Project Grant 2535437
- This $466,735 Project Grant award from the National Science Foundation (NSF) Engineering program (CFDA 47.041) supports fundamental research to develop an electron beam-activated atomic layer etching (EB-ALE) process for advanced materials manufacturing. The primary objectives are to obtain the required knowledge on the surface chemical and physical aspects of the EB-ALE mechanism, and to enable layer-by-layer etching for critical applications involving complex multi-element materials that are...
- The National Science Foundation awarded a $299,999 Project Grant to the California Institute of Technology from the Engineering program (CFDA 47.041) to support research in atomic-layer etching manufacturing processes for high-performance superconducting quantum devices. This two-year award will fund the development of atomic layer etching techniques to precisely engineer the surfaces of dielectric and metallic films used in superconducting quantum circuits. By enabling manufacturing with atomic...
- This Project Grant award, titled "ECLIPSE-CHIPS: Plasma-Produced Materials to Investigate Laser-Produced Plasmas for Microelectronics Manufacturing", is provided by the National Science Foundation (NSF) Engineering program (CFDA 47.041). The $532,000 grant, awarded on September 1, 2025, supports research to develop a new approach for generating extreme ultraviolet (EUV) radiation, which is critical for advancing photolithography techniques used in microelectronics manufacturing. The...
- This $928,455 federal Project Grant award from the National Science Foundation's Mathematical and Physical Sciences program (CFDA 47.049) supports collaborative research between the California Institute of Technology (Caltech) and the University of Nevada-Reno (UNR) to develop low-noise, high electron mobility transistors (HEMTs) using atomic layer etching techniques. The goal is to create semiconductor amplifiers with significantly improved noise performance in the microwave spectrum,...
- The National Science Foundation (NSF) awarded a $50,000 Project Grant under the Engineering program (CFDA 47.041) to The Trustees of Princeton University. The grant, titled "ECLIPSE-CHIPS: HIGH-FLUENCE COHERENT EUV LIGHT FROM ULTRAINTENSE LASER-PLASMA INTERACTIONS FOR ADVANCED NANOLITHOGRAPHY AND METROLOGY," will be used to explore advanced methods of generating extreme ultraviolet (EUV) light. This research aims to develop brighter and more coherent EUV beams, which can enable the...
- This Project Grant award from the National Science Foundation (NSF) under the Engineering program (CFDA 47.041) is providing $250,000 to the University of South Alabama to develop a scalable, replicable model for microelectronics research and clean room training through virtual reality (VR)/augmented reality (AR) and experiential learning. The project aims to transform student training at universities that lack access to specialized microelectronics facilities and equipment by leveraging...
- This National Science Foundation (NSF) Engineering program (CFDA 47.041) Project Grant award provides $250,000 to the University of Florida for a 3-year period from October 1, 2024 to September 30, 2027. The award aims to experimentally demonstrate wafer-scale 2D transistors with physical channel lengths below 5 nm, investigating the fundamental limits of these transistors to advance computational technologies beyond the "silicon-impossible" territory. The key activities include: (1)...
- This Project Grant award, provided by the National Science Foundation's Engineering (NSF ENG) program (CFDA 47.041), supports fundamental research to develop a scalable manufacturing method for preparing phase-pure ferroelectric hafnium oxide and hafnium zirconium oxide materials. The $125,152 award to Virginia Polytechnic Institute & State University (Virginia Tech) aims to advance the understanding of how atomic layer deposition process parameters impact amorphous structure and its...
- This $300,000 federal Project Grant was awarded by the National Science Foundation's (NSF) Engineering program (CFDA 47.041) to Carnegie Mellon University (CMU). The grant aims to experimentally demonstrate wafer-scale 2D transistors in the "silicon-impossible" territory (sub-5-nm channel length) and investigate their fundamental limits through a combination of experimental and theoretical efforts. Key objectives include: (1) developing a high-throughput, scalable technique for...
- This Project Grant award from the National Science Foundation's Engineering program (CFDA 47.041) provides $332,817 to the University of California, Santa Barbara (UCSB) to conduct research on novel gate-stack engineering for 2D materials-based field-effect transistors (FETs). The project aims to develop a comprehensive simulation framework and fabricate test structures to address the design, fabrication, reliability, and performance challenges of 2D semiconductor FETs. This research seeks to...
This Project Grant award, titled "TRAILBLAZER: ELECTRON-ENHANCED ATOMIC LAYER PROCESSING FOR REVOLUTIONARY THIN-FILM TECHNOLOGIES", was provided by the National Science Foundation (NSF) Engineering program (CFDA 47.041). The $3,000,000 award will fund research to develop new electron-enhanced atomic layer processing (EE-ALP) techniques that can enable the deposition and etching of electronic materials at lower temperatures compared to traditional atomic layer processing methods. Key objectives include demonstrating the EE-ALP concept, producing superconducting thin films for quantum computing "qubit" chips, and developing augmented reality/virtual reality training modules on clean room technology for students without access to such facilities. The project will be carried out by the California Institute of Technology (Caltech) from October 1, 2025 to September 30, 2028.
Mod # | Description | ReasonForModification | Federal Obligation | Date |
|---|---|---|---|---|
| Not listed | $3.0m | 8/20/25 |