Project Grant 2511879
- This Project Grant award, titled "ECLIPSE-CHIPS: Plasma-Produced Materials to Investigate Laser-Produced Plasmas for Microelectronics Manufacturing", is provided by the National Science Foundation (NSF) Engineering program (CFDA 47.041). The $532,000 grant, awarded on September 1, 2025, supports research to develop a new approach for generating extreme ultraviolet (EUV) radiation, which is critical for advancing photolithography techniques used in microelectronics manufacturing. The...
- The National Science Foundation (NSF) awarded a $50,000 Project Grant under the Engineering program (CFDA 47.041) to The Trustees of Princeton University. The grant, titled "ECLIPSE-CHIPS: HIGH-FLUENCE COHERENT EUV LIGHT FROM ULTRAINTENSE LASER-PLASMA INTERACTIONS FOR ADVANCED NANOLITHOGRAPHY AND METROLOGY," will be used to explore advanced methods of generating extreme ultraviolet (EUV) light. This research aims to develop brighter and more coherent EUV beams, which can enable the...
- This $350,026 Project Grant award from the National Science Foundation's (NSF) Engineering program (CFDA 47.041) supports research at the University of California, Los Angeles (UCLA) to address the sustainable use of etch gases in semiconductor manufacturing. The research aims to provide knowledge to discover and use novel environmentally friendly etch gases and break them down to minimize emissions. The findings are intended to benefit the U.S. economy, environment, and society, and will be...
- The National Science Foundation awarded a $237,125 Project Grant to The Leland Stanford Junior University (Stanford University) under the Mathematical and Physical Sciences federal grant program (CFDA 47.049). This three-year grant, effective from July 1, 2025 to June 30, 2028, supports an effort to advance the predictive modeling capabilities of low-temperature plasmas (LTPs) for improved fabrication of microelectronics systems. The main objective is to develop theoretically accurate and...
- This $600,000 Project Grant awarded on August 15, 2025 by the National Science Foundation's (NSF) Mathematical and Physical Sciences program (CFDA 47.049) aims to develop new machine learning (ML) tools to reconstruct plasma dynamics in basic plasma science experiments. The project, awarded to the University of California, Los Angeles (UCLA), will leverage limited experimental measurements from the Large Plasma Device (LAPD) at UCLA, along with theoretical physics models, to reconstruct...
- This $188,396 Project Grant award from the National Science Foundation's (NSF) Mathematical and Physical Sciences (MPS) Program will support the "ECLIPSE: ULTRAFAST DIAGNOSTICS AND CHARACTERIZATION OF NONEQUILIBRIUM LASER-INDUCED FILAMENT PLASMAS" research project at the University of Tennessee in Knoxville. The project aims to use novel diagnostics and machine learning to better understand the dynamics of plasma filaments formed by intense laser beams traveling through air. Key...
- This Project Grant award from the National Science Foundation (CFDA 47.084 - NSF Technology, Innovation, and Partnerships) provides $180,000.00 to the University of California, Merced to address the national need for a skilled semiconductor manufacturing workforce. The project will provide immersive learning experiences in plasma engineering and materials processing for undergraduate participants across three university campuses. Key activities include hands-on training in plasma reactor...
- This Project Grant award from the National Science Foundation (NSF) under the Mathematical and Physical Sciences program (CFDA 47.049) provides $239,922 to Appalachian State University and the University of Iowa to conduct collaborative research on mitigating particle contamination in semiconductor manufacturing. The key focus is on understanding the physical processes involved in controlling the charging and transport of particles in plasmas under modulation and afterglow conditions, in order...
- This Project Grant award from the National Science Foundation's STEM Education program (CFDA 47.076) provides $500,000 in funding to the California State University Fresno Foundation to address a national need for a skilled workforce in semiconductor manufacturing. The project will deliver immersive learning experiences in plasma engineering and materials processing for undergraduate participants across three university campuses. Key activities include hands-on training in plasma reactor...
- This $500,000 Project Grant from the National Science Foundation's Mathematical and Physical Sciences program (CFDA 47.049) supports research at Princeton University to investigate interactions between structured laser light and plasmas. The university will use high-power elliptically polarized and vortex laser beams to produce plasma harmonics with tunable polarization states for the first time. Two- and three-dimensional particle-in-cell simulations will compare to experimental results. The...
The National Science Foundation (NSF) awarded a $600,000 Project Grant to the University of California, Los Angeles (UCLA) under the Mathematical and Physical Sciences Federal Grant Program (CFDA 47.049). The ECLIPSE-CHIPS: GOALI award supports a collaborative research effort between UCLA and Lam Research Corporation, with participation from Sandia National Laboratories, to study the behavior of plasmas used in semiconductor chip manufacturing. The project aims to use laser-based techniques to measure the motion of ions and electric fields inside an industrial plasma etching tool provided by Lam Research. This research is expected to provide a better understanding of plasma-based manufacturing, which is critical for the production of modern electronics containing billions of transistors. The award period is from September 1, 2025 to August 31, 2028.
Mod # | Description | ReasonForModification | Federal Obligation | Date |
|---|---|---|---|---|
| Not listed | $600.0k | 8/14/25 |