dopant profile, and device characterization.

3.3.7.5 PHOTOMASK SERVICES: Mask generation, pellicilization, and photomask cleaning or re-pellicilization based upon DMEA data files.

3.3.7.6 SATELLITE TELECOMMUNICATION SERVICES: The Contractor shall provide software support for the Front/Backend services including to obtain, coordinate, manage monthly airtime services and provide modems for the ICM-SL group.

3.3.8 GASES AND CHEMICALS: The Contractor shall obtain, monitor and coordinate the gases, chemicals and respective equipment (e.g. cylinders, parts, etc.) rentals required to maintain and ensure no interruption of process operations occur due to lack of gases and chemicals in the ARMS Foundry and ICM-SL. If any issues occur with vendor supply chains the Contractor shall notify the COR, provide replacement recommendations and coordinate qualification procedures for replacement. These gases and chemicals include but are not limited to the list in Exhibit 2.

3.3.8.1 MAINTENANCE AND DISPOSAL: The Contractor will coordinate the handling, filling, and storing chemicals and gases in appropriate designated locations including but not limited to toxic and hazardous chemicals. The Contractor shall ensure that all HAZMAT containers are clearly labeled as to contents. All HAZMAT shall be stored in accordance with requirements in the SDS, 40 CFR, 49 CFR, State of California regulation, and DMEA Fire, Safety, and Environmental regulations. The Contractor shall ensure that materials stored together are compatible. Flammable materials shall be stored in properly marked fireproof lockers or other approved containers. All HAZMAT shall be stored in such a manner as to prevent exposure to the natural elements such as rain, dust, and wind. The Contractor shall ensure adequate containment, documentation, transportation, tracking, and turn-in for the disposal of HAZMAT through DMEA’s EH&S personnel. The Contractor shall coordinate quarterly foundry disposals and weekly ICM- SL disposals of contaminated or hazardous waste and hazardous gas cylinder change out.

3.3.8.2 COMPLIANCE WITH LAWS AND REGULATIONS: The Contractor shall ensure that sufficient personnel are fully trained, certified, and/or licensed to work and handle hazardous materials.

The Contractor shall be knowledgeable of and comply with all applicable Federal, State, and local requirements, DOD regulations, and requirements regarding environmental protection. The Contractor will ensure policies and procedures are established that protect the health and safety of employees and the community and minimize/eliminate the risk of environmental pollution. Training may include but is not limited to those listed per Exhibit 8.

3.3.8.3 MINOR HAZARDOUS SPILLS: The Contractor shall plan for spill cleanup, containment and neutralization of all potential HAZMAT/HAZWASTE and health hazards encountered during performance of this contract, maintaining on hand HAZMAT/HAZWASTE handling safety equipment and clothing appropriate for the materials/hazards expected to be encountered. The Contractor shall properly dispose of pails, drums, or other containers that contain or did contain HAZMAT and HAZWASTE. The Contractor shall clean up any minor HAZMAT spilled inside ARMS facilities with coordination and approval from the DMEA EH&S personnel. The incident must be reported in accordance with DMEA reporting procedures.

The Contractor shall comply with and accomplish the operational requirements concerning HAZWASTE as defined in 40 CFR Sections 260-265 and the State of California Regulations. The Contractor shall comply with operations and training requirements as identified in applicable Federal and State of California laws, regulations, and directives.

3.3.9 PERIODIC CLEANROOM CLEANING SERVICES: The Contractor shall obtain, schedule and coordinate monthly cleanroom cleaning services for ARMS I – IV and quarterly services for the PAS Lab to maintain ISO 14644 levels:

LOCATION ROOM CLASS

ARMS I Cleanroom(s) Class 4 and 5 ARMS I Hall(s) & Service Chaise Class 6 ARMS II & III Gowning Room(s) Class 5 ARMS II & III Cleanroom(s) Class 3 ARMS II & III Service Chaise(s) Class 4 and 5 ARMS IV Gowning Room Class 5 ARMS IV Cleanroom Class 3 ARMS IV Service Chaise Class 5 PAS Lab PAS Lab Class 6

3.3.10 ENHANCEMENTS AND/OR UPGRADES: Prior to the Contractor obtaining equipment/tools in support of this PWS, the Contractor shall conduct an Equipment Review at DMEA. The Contractor shall identify equipment which meets the requirements of this PWS, anticipated equipment delivery dates, anticipated equipment installation and integration dates, and any other pertinent information. The Contractor shall determine the enhancements and/or upgrade required to the existing DMEA ARMS Foundry or ICM-SL for the processes that are installed or are currently being installed. The Contractor shall generate a document that identifies the areas which may need to be enhanced and/or upgraded and the impact to the DMEA manufacturing processes. The Contractor shall present the document to DMEA at the Equipment Review/TIM. The Contractor shall identify long lead items that may require procurement. [Note: The Government will consider the use of “other than new” material if it is in the best interests of the Government.] The Contractor shall specifically identify any equipment that is to be delivered that is other than “new”, and shall provide a complete description of materials, quantity, source of acquisition, date of original acquisition, and the reason for purchasing “other than new” materials. The Contractor shall request approval from the DMEA COR before proceeding with enhancement and/or upgrade equipment purchases and/or subcontractor services. The Contractor shall provide process engineering to integrate all new equipment and capabilities into existing ARMS Foundry and ICM-SL processes. (A002, A009)

3.3.11 ANNUAL ARMS FOUNDRY SHUTDOWN: The Contractor shall provide/perform, schedule, coordinate, and monitor the activities of the annual ARMS foundry shutdown alongside the Government. The purpose of the annual shutdown is to ensure that foundry facility related systems’ maintenance, upgrades, repairs and/or other related items are performed according to schedule to enable reliable facility operations. Shutdown activities may include but will not be limited to: placing Purchase Orders in advance, scheduling vendors, coordinating visitor requests, coordinating scrubber cleaning/media replacement, coordinating DI water sanitation, cleaning and calibrating the Waste Neutralization System (WNS), cleaning and inspecting the PAS lab and ARMS foundry cleanrooms, calibrating cleanroom temperature humidity, coordinating waste pickups, testing leak detectors and sump level sensors, checking and restocking inventory, testing alarms, coordinating chemical cart PMs, verifying/qualifying facilities, coordinating a post-shutdown close-out meeting and turnover documentation. The Contractor shall provide/perform cleanroom certifications as listed in Exhibit 12. (A002, A009, A010)

3.3.12 METAL ETCHER FACILITY INSTALLATION: The Contractor shall perform the necessary facility requirements to complete the placement of the LAM TCP 9600SE Metal Etcher in the designated location in ARMS I Bay 4/ Chase 4 according to its installation requirements. The Contractor shall prepare final facility connections needed by the tool so that Supplier (Contract #HQ072720P0027) can finalize the tool installation. (A002, A009, A010)

3.4 PROGRAM SUMMARY: The Contractor shall summarize all work accomplished under this PWS, including significant technical accomplishments, problems encountered, solutions implemented, recommendations for improvement, and a comparison of planned schedules and costs with final performance. (A011)

4.0 DATA ITEMS: The following CDRLs apply to this delivery order and shall be submitted as described below.

Indicate on the cover of all delivered data the contract number, delivery order number, PWS number, PWS title, and the current DMEA Project Engineer name and office symbol.

1. Sequence Number A001

2. Title Status Report

3. Subtitle Monthly Status Report

4. Authority DI-MGMT-80368A

5. Contract Reference Para. 3.2

6. Requiring Office DMEA/ MEFC

7. DD 250 Req LT

8. App Code N/A

9. Distribution Statement Req’d DISTRIBUTON STATEMENT C. Distribution authorized to U.S.

Government agencies and their contractors, Critical Technology, 2 December 2019. Other requests for this document shall be referred to

DMEA/MEFC

10. Frequency Monthly

11. As of For cost data, information presented shall be as of the contractor’s normal financial month end-date. For all other data, information presented shall be as of the end of the calendar month.

12. Date of First Submission 10 days after the first full month of performance

13. Date of Subsequent Submission 10th calendar day of each month

14. Distribution See Distribution List

15. Total See Distribution List

16. Remarks Contractor format is acceptable. Include in the report a table/log of additional/changed travel. All eCMRA data shall be reported no later than October 31 of each calendar year.

Block 9: Mark all CDRL items with the distribution statement as shown above in Block 9 and with the following additional statement:

"The U.S. Government retains unlimited data/computer software rights to this item." If DMEA #A16-001, paragraphs (o) and

(p) are included in the delivery order, these additional statements do not apply to those items identified as technical data or computer software to be furnished with restrictions.

1. Sequence Number A002

2. Title Conference Minutes

3. Subtitle TIM Minutes

4. Authority DI-ADMN-81250A

5. Contract Reference Para. 3.2.1, 3.3.10, 3.3.11, 3.3.12

6. Requiring Office DMEA/MEFC

7. DD 250 Req LT

8. App Code N/A

9. Distribution Statement Req’d DISTRIBUTON STATEMENT C. Distribution authorized to U.S.

Government agencies and their contractors, Critical Technology, 2 December 2019. Other requests for this document shall be referred to

DMEA/MEFC

10. Frequency As Required

11. As of N/A

12. Date of First Submission 10 calendar days after TIM

13. Date of Subsequent Submission N/A

14. Distribution See Distribution List

15. Total See Distribution List

16. Remarks Contractor format is acceptable. Include presentation materials in the

TIM minutes.

Block 9: Mark all CDRL items with the distribution statement as shown above in Block 9 and with the following additional statement:

"The U.S. Government retains unlimited data/computer software rights to this item." If DMEA #A16-001, paragraphs (o) and

(p) are included in the delivery order, these additional statements do

1. Sequence Number A003

2. Title Status of Government Furnished Equipment (GFE) Report

3. Subtitle Master Government Property List of GFP, GFE, GFM and

Contractor Acquired Property

4. Authority DI-MGMT-80269

5. Contract Reference Para. 2.3 and 3.1.3

6. Requiring Office DMEA/MEFC

7. DD 250 Req. LT

8. App Code N/A

9. Distribution Statement Req’d DISTRIBUTON STATEMENT C. Distribution authorized to U.S.

Government agencies and their contractors, Critical Technology, 2 December 2019. Other requests for this document shall be referred to

DMEA/MEFC

10. Frequency As Required

11. As of N/A

12. Date of First Submission 30 days after award.

13. Date of Subsequent Submission 30 days prior to the end of the Period of Performance indicated in the

Delivery Order

14. Distribution See Distribution List

15. Total See Distribution List

16. Remarks Contractor Format Acceptable. Use DID as guidance only. The

Contractor is required to purchase material or equipment during performance of the contract. The Contractor shall maintain a Master Government Property List (MGPL) inclusive of all GFP and CAP during performance of the contract. The MGPL will consist of the following data elements as applicable: Accountable Contract, Property Description, Original Manufacturer, Type Designation, CAGE, Part Number, Model Number, Serial Number, Quantity, Item Unique Identifier or equivalent, Equipment Location, Condition of Property, Government Property Type (GFE, GFM, and CAP), Unit Acquisition Cost, and remarks. A final MGPL shall be delivered electronically in a spreadsheet using Microsoft Office Excel 30 days prior to contract completion. Final MGPL shall be suitable for close-out purposes containing use/disposition recommendations.

Block 9: Mark all CDRL items with the distribution statement as shown above in Block 9 and with the following additional statement:

"The U.S. Government retains unlimited data/computer software rights to this item." If DMEA #A16-001, paragraphs (o) and

(p) are included in the delivery order, these additional statements do

A004: Reserved A005: Reserved A006: Reserved A007: Reserved

1. Sequence Number A008

2. Title Technical Report – Study / Services

3. Subtitle Contractor Facility Access Request

4. Authority DI-MISC-80508

5. Contract Reference Para 3.2.4

6. Requiring Office DMEA/MEFC

7. DD 250 Req. LT

8. App Code N/A

9. Distribution Statement Req’d DISTRIBUTON STATEMENT C. Distribution authorized to U.S.

Government agencies and their contractors, Critical Technology, 2 December 2019. Other requests for this document shall be referred to

DMEA/MEFC

10. Frequency One (1) Time

11. As of N/A

12. Date of First Submission 2 Weeks ARO

13. Date of Subsequent Submission As Requested

14. Distribution See Distribution List

15. Total See Distribution List

16. Remarks Contractor format is acceptable.

Block 9: Mark all CDRL items with the distribution statement as shown above in Block 9 and with the following additional statement:

"The U.S. Government retains unlimited data/computer software rights to this item." If DMEA #A16-001, paragraphs (o) and (p) are included in the delivery order, these additional statements do not apply to those items identified as technical data or computer software to be furnished with restrictions.

1. Sequence Number A009

3. Subtitle Foundry and ICM-SL Upgrade Report

4. Authority DI-MISC-80508

5. Contract Reference Para 3.3.10, 3.3.11, 3.3.12

6. Requiring Office DMEA/MEFC

7. DD 250 Req. LT

8. App Code N/A

9. Distribution Statement Req’d DISTRIBUTON STATEMENT C. Distribution authorized to U.S.

Government agencies and their contractors, Critical Technology, 2 December 2019. Other requests for this document shall be referred to

DMEA/MEFC

10. Frequency As Required

11. As of N/A

12. Date of First Submission 3 MARO

13. Date of Subsequent Submission As Required

14. Distribution See Distribution List

"The U.S. Government retains unlimited data/computer software rights to this item." If DMEA #A16-001, paragraphs (o) and (p) are included in the delivery order, these additional statements do not

1. Sequence Number A010

3. Subtitle Tool Documentation and Tutorials

4. Authority DI-MISC-80508

5. Contract Reference Para 3.2.2, 3.3.11, 3.3.12

6. Requiring Office DMEA/MEFC

7. DD 250 Req. LT

8. App Code N/A

9. Distribution Statement Req’d DISTRIBUTON STATEMENT C. Distribution authorized to U.S.

Government agencies and their contractors, Critical Technology, 2 December 2019. Other requests for this document shall be referred to

DMEA/MEFC

10. Frequency As Required

11. As of N/A

12. Date of First Submission 1 Month after tool installation certification

13. Date of Subsequent Submission As Required

14. Distribution See Distribution List

"The U.S. Government retains unlimited data/computer software rights to this item." If DMEA #A16-001, paragraphs (o) and (p) are included in the delivery order, these additional statements do not

1. Sequence Number A011

2. Title Technical Report - Study/Services

3. Subtitle Final Report

4. Authority DI-MISC-80508B

5. Contract Reference Para 3.4

6. Requiring Office DMEA/MEFC

7. DD 250 Req. DD

8. App Code N/A

9. Distribution Statement Req’d DISTRIBUTON STATEMENT C. Distribution authorized to U.S.

Government agencies and their contractors, Critical Technology, 2 December 2019. Other requests for this document shall be referred to

DMEA/MEFC

10. Frequency One (1) time

11. As of N/A

12. Date of First Submission 10 days prior to the end of the period of performance indicated in the delivery order

13. Date of Subsequent Submission N/A

14. Distribution See Distribution List

"The U.S. Government retains unlimited data/computer software rights to this item." If DMEA #A16-001, paragraphs (o) and

(p) are included in the delivery order, these additional statements do

4.1 Distribution List: The contractor shall deliver electronic copies to DMEA via the DMEA Contractor Delivery Portal (https://contracting.dmea.osd.mil/FairOpp/Delivery) in Microsoft Office products or in Adobe PDF format in accordance with instructions issued 2 Dec 2013 . The contractor shall deliver electronic copies via e-mail in Microsoft Office products or in Adobe PDF format to non-DMEA personnel to the address indicated. The subject block shall contain the contract number, delivery order number, PWS number, CDRL title, and date. If this task involves classified data, the contractor shall deliver classified data in an appropriate manner to only those recipients specifically indicated in the distribution list below. For all other recipients, the contractor shall send only a cover letter in lieu of the classified data. The contractor shall ensure the security of unclassified DoD information on non- DoD information systems in accordance with DoDI 8582.01, 6 Jun 2012.

Code Copies (regular/reproducible/electronic) Address

DMEA/ MEF All deliverables: 0/0/1

If this task involves classified data, the contractor shall NOT deliver classified data to this recipient.

Deliver only cover letters in lieu of classified data.

The contractor shall ensure the security of unclassified DoD information on non-DoD information systems in accordance with DoDI 8582.01, 6 Jun 2012.

DMEA/MEF

Attn: Kwissy Ang 4234 54th Street McClellan, CA 95652-2100 DMEA Contractor Delivery Portal

DMEA/ MEFC All deliverables: 0/0/1

If this task involves classified data, the contractor shall NOT deliver classified data to this recipient.

Deliver only cover letters in lieu of classified data.

The contractor shall ensure the security of unclassified DoD information on non-DoD information systems in accordance with DoDI 8582.01, 6 Jun 2012.

DMEA/MEFC

Attn: Monica Lehmann 4234 54th Street McClellan, CA 95652-2100 DMEA Contractor Delivery Portal

DMEA/MEE

(PCO)

All deliverables: 0/0/1

If this task involves classified data, the contractor shall NOT deliver classified data to this recipient.

Deliver only cover letters in lieu of classified data.

The contractor shall ensure the security of unclassified DoD information on non-DoD information systems in accordance with DoDI 8582.01, 6 Jun 2012.

DMEA/MEE

Contracting Attn: TBD 4234 54th Street McClellan, CA 95652-2100 DMEA Contractor Delivery Portal

ACO (TBD) Monthly Status Report: 0/0/1 Meeting Minutes: 0/0/1 Final Report: 0/0/1 Master Government Property List of GFP, GFE, GFM and Contractor Acquired Property: 0/0/1

If this task involves classified data, the contractor shall NOT deliver classified data to this recipient.

Deliver only cover letters in lieu of classified data.

The contractor shall ensure the security of unclassified DoD information on non-DoD information systems in accordance with DoDI 8582.01, 6 Jun 2012.

TBD

5.0 POINTS OF CONTACT:

DMEA/ MEFC COR:

Monica Lehmann Address: 4234 54th Street McClellan, CA 95652-2100 Voice: (916) 999-2713 E-Mail: monica.k.lehmann.civ@mail.mil

DMEA/ MEF PE:

Kwissy Ang Address: 4234 54th Street McClellan, CA 95652-2100 Voice: (916) 999-2610 E-Mail: kwissy.ang.civ@mail.mil

6.0 DEFINITIONS: The definitions set forth below are those unique to this contract. In many cases, definitions are specific by situation. The total listing of definitions is not all-inclusive, but has been derived from official publications such as, regulations and TM, when available

Annual. A task that occurs or is scheduled for a single occurrence in a period of 365 days

Contractor. A supplier or vendor awarded a contract to provide specific supplies or service to the Government. The term used in this contract refers to the prime.

Contracting Officer (CO). The CO is the only person authorized to approve changes to any term, condition, or requirements of this contract, notwithstanding any provision contained elsewhere in this contract.

In the event the Contractor effects a change at the direction of a person other than the CO, the change will be considered to have been made without CO authority.

Contracting Officer’s Representative (COR). An employee of the U.S. Government appointed by the CO to administer the contract. Such appointment shall be in writing and shall state the scope of authority and limitations.

This individual has authority to provide technical direction to the Contractor as long as that direction is within the scope of the contract, does not constitute a change, and has no funding implications. This individual does NOT have authority to change the terms and conditions of the contract.

Corrective (Unscheduled) Maintenance (CM). May be performed as a result of the discovery of facility defects or the initiation of WOs and are classified as either routine, emergency, or urgent. Routine, or emergency type repairs and maintenance work required to keep the facility and equipment in such a condition that it may be utilized at its original design capacity and efficiency.

Deliverable. Anything that can be physically or electronically delivered, and may include non-manufactured things such as meeting minutes or reports.

Emergency Service Requests. Any repair work authorized in response to an emergency as defined above.

Equipment. A tangible item that is functionally complete for its intended purpose, durable, nonexpendable, and needed for the performance of a contract. Equipment is not intended for sale, and does not ordinarily lose its identity or become a component part of another article when put into use. Equipment does not include material, real property, special test equipment or special tooling.

Facility. A building, structure, utility system, pavement, and underlying land or portion thereof and other improvement or asset that has been provided a unique facility number and is contained in the Real Property Inventory as a separate entry listing. This includes all IE and building components.

Fiscal Year. A fiscal year is a period beginning October 1 and ending September 30 of consecutive calendar years.

Government or DMEA-Unique Training. Training deemed necessary by the Government for performance of a Government or DMEA contract in addition to…