Project Grant 2512062

Award Date 9/1/25
Completion Date 8/31/28
Dollars Obligated $532K
Federal Grant Program
47.041
Assistance Type
Project Grant
Place of Performance
Riverside, CA 92521, USA
Similar Awards
This $200,000 Project Grant award from the National Science Foundation's (NSF) Engineering program (CFDA 47.041) aims to advance the field of semiconductor manufacturing by addressing a critical challenge in extreme ultraviolet (EUV) photolithography. The research, conducted by the University of Washington over a two-year period from June 2025 to May 2027, will focus on developing new photoresist materials and uncovering the mechanisms behind the crosslinking and chemical etching of ultrathin...
The National Science Foundation Division of Industrial Innovation awarded $250,000 under the Engineering (47.041) federal grant program to Colorado State University to enhance the mass production of advanced integrated circuits. The project aims to develop new technology to improve the efficiency of extreme ultraviolet lithography machines used in the semiconductor manufacturing process. Extreme ultraviolet lithography entered high-volume manufacturing in 2019 and relies on laser heating of...
This Project Grant award, totaling $269,542, was provided by the National Science Foundation's Engineering program (CFDA 47.041) to Rutgers, The State University. The award supports the development of a combined numerical-experimental approach to understand and model the synthesis of large populations of advanced nanomaterials. The project aims to create a data science-based framework to enable learning, predicting, and simulating hard-to-model nanoscale fabrication processes, which are critical...
This $466,735 Project Grant award from the National Science Foundation (NSF) Engineering program (CFDA 47.041) supports fundamental research to develop an electron beam-activated atomic layer etching (EB-ALE) process for advanced materials manufacturing. The primary objectives are to obtain the required knowledge on the surface chemical and physical aspects of the EB-ALE mechanism, and to enable layer-by-layer etching for critical applications involving complex multi-element materials that are...
The National Science Foundation (NSF) awarded a $1,409,000 Project Grant under its Integrative Activities program (CFDA 47.083) to the University of California, Irvine (UCI) to acquire an electron beam lithography (EBL) system for multidisciplinary nanoscience and nanotechnology research. The EBL system will enable advanced development of nano-photonic devices, nano-bio/chemical sensors, nano-electronic devices, and nano-medical components at UCI. It will also enhance access to and affordability...
This Project Grant award for $439,599.00, provided by the National Science Foundation's Engineering program (CFDA 47.041), aims to improve a type of chemical reaction that uses both plasma (an energized gas) and catalysts. The project will design new catalysts that are better suited for plasma systems and use advanced experiments and computer models to study how plasma and catalysts interact. This fundamental research could lead to useful applications in clean energy, water treatment, and...
This $280,405 federal Project Grant award from the National Science Foundation (NSF) Engineering program (CFDA 47.041) will fund research to develop a data science-based framework for learning, predicting, and simulating the complex behaviors of large populations of advanced nanomaterials. The research aims to overcome challenges in reliably manufacturing dense populations of functional nanoparticles and nanocatalysts by combining in-situ environmental transmission electron microscopy (E-TEM)...
This Project Grant award from the National Science Foundation (NSF) under the Mathematical and Physical Sciences (CFDA 47.049) program will provide $640,000 in funding to the University of California, San Diego (UCSD) and its partners General Atomics and Extreme Light Infrastructure - Nuclear Physics (ELI-NP) in Romania. The project aims to demonstrate the generation of energetic electrons and gamma-rays in high-intensity laser-plasma interactions, which are needed for national security, nuclear...
This Project Grant award of $640,000 from the National Science Foundation (NSF) under the Mathematical and Physical Sciences program (CFDA 47.049) supports research to explore the potential for using plasma waves to generate high-power, tunable sources of structured light through frequency upshifting. The key objectives include designing innovative plasma structures capable of manipulating laser light, and building on recent theoretical work in "photon acceleration" to explore the...
The National Science Foundation awarded a $845,260 Project Grant to the University of Connecticut under the Engineering program (CFDA 47.041) from July 15, 2022 to June 30, 2025. The grant funds research to investigate plasmon-enhanced photochemistry using nanofabricated structures. Specifically, the university will design experiments combining nanofabrication and surface science techniques to measure reaction rates under controlled conditions. Goals include evaluating non-thermal...

This Project Grant award from the National Science Foundation's Engineering program (CFDA 47.041) provides $532,000 in funding to the Regents of the University of California at Riverside to conduct research on using plasma-produced tin nanoparticles as targets for generating extreme ultraviolet (EUV) radiation. The goal is to develop an improved approach to EUV generation for photolithography, a critical technology for large-scale microelectronics manufacturing. The research aims to overcome limitations of current EUV sources by systematically varying the size and density of tin nanoparticles to enhance spectral purity and emission intensity compared to droplet-based sources. This highly multidisciplinary effort involves physics, chemistry, materials science, and advanced manufacturing, and seeks to contribute to the development of a skilled workforce in semiconductor manufacturing. The project runs from September 1, 2025 to August 31, 2028.

Generated 8/5/25, 5:58 AM